• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.48-53
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• 1998

We have fabricated electrostatic lens with novel structure by mixing surface- and bulk-micromachining technology. Polysilicon was used for both the structure and sacrificial layer, and the structure layer was passivated with thermal oxide in order not to be attacked during the silicon wet etching. Compared with conventional electrostatic lens used in microcolumn, this device has the advantages in ; 1) hole alignment, throughput, reliability, damage of lens, 2) the possibility of arrayed lithography through the integration of microcolumn.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.6
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• pp.868-874
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• 2002

A high-impulse, low-power, digital microthruster has been developed using low-boiling-temperature liquid propellant with high-viscosity fluid plug. The viscous fiction force of the fluid plug increases the blast pressure and the low-boiling-temperature liquid propellant is intended to reduce input power consumption. The three-layer microthruster has been fabricated by surface micromachining as well as bulk micromachining in the size of 7$\times$13$\times$1.5㎣. A digital output impulse bit of 6.4$\times$10$^{-8}$ Nsec has been obtained from the fabricated microthruster using perfluoro normal hexane (FC72) propellant and oil plug, resulting in about ten times increase of the impulse bit using one hundredth electrical input energy compared to the conventional multiple-shot microthruster.

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.59-63
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• 2001

A high-impulse, low-power, continuous-shot microthruster has been developed using low boiling temperature liquid-propellant with high viscous fluid-plug. The viscous friction force of the fluid-plug increases the blast pressure and the low boiling temperature liquid-propellant is intended to reduce input power consumption. The three-layer microthruster has been fabricated by surface micromachining as well as bulk micromachining in the size of $7{\times}13{\times}1.5mm^{3}$. A continuous output impulse bit of $6.4{\times}10^{-8}N{\cdot}sec$ has been obtained from the fabricated microthruster using perfluoro normal hexane (FC72) propellant and oil plug, resulting in about ten times increase of the impulse bit using one hundredth electrical input energy compared to the conventional continuous microthruster.

• Transactions on Electrical and Electronic Materials
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• v.11 no.3
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• pp.130-133
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• 2010

A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ($R^2$) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.608-611
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• 2003

In this paper, laser direct micromaching is developed to fabricate micro patterns using UV laser ( λ$_3$= 355 nm). Experimentally, laser beam paths mainly influences the surface shape quality. Thus. we proposed laser beam path generator by extracting shape data in a blueprint worked through CAD modeler and using genetic algorithm that considers the characteristics of laser beam. The results show that various shapes of micro patterns could be manufactured using proposed method in this paper.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.228-233
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• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.7 s.172
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• pp.79-87
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• 2005

This paper summarizes the work on the development of a simulation program for modelling the process of machining quasi-three dimensional shape with the excimer laser beam on a constantly moving polymers. Relatively simple masks of rectangle, triangle and half circle shape are considered. The etching depth is calculated by considering the number of laser pulses irradiated on the specimen surface. It was found that similar shapes as experimental results can be obtained by choosing suitable parameters of moving velocity, moving distance and mask sizes.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.12
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• pp.153-159
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• 1997

A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH$_{3}$OH vapor, and successfully fabricated the microactuators. The actuation is incurred by the thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon microactuator was experimentally conformed as large as 21 .mu. m at the input voltage level of 10V and 50Hz square wave. The actuating characteris- tics are also compared with the simulalted results considering heat transfer and thermal expansion in the polysilicon layer. This microactuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as microrelay, which requires large displacement or contact force but relatively slow response.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.50-58
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• 2009

Micro laser fabrication techniques can potentially be used for the manufacture of microstructures on the thin flat surfaces with large diameter that are frequently used in semiconductor industries. However, the large size of wafers can cause the degraded machining accuracy of the surface because it can be tilted or distorted by geometric errors of machines or the holding fixtures, etc. To overcome these errors the off-line focusing error compensation method is proposed. By using confocal autofocus system, the focusing error profile of machined surface is measured along the pre-determined path and can be compensated at the next machining process by making the corrected motion trajectories. The experimental results for silicon wafers and invar flat surfaces show that the proposed method can compensate the focusing error within the level of below $6.9{\mu}m$ that is the depth of focus required for the laser micromachining process.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).