A Study on the Electrical Properties of Thin Films by Atomic Layer Deposition Method in MOS Structure |
이형석
(고려대학교 전기공학과)
장진민 (고려대학교 전기공학과) 임장권 (고려대학교 전기공학과) 하만효 (고려대학교 전기공학과) 김양수 (고려대학교 전기공학과) 송정면 (고려대학교 전기공학과) 문병무 (고려대학교 전기공학과) |
1 | G.S. Oehrlein, F.M. d'Heurle, and A. Reisman, 'Some properties of crystallized tantalum pentoxide thin films on silicon', J. Appl. phys. Vol.55, pp.3715-3723, 1984 DOI ScienceOn |
2 | H. Shinriki, Y.Nishioka, Y.Ohij, and K. Mukai, 'Oxidized dielectric films on poly crystalline Si for DRAM's', IEEE Trans. Electron Devices, Vol.36, No.2, pp.328-332, 1989 DOI ScienceOn |
3 | 유병곤, 유종선, '신재료 고유전율/강유전체 박막의 기술 개발 동향', Journal of the Korean Institute of Electrical and Electronic Material Engineers. Vol.14, No.12. pp.22-29, 2001 과학기술학회마을 |
4 | Shin-ichiro Kimura, Yasushiro Nishioka, Akira Shintani and Kiichiro Mukai, 'Leakage-Current Increase in Amorphous Films Due to Pinhole Growh during Annealing Below ', J. Electrochem. Soc. Vol.130, pp.2414-2418, 1983 DOI |
5 | S.G. Byeon and Y. Tzeng, 'Charge trapping/generation and reliability for high-performance tantalum oxide capacitors', J. Appl. Phys. Vol.66, pp.4837-4842, 1989 DOI |
6 | D. Spassov and E. Atanassova, 'Thermal Films as a gate insulator for thin capacitors', Int. J. Electronics, Vol.84, pp.453-466, 1998 DOI |
7 | Y. Nishioka, N. Homma, H. Shinriki, K. Yamaguchi, A. Uchida, K. Higeta, and K. Ogiue, 'Ultra-Thin Dielectric Film for high-speed bipolar memories', IEEE Trans. Electron Devices., Vol.34, pp.1957-1962, 1987 ScienceOn |
8 | S.C Sun and T.F. Chen 'Reduction of Leakage current in Chemical-Vapor Deposited Thin Films by Furnace Annealing', IEEE Trans. Electron Devices., Vol.44,pp.1027- 1029, 1997 DOI ScienceOn |
9 | G.Q. Lo, D.L. Kwong, S. Lee, 'Metal-oxide-semiconductor characteristics of chemical vapor deposited Films', Appl. Phys. Lett., Vol.60, pp.3286-3288, 1992 DOI |
10 | Susumu Shibata, 'Dielectric constants of thin films deposited by r.f sputtering', Thin Solid films, Vol.277, pp.1-4, 1996 DOI ScienceOn |
11 | Young-kag Yoo, 'The Electrical conduction and Optical Properties of Thin Films by Sol-Gel Method', Journal of the Korean Institute of Electrical and Electronic Material Engineers, Vol.13, No.7, pp.575-582, 2000 과학기술학회마을 |
12 | Kwan C. Kao and Wei Hwang, 'Electrical Transport in Solids', Pergamon Press, 198113 |
13 | Fu-Chien Chiu, Jenn-Jenn Wang, Joseph Ya-min Lee, and shich Chuan Wu, 'Leakage currents in amorphous thin films', J. Appl. Phys. Vol.81, pp.6911-6915, 1997 DOI ScienceOn |
14 | S.M. Sze, 'Physics of Semiconductor Devices', John&Wiley & Sons, 1981 |
15 | S.M. Sze, Physics of Semiconductor Devices', John&Wiley & Sons, 198115 |
16 | 김창덕, 이승환, 김종관, 이동희, 성영권 '레이저 CVD법에 의한 고품질 박막의 퇴적과 그 특성', J. ENG. SCI. & TECH., Vol.33, pp.37-42, 1996 |
17 | 김창덕, 이승환, 김종관, 이동희, 성영권 '레이저 CVD법에 의한 고품질 박막의 퇴적과 그 특성', J. ENG. SCI. & TECH., Vol.33, pp.37-42, 1996 |