• Design & Manufacturing
• /
• 제18권2호
• /
• pp.9-16
• /
• 2024

Recently, there has been extensive research conducted on the miniaturization of semiconductors and the improvement of their integration to achieve high-quality and high-performance electronic devices. To integrate and miniaturize multiple semiconductors, thin and precise wafers are essential. The backgrinding process, which involves high-precision processing, is necessary to achieve this. The backgrinding system is used to grind and polish the back side of the wafer to reduce its thickness to ㎛ units. This enables the high integration and miniaturization of semiconductors and a flattening process to allow for detailed circuit design, ultimately leading to the production of IC chips. As the backgrinding system performs precision processing at the ㎛ unit, it is crucial to determine the stability of the equipment's rigidity. Additionally, the flatness and surface roughness of the processed wafer must be checked to confirm the processability of the backgrinding system. IIn this paper, the goal is to verify the processability of the back grinding system by analyzing the natural frequency and resonance frequency of the equipment through computer simulation and measuring and analyzing the flatness and surface roughness of wafers processed with backgrinding system. It was confirmed whether processing damage occurred due to vibration during the backgrinding process.

• Structural Engineering and Mechanics
• /
• 제76권5호
• /
• pp.561-578
• /
• 2020

The present work addresses the surface integrity and chip morphology in finish hard turning of AISI D3 steel under nanofluid assisted minimum quantity lubrication (NFMQL) condition. The surface integrity aspects include microhardness, residual stress, white layer formation, machined surface morphology, and surface roughness. This experimental investigation aims to explore the feasibility of low-cost multilayer (TiCN/Al2O3/TiN) coated carbide tool in hard machining applications and to assess the propitious role of minimum quantity lubrication using graphene nanoparticles enriched eco-friendly radiator coolant based nano-cutting fluid for machinability improvement of hardened steel. Combined approach of central composite design (CCD) - analysis of variance (ANOVA), desirability function analysis, and response surface methodology (RSM) have been subsequently employed for experimental investigation, predictive modelling and optimization of surface roughness. With a motivational philosophy of "Go Green-Think Green-Act Green", the work also deals with economic analysis, and sustainability assessment under environmental-friendly NFMQL condition. Results showed that machining with nanofluid-MQL provided an effective cooling-lubrication strategy, safer and cleaner production, environmental friendliness and assisted to improve sustainability.

• 한국전기전자재료학회논문지
• /
• 제20권12호
• /
• pp.1027-1033
• /
• 2007

In this research, the polishing pad for W CMP has been analyzed to understand stabilization of polishing performance. For stabilization of process, the polishing pad condition is one of important factors. The polishing pad plays a key role in polishing process, because it contact with reacted surface of wafer[1]. The physical property of pad surface is ruled by conditioning tool which makes roughness and profile of pad surface. Pad surface affects on polishing performance such as RR(Removal Rate) and uniformity in CMP. The stabilized pad surface has stable roughness. And its surface has high level of wettability which can increase the probability of abrasive adhesion on pad. The result of this research is that the reduction of break-in and dummy polishing process were achieved by artificial machining to make stable pad surface. In this research, urethane polishing pad which is named IC pad(Nitta-Haas Inc.) and has micro pore structure, is studied. Because, this type of pad is the most conventional type.

• 한국안전학회지
• /
• 제26권1호
• /
• pp.15-20
• /
• 2011

This study deals with the effect of the shot peening in SCM420H planetary gears. The hardness and roughness of the gear surface can be improved by shot blast and shot peening. there in, the shot peening techniques are welcomed especially as one of the physical surface improvement methods. The two treatments are used widely, because of the qualitative analysis of shot blast and shot peening has become possible and the surface treatment can be done with little costs compared with other surface improvement methods. Therefore, this study investigates the effects of shot blast and shot peening in surface shape. The fatigue strength test at a constant stress amplitude is performed by using an electrohydraulic serve-controlled pulsating tester. And fatigue test also explained characteristics of shot blast and shot peening of planetary gears.

• Tribology and Lubricants
• /
• 제34권6호
• /
• pp.217-225
• /
• 2018

In this study, we spray a Ni-Cr composite powder onto AISI 4340 steel using the high velocity oxygen fuel method. We subsequently subject the Ni-Cr coating (as-sprayed) to ultrasonic nanocrystal surface modification (UNSM) process to improve the tribological performance. This study aims at increasing the wear resistance and durability of the Ni-Cr coating by altering the surface integrity and microstructure via the UNSM process. The UNSM process reduces the surface roughness of the as-sprayed coating by about 64%, which is explained by observing the elimination of high peaks and valleys and filling up micro-pores. Furthermore, a change in the microstructure of the coating due to continuous high-frequency strikes to the surface by a tip can lead to an increase in hardness from about 48 to 60 HRC. Furthermore, we investigate the characterization of the friction and wear behavior of Ni-Cr coating by a ball-on-disc tribometer in the dry conditions. We determine that after the UNSM process, there is a significant reduction in the friction coefficient of the as-sprayed coating from approximately 1.1 to 0.75. This is owing to the increased hardness and smoothed surface roughness. In addition, we investigate the surface morphology and wear track of the coatings before and after the UNSM process using a scanning electron microscope, energy dispersive spectrometer, and three-dimensional laser scanning microscope. We observe that the wear track of the Ni-Cr coating after the UNSM process is lower than that of the as-sprayed one. Thus, we confirm that the UNSM process has a significant influence on the improvement of the tribological performance of the Ni-Cr composite coating.

