• Title/Summary/Keyword: TA분석

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Thermal and Adhesive Properties of Cu Interconnect Deposited by Electroless Plating (무전해도금 구리배선재료의 열적 및 접착 특성)

  • 김정식;허은광
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2001.07a
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    • pp.100-103
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    • 2001
  • In this study, the adhesion and thermal property of the electroless-deposited Cu thin film were investigated. The multilayered structure of Cu/TaN/Si was fabricated by electroless-depositing the Cu thin layer on the TaN diffusion barrier which was deposited by MOCVD on the Si substrate. The thermal stability was investigated by measuring the resistivity as post-annealing temperature far the multilayered Cu/TaN/Si specimen which was annealed at Ar gas. The adhesion property of Cu 171ms was evaluated by the scratch test. The adhesion of the electroless-deposited Cu film was compared with other deposition methods of thermal evaporation and sputtering. The scratch test showed that the adhesion of electroless plated Cu film on TaN was better than those of sputtered Cu film and evaporated Cu film.

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Characteristics of the Egg White Lysozymes from Ogol Fowl and Fowl for the Lysis of an Alkalophilic and Thermophilic Bacillus sp. TA-11 (호알칼리성, 고온성 Bacillus sp. TA-11에 대한 오골계 난백 Lysozyme의 용균특성)

  • 이성훈;조창호;안용근;이종수
    • The Korean Journal of Food And Nutrition
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    • v.9 no.4
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    • pp.447-451
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    • 1996
  • Lytic activities of the egg white lysozyme from Korea-native Ogol fowl against the alkalophilic and thermophilic Bacillus sp. TA-11 were investigated and compared. Lytic activity of the Ogol fowl lysozyme for Bacillus sp. TA-11 was the highest for the cell of post-logarithm phase and optimum concentration of the lysozyme was 0.25%, Optimum reaction pH and temperature were 4.5 and 35$^{\circ}C$, respectively. Lytic activity of egg white lysozyme from fowl for Bacillus sp. TA-11 was the highest for the cell of stationary phase and optimum concentration of the lysozyme was 0.5%. Optimum reaction pH and temperature were 5.5 and 4$0^{\circ}C$, respectively.

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Reaction Rate with Hydrogen and Hydrogen-storage Capacity of an 80Mg+14Ni+6TaF5 Alloy Prepared by High-energy Ball Milling in Hydrogen (수소 분위기에서 고 에너지 볼 밀링으로 제조한 80Mg+14Ni+6TaF5합금의 수소와의 반응 속도와 수소 저장 용량)

  • PARK, HYE RYOUNG;SONG, MYOUNG YOUP
    • Transactions of the Korean hydrogen and new energy society
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    • v.28 no.2
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    • pp.137-143
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    • 2017
  • In the present study, Ni and $TaF_5$ were chosen as additives to enhance the hydriding and dehydriding rates of Mg. A sample with a composition of 80 wt% Mg + 14 wt% Ni + 6 wt% $TaF_5$ (named $80Mg+14Ni+6TaF_5$) was prepared by high-energy ball milling in hydrogen. Its hydriding and dehydriding properties were then examined. At the fourth cycle, the activated sample absorbed 3.88 wt% H for 2.5 min, 4.74 wt% H for 5 min, and 5.75 wt% H for 60 min at 593 K under 12 bar $H_2$. $80Mg+14Ni+6TaF_5$ had an effective hydrogen-storage capacity (the quantity of hydrogen absorbed for 60 min) of about 5.8 wt%. The sample desorbed 1.42 wt% H for 5 min, 3.42 wt% H for 15 min, and 5.09 wt% H for 60 min at 593 K under 1.0 bar $H_2$. Line scanning results by EDS for $80Mg+14Ni+6TaF_5$ before and after cycling showed that the peaks of Ta and F appeared at different positions, indicating that the $TaF_5$ in $80Mg+14Ni+6TaF_5$ was decomposed.

Thermal Effects on Stoichiometric LiTaO3 Single Crystal (정비조성 LiTaO3 단결정에 대한 열처리 효과)

  • Yeom, T.H.;Lee, S.H.
    • Journal of the Korean Magnetics Society
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    • v.15 no.3
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    • pp.177-180
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    • 2005
  • Ferroelectric $LiTaO_3$ single crystals, grown by the Czochralski method, were thermally treated at temperature $1000^{\circ}C\;and\;1100^{\circ}C$. Electron paramagnetic resonance (EPR) study of stoichiometric $LiTaO_3$ and thermally treated $LiTaO_3$ crystals has been investigated by employing an X-band spectrometer. From the $Fe^{3+}$ EPR spectra, it turned out that there is no change of site location and local site symmetry around $Fe^{3+}$ impurity ion between stoichiometric and thermally treated $LiTaO_3$ single crystals. We confirmed that the ionic state of $Fe^{3+}$ ion changed after thermal treatment. The EPR parameters of $Fe^{3+}$ ion in $LiTaO_3$ single crystals are determined with effective spin Hamiltonian.

