Journal of the Korean Society for Precision Engineering (한국정밀공학회지)
- Volume 14 Issue 12
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- Pages.153-159
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- 1997
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- 1225-9071(pISSN)
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- 2287-8769(eISSN)
Fabrication of Thermally-Driven Polysilicon Microactuator and Its Characterization
열구동형 폴리실리콘 마이크로 액츄에이터의 제작 및 특성분석
- Lee, J.H. (-Electronics And Telecommunications Research Institute) ;
- Lee, C.S. ;
- Yoo, H.J.
- Published : 1997.12.01
Abstract
A thermally-driven polysilicon microactuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS(tetraethylorthosilicate) oxide as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And newly developed HF GPE(gas-phase etching) process was also employed to eliminate the troublesome stiction problem using anhydrous HF gas and CH
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