• 대한금속재료학회지
• /
• 제49권9호
• /
• pp.692-698
• /
• 2011

The thermo-chemical treatment (TCT) process was applied to achieve surface hardening of CP titanium. The following three different surface modification conditions were tested so that the best surface hardening process could be selected:(a) PVD, (b) TCT+PVD, and (c) TCT+Aging+PVD. These specimens were tested and analyzed in terms of surface roughness, wear, friction coefficient, and the gradient of hardening from the surface of the matrix. The three test conditions were all beneficial to improve the surface hardness of CP titanium. Moreover, the TCT treated specimens, that is, (b) and (c), showed significantly improved surface hardness and low friction coefficients through the thickness up to $100{\mu}m$. This is due to the functionally gradient hardened surface improvement by the diffused interstitial elements. The hardened surface also showed improvement in bonding between the PVD and TCT surface, and this leads to improvement in wear resistance. However, TCT after aging treatment did not show much improvement in surface properties compared to TCT only. For the best surface hardening on CP titanium, TCT+PVD has advantages in surface durability and economics.

• 한국정밀공학회지
• /
• 제28권6호
• /
• pp.701-708
• /
• 2011

Although Titanium material has superior properties, it belongs to difficult-to-machine materials. The present research applies magnetic abrasive finishing to precision machining of internal-face of titanium pipes, and analyzed & assessed the influence of grinding conditions on magnetic abrasive effects through the removed amount and surface roughness of materials. There was the influence on grinding properties according to change of rotational speed, a total input of mixed powder and an input of grinding liquid, and when the total input, rotational speed and ratio of electrolytic iron versus magnetic abrasives are 8g and 1000rpm, it was most advantageous in aspects of surface roughness and material removal amount, and the grinding liquid remarkably improved the surface roughness and material removal amount only with addition of trace amounts of light oil rather than dry machining conditions. And a result of considering the influence on grinding properties by using an inert gas (Argon gas) for improving grinding properties of the internal-face of titanium pipe, the present research has obtained improvement effects in the removal amount and surface roughness through utilization of an inert gas.

• International Journal of Safety
• /
• 제1권1호
• /
• pp.24-27
• /
• 2002

Recently the steel parts used in automobiles are required to be used under high stress more than ever before due to the need of keeping the weight down. To achieve this requirement of the high strength steel, it must be necessary to decrease inclusion contents and surface defects as like decarburization, surface roughness etc. In this study, the surface conditions are measured to know the influence on fatigue properties by two cases of two-stage shot peening and single-stage shot peening. And for this study, three kinds of spring steel (JISG408l-SUP7, SAE 9254 and DIN 50CrV4) are shaped. This study shows the outstanding improvement of fatigue properties at the case of two-stage shot peening in the rotating bending fatigue test and it results from (1) decreasing the surface roughness (2) unchanging the surface hardness (3) increasing the compressive residual stress. Moreover, results also show fatigue failures originated at the inclusion near the surface, and this inclusion type is turned out to be an alumina of high hardness.

• 동력기계공학회지
• /
• 제5권4호
• /
• pp.67-73
• /
• 2001

Recently the steel parts used at automobiles are required to be used under high stress more than ever before in need of the weight down. To achieve this requirement of a high strength steel, it must be necessary to decrease inclusion content and surface defect as like decarburization, surface roughness etc.. In this study, the surface conditions are measured to know the influence on fatigue properties by two cases of two-stage shot peening iud single-stage shot peening for two kinds of spring steel(SUP7, SAE9254). This study shows the outstanding improvement of fatigue properties at the case of two-stage shot peening in the rotary bending fatigue test and this is assumed to be from decreasing the surface roughness unchanging the surface hardness increasing the compressive residual stress. Results also show fatigue failures originated at inclusion near surface, and this inclusion type is turned out to be a alumina of high hardness.

• 한국전기전자재료학회논문지
• /
• 제29권7호
• /
• pp.440-444
• /
• 2016

Titanium oxide ($TiO_2$) thin films were synthesized on polymer insulator and Si substrates by atomic layer deposition (ALD) method. The surface and electrical properties of $TiO_2$ films synthesized at various ALD cycle numbers were investigated. The synthesized $TiO_2$ films exhibited higher contact angle and smooth surface. The contact angle of $TiO_2$ films was increased with the increase of ALD-cycle number. Also, the rms surface roughness of films was slightly rough with the increase of ALD-cycle number. The leakage current on $TiO_2$ film surface synthesized at various conditions were uniformed, and the values were decreased with the increase of ALD-cycle number. In the results, the performance of $TiO_2$ films for self-cleaning critically depended on a number of ALD-cycle.