Implementation of JDAM virtual training function using machine learning

  • You, Eun-Kyung;Bae, Chan-Gyu;Kim, Hyeock-Jin
    • Journal of the Korea Society of Computer and Information
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    • v.25 no.11
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    • pp.9-16
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    • 2020
  • The TA-50 aircraft is conducting simulated training on various situations, including air-to-air and air-to-ground fire training, in preparation for air warfare. It is also used for pilot training before actual deployment. However, the TA-50 does not have the ability to operate smart weapon forces, limiting training. Therefore, the purpose of this study is to implement the TA-50 aircraft to enable virtual training of one of the smart weapons, the Point Direct Attack Munition (JDAM). First, JDAM functions implemented in FA-50 aircraft, a model similar to TA-50 aircraft, were analyzed. In addition, since functions implemented in FA-50 aircraft cannot be directly utilized by source code, algorithms were extracted using machine learning techniques(TensorFlow). The implementation of this function is expected to enable realistic training without actually having to be armed. Finally, based on the results of this study, we would like to propose ways to supplement the limitations of the research so that it can be implemented in the same way as it is.

A Study on Measurement of Gamma-ray Spectrum for the Natural Tungsten nuclear reaction by using KOMAC proton Linear Accelerator (KOMAC 양성자 선형가속기를 이용한 천연 텅스텐 핵반응에 대한 감마선 스펙트럼 측정에 대한 연구)

  • Lee, Samyol
    • Journal of the Korean Society of Radiology
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    • v.12 no.2
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    • pp.133-138
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    • 2018
  • The measurement of gamma-ray spectrum of $^{nat}W(p,xn)$ reaction with natural tungsten were performed by using a high energy proton generated from a 100-MeV proton linear accelerator of the Korea Multi-purpose Accelerator Complex (KOMAC). Gamma rays generated by various nuclides generated through the nuclide were measured using a gamma-ray spectroscopy system composed of HPGe detector. A gamma-ray standard source was used for energy calibration and efficiency measurement of the detector. Analysis of the gamma rays observed in the measured spectra showed that the radionuclides produced were $^{167}Re$, $^{178}Re$, $^{179}Re$, $^{180}Re$, $^{181}Re$, $^{182}Re$, $^{184}Re$, $^{172}Ta$, $^{174}Ta$, $^{178}Ta$, $^{182}Ta$, $^{184}Ta$, $^{175}W$, $^{176}W$, $^{177}W$ and $^{179}W$. Nuclides were generated. The results of this study will be applied to nuclear fusion, astrophysics, and nuclear medicine applications in the future.

Effect of Sr/Ta mole ratio on the ferroelectric properties of SBT thin films fabricated by LSMCD process (LSMCD 공정으로 제조한 SBT 박막의 Sr/Ta 몰비에 따른 강유전 특성)

  • 박주동;김지웅;오태성
    • Journal of the Korean Vacuum Society
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    • v.9 no.4
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    • pp.360-366
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    • 2000
  • $Sr_xBi_{2.4}Ta_2O_9$ (SBT) thin films of 150 nm thickness were prepared using LSMCD (Liquid Source Misted Chemical Deposition) process with variation of the Sr/Ta mole ratio of 0.35~0.65, and their crystalline phase, microstructure, ferroelectric properties and leakage current characteristics were investigated. Ferroelectric characteristics of the LSMCD-derived SBT films were optimized at the Sr/Ta moleratio of 0.425. The remanent polarization (2Pr) and coercive field (Ec) of the SBT film with the Sr/Ta mole ratio of 0.425 were measured as 15.01 $\mu$C/$ \textrm{cm}^2$ and 41 kV/cm at an applied voltage of $\pm$5 V respectively. LSMCD-derived SBT films with the Sr/Ta mole ratio of 0.35~0.5 exhibited leakage current densities lower than $10^{-5} A/\textrm{cm}^2$ at an applied field of 100 kV/cm, and excellent fatigue-free characteristics of the remanent polarization decrement less than 1% after $10^{10}$ switching cycles at$\pm$5 V.

