• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.291-291
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• 2010

Electron-beam lithography (EBL) process is a versatile tool for a fabrication of nanostructures, nano-gap electrodes or molecular arrays and its application to nano-device. However, it is not appropriate for the fabrication of sub-5 nm features and high-aspect-ratio nanostructures due to the limitation of EBL resolution. In this study, the precision assembly and alignment of DNA molecule was demonstrated using sub-5 nm nanostructures formed by a combination of conventional electron-beam lithography (EBL) and plasma ashing processes. The ma-N2401 (EBL-negative tone resist) nanostructures were patterned by EBL process at a dose of $200\;{\mu}C/cm2$ with 25 kV and then were ashed by a chemical dry etcher at microwave (${\mu}W$) power of 50 W. We confirmed that this method was useful for sub-5 nm patterning of high-aspect-ratio nanostructures. In addition, we also utilized the surface-patterning technique to create the molecular pattern comprised 3-(aminopropyl) triethoxysilane (APS) as adhesion layer and octadecyltrichlorosilane (OTS) as passivation layer. DNA-templated gold nanoparticle chain was attached only on the sub-5 nm APS region defined by the amine groups, but not on surface of the OTS region. We were able to obtain DNA molecules aligned selectively on a SiO2/Si substrate using atomic force microscopy (AFM).

• 한국레이저가공학회지
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• 제10권1호
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• pp.29-34
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• 2007

We propose a novel application of laser engraving to patterning of light guide panel (LGP) for backlight. The feasibility of three-dimensional engraved pattern in the LGP was verified by measuring brightness and uniformity. To improve the overall uniformity, we have modified proposed patterns and found improved design for patterns. The tailoring of pattern by using laser engraving method could endow the controllability of uniformity. The proposed LGPs are more efficient in both average brightness and uniformity of illumination than the conventional LGPs which have surface pattern on the panel.

• Journal of Information Display
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• 제9권1호
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• pp.14-19
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• 2008

We demonstrated the capillary force lithography (CFL) method for controlling the azimuthal anchoring energy of a liquid crystal (LC) alignment layer. When a thermoplastic polymer film is heated to over the glass transition temperature, the melted polymer is filled into the mold structure by the capillary action and the aspect ratio of the pattern is determined by the dewetting time of the CFL process. Here, the proposed method showed that the azimuthal anchoring energy of the LC alignment layer could be simply controlled by the surface relief patterns which were determined by the dewetting times during the CFL patterning.

• 한국기계가공학회지
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• 제8권3호
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• pp.1-6
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• 2009

This paper presents a geometrical error compensation of tool alignment for sharp edge bite on B axis controlled machine. In precision micro patterning, bite alignment is crucial parameter for machined surface. To decrease bite alignment error, plus tilted bite from B axis center is touched to reference work piece(pin gauge) and checked the deviation from original position. Same process is repeated for maximum touch deviation value. From this touched position value, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct sharp edge bite alignment.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.103-104
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• 2007

Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.287-287
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• 2007

The ferroelectric and electric properties of UV-irradiated bismuth lanthanum titanate (BLT) films prepared using photosensitive starting precursors were characterized. The effects of lanthanum doping on ferroelectric and electric properties were investigated by polarization-electric field hysteresis loops and leakage current-voltage measurements. X-ray diffractometer and ellipsometry were served to provide the information about the crystalline structure and thickness of the films after annealing. The images of the surface microstructure and direct-patterned BLT films were observed by using scanning electron microscopy. The effects of lanthanum doping on the electric properties of direct-pattern able BLT films and their direct-patterning were studied.

• 한국가시화정보학회지
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• 제17권1호
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• pp.69-77
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• 2019

This paper introduces microfluidic manipulation of microorganism by opto-electrokinetic technique, named rapid electrokinetic patterning (REP). REP is a hybrid method that utilizes the simultaneous application of a uniform electric field and a focused laser to manipulate various kinds and types of colloidal particles. Using the technique in preliminary experiments, we have successfully aggregated, translated, and trapped not only spherical polystyrene, latex, and magnetic particles but also ellipsoidal glass particles. Extending the manipulation target to cells, we attempted to manipulate saccharomyces cerevisiae (S. cerevisiae), the most commonly used microorganism for food fermentation and biomass production. As a result, S. cerevisiae were assembled and dynamically trapped by REP at arbitrary location on an electrode surface. It firmly establishes the usefulness of REP technique for development of a high-performance on-chip bioassay system.

• 한국해양공학회지
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• 제27권2호
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• pp.114-120
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• 2013

A superhydrophobic surface means that the contact angle between the solid surface and a water droplet is more than $150^{\circ}$. Materials with a superhydrophobic surface have a self-cleaning function because of the Lotus effect, in which water is not absorbed by the material but rolls off of it. If such a Lotus effect can be applied to the surface of underwater vessels, submarines, torpedos, and so on, enhanced vessels can be made based on this lubricant effect reducing the friction coefficient for the liquid. Because polymer composites can be easily applied in various nanotechniques, they are more advantageous than conventional materials like iron in terms of a superhydrophobic surface. Furthermore, a superhydrophobic surface bring enhanced anticorrosion and ecotechnology because no paint is needed on underwater vessels.

• 한국표면공학회지
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• 제49권6호
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• pp.555-559
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• 2016

A biodegradable nanofiber scaffolds using electrospining provide fibrous guidance cues for controlling cell fate that mimic the native extracellular matrix (ECM). It can create a pattern using conventional electrospining method, but has a difficulty to generate one or more pattern structures. Femtosecond(fs) laser ablation has much interested in patterning on biomaterials in order to distinguish the fundamental or systemic interaction between cell and material surface. The ablated materials with a short pulse duration using femtosecond laser that allows for precise removal of materials without transition of the inherent material properties. In this study, linear grooves and circular craters were fabricated on electrospun nanofiber scaffolds (poly-L-lactide(PLLA)) by femtosecond laser patterning processes. As parametric studies, pulse energy and beam spot size were varied to determine the effects of the laser pulse on groove size. We confirmed controlling pulse energy to $5{\mu}J-20{\mu}J$ and variation of lens maginfication of 2X, 5X, 10X, 20X created grooves of width to approximately $5{\mu}m-50{\mu}m$. Our results demonstrate that femtosecond laser processing is an effective means for flexibly structuring the surface of electrospun PLLA nanofibers.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2008년도 제34회 동계학술대회 초록집
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• pp.209-209
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• 2008