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Influences of Structural Features on Electrical Properties and Heating Characteristics of Al-Ta Alloy Thin Films (Al-Ta 합금박막의 구조적 인자가 전기적 특성 및 발열 특성에 미치는 영향)

  • Song Daegwon;Lee Jongwon;Park In Yong;Kim Kyujin
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.23-27
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    • 2004
  • The $Al_xTa_{1-x} (x=0.0{\~}1.0)$ alloy thin films were deposited by RF-magnetron sputtering system, and the crystal quality, surface morphology, and electrical properties were examined using XRD, AFM, 4-point probe techniques in this study. The thin films were grown according to the alloy compositions first, and the effects of film thickness and mask patterns were investigated afterwards. Also, the heating characteristics were examined by heat controller. The obtained results showed that the high electrical resistivity was obtained for Al content $x=6.63at\%$, and the even higher resistivity was accomplished for the samples with smaller thickness and narrower width. The heating temperature demonstrated the identical trend to the electrical properties, and the highest heating temperature ($400^{\circ}C$) and output power ($12.6W/cm^2$) were obtained for the sample with Al content $x=6.63\%$, film thickness d=500 nm, film width w=1.5 mm.

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Optical and mechnical properties of ${Ta_2}{O_5}$ optical thin films by ion assisted deposition (이온 보조 증착한 ${Ta_2}{O_5}$ 광학 박막의 광학적 및 기계적 특성 분석)

  • 류태욱;김동진
    • Korean Journal of Optics and Photonics
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    • v.11 no.3
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    • pp.147-151
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    • 2000
  • We deposited the ion assisted ${Ta_2}{O_5}$ films and conventional thermal evaporated ${Ta_2}{O_5}$ films by using electron beam gun, and measured the optical properties and mechanical properties of the fabricated films according to the evaporation conditions. In the case of the TazOs films by oxygen ion assisted deposition with the anode voltage of 120 V, and current density of $50~500\muA/cm^2$, the refractive index exhibited 2.15 which was higher than the conventionally deposited film index 1.94 and the tensile stress exhibited $5.0\times10^8 dyne/cm^2$ which was lower than $7.0\times10^8 dyne/cm^2$. This properties coincided with the optical and mechanical properties of the films deposited at the elevated substrate temperature of $230^{\circ}C$. In the case of the argon ion assisted films the tensile stress was decreased but the absorption existed at the short wavelength in the visible spectral region. And all the fabricated films were found to be amorphous by the X-ray diffraction analysis. lysis.

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Variations in electrical properties and interface reactions of $Ta_{2}O_{5}-Si$ by RTA post annealing (RTA 후속 열처리에 의한 $Ta_{2}O_{5}-Si$ 계면 반응과 전기적 특성 변화)

  • Jeon, Seok-Ryong;Lee, Jeong-Yeop;Han, Seong-Uk;Park, Jong-Wan
    • Korean Journal of Materials Research
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    • v.5 no.3
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    • pp.357-363
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    • 1995
  • PECVD(Plasma-enhanced Chemical Vapor Deposition)법을 이용하여 증착한 $Ta_{2}$O_{5}$ 박막의 전기적 특성과 미세구조에 미치는 RTA(Rapid Thermal annealing) 후속 고온 열처리의 영향을 조사하였다. $Ta_{2}$O_{5}$ 박막의 미세구조와 interface 거동을 관찰하기 위하여XRD(X-ray Diffractometer), TEM(Transmission Electron Microscope), AES(Auger Electron Spectroscope) 분석을 실시하였으며, 전기적 특성을 관찰하기 위하여 I-V, C-V 측정을 하였다. $600^{\circ}C$에서 60초간 열처리를 실시하였을 경우 가장 우수한 유전 특성 및 누설 전류 특성을 보였으며, 유전 상수는 26이었고 누설 전류는 5 $\times$ $10^{-11}$A/$cm^{2}$이었다. $600^{\circ}C$ 이상의 온도에서 행한 열처리에 의하여 박막의 누설 전류와 유전 특성은 복합적으로 영향을 받았음을 알 수 있었다. 이는 $600^{\circ}C$의 열처리에서 이루어지고있는 박막의 결함감소와 고밀화 현상과 함께 80$0^{\circ}C$ 이상의 열처리에서 발생하는 조밀육방정 결정 구조를 가지는 $\delta$-$Ta_{2}$O_{5}$의 결정화에 기인함을 알 수 있었다. 또한 TEM과 AES분석 결과로부터 이들 박막의 누설 전류와 유전상수의 변화는 열처리에 의하여 일어나는 Ta-O-Si transition층의 생성과 성장에 기인함을 알 수 있었다. 따라서 $Ta_{2}$O_{5}$ 박막의 전기적 특성의 변화는 RTA 후속 열처리에 따른 계면 반응과 결정화 그리고 박막의 조밀화에 그 영향이 있음을 알 수 있었다.

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