• Title/Summary/Keyword: Surface drawing

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A Study of Machining Optimization of Parts for Semiconductor Plasma Etcher (반도체 플라즈마 식각 장치의 부품 가공 연구)

  • Lee, Eun Young;Kim, Moon Ki
    • Journal of the Semiconductor & Display Technology
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    • v.19 no.4
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    • pp.28-33
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    • 2020
  • Plasma etching process employs high density plasma to create surface chemistry and physical reactions, by which to remove material. Plasma chamber includes silicon-based materials such as a focus ring and gas distribution plate. Focus ring needs to be replaced after a short period. For this reason, there is a need to find materials resistant to erosion by plasma. The developed chemical vapor deposition processing to produce silicon carbide parts with high purity has also supported its widespread use in the plasma etch process. Silicon carbide maintains mechanical strength at high temperature, it have been use to chamber parts for plasma. Recently, besides the structural aspects of silicon carbide, its electrical conductivity and possibly its enhanced life time under high density plasma with less generation of contamination particles are drawing attention for use in applications such as upper electrode or focus rings, which have been made of silicon for a long time. However, especially for high purity silicon carbide focus ring, which has usually been made by the chemical vapor deposition method, there has been no study about quality improvement. The goal of this study is to reduce surface roughness and depth of damage by diamond tool grit size and tool dressing of diamond tools for precise dimensional assurance of focus rings.

3D Surface Representation and Manipulation Scheme for Web-based 3D Geo-Processing

  • Choe, Seung-Keol;Kim, Kyong-Ho;Lee, Jong-Hun;Yang, Young-Kyu
    • Proceedings of the Korean Association of Geographic Inforamtion Studies Conference
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    • 1999.12a
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    • pp.66-71
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    • 1999
  • For given 3D geographic data which is usually of DEM(Data Elevation Model) format, we have to represent and manipulate the data in various ways. For example, we have to draw a part of them in drawing canvas. To do this we give users a way of selecting area they want to visualize. And we have to give a base tool for users to select the local area which can be chosen for some geographic operation. In this paper, we propose a 3D data processing method for representation and manipulation. The method utilizes the major properties of DEM and TIN(Triangular Irregular Network), respectively. Furthermore, by approximating DEM with a TIN of an appropriate resolution, we can support a fast and realistic surface modeling. We implement the structure with the following 4 level stages. The first is an optimal resolution of DEM which represent all of wide range of geographic data. The second is the full resolution DEM which is a subarea of original data generated by user's selection in our implemeatation. The third is the TIN approximation of this data with a proper resolution determined by the relative position with the camera. And the last step is multi-resolution TIN data whose resolution is dynamically decided by considering which direction user take notice currently. Specialty, the TIN of the last step is designed for realtime camera navigation. By using the structure we implemented realtime surface clipping, efficient approximation of height field and the locally detailed surface LOD(Level of Detail). We used the initial 10-meter sampling DEM data of Seoul, KOREA and implement the structure to the 3D Virtual GIS based on the Internet.

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Analysis Method of X-Ray Diffraction Characteristic Values and Measured Strain for Steep Stress Gradient of Metal Material Surface Layer (금속재료 표면층의 급격한 응력구배에 대한 X-Ray회절 특성값과 측정된 변형률의 해석방법)

  • Chang-Suk Han;Chan-Woo Lee
    • Korean Journal of Materials Research
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    • v.33 no.2
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    • pp.54-62
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    • 2023
  • The most comprehensive and particularly reliable method for non-destructively measuring the residual stress of the surface layer of metals is the sin2ψ method. When X-rays were used the relationship of εφψ-sin2ψ measured on the surface layer of the processing metal did not show linearity when the sin2ψ method was used. In this case, since the effective penetration depth changes according to the changing direction of the incident X-ray, σφ becomes a sin2ψ function. Since σφ cannot be used as a constant, the relationship in εφψ-sin2ψ cannot be linear. Therefore, in this paper, the orthogonal function method according to Warren's diffraction theory and the basic profile of normal distribution were synthesized, and the X-ray diffraction profile was calculated and reviewed when there was a linear strain (stress) gradient on the surface. When there is a strain gradient, the X-ray diffraction profile becomes asymmetric, and as a result, the peak position, the position of half-maximum, and the centroid position show different values. The difference between the peak position and the centroid position appeared more clearly as the strain (stress) gradient became larger, and the basic profile width was smaller. The weighted average strain enables stress analysis when there is a strain (stress) gradient, based on the strain value corresponding to the centroid position of the diffracted X-rays. At the 1/5 Imax max height of X-ray diffraction, the position where the diffracted X-ray is divided into two by drawing a straight line parallel to the background, corresponds approximately to the centroid position.

An Analysis of Earth System Understandings (ESU) of 8th-grade Students' Imagery about 'the Earth' Represented by Words and Drawings (단어와 그림으로 표현된 8학년 학생들의 '지구'에 대한 심상에서 나타난 지구계 이해 분석)

  • Oh, Hyun-Seok;Kim, Chan-Jong
    • Journal of the Korean earth science society
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    • v.31 no.1
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    • pp.71-87
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    • 2010
  • The purpose of this study was to explore 8th-grade students' imageries of the Earth. We analyzed the middle school students' imageries about the Earth represented with words and drawings in Earth Systems Understanding (ESU, hereafter) framework. The students' imageries about 'the Earth' are vary by their experiences and prior-knowledge, which significantly impacts their imagery construction. Especially, the students' ESU were characterized into two aspects: One is a macroscopic view point based on full-objects of the Earth by indirect experiences and the other is everyday view point based on scene of the Earth surface and environment by direct experiences. Results revealed students' imageries about the Earth were impacted by visual experiences and those students' ESU were more represented by drawing as visual imagery than by words, formal language. The negative imageries were mainly represented through interactions of the Earth subsystems.

Influence of Internal and External Stabilization Methods During Prone Hip Extension on the Selective Activation of the Gluteus Maximus (엎드려 누운 자세에서 엉덩관절 폄시 내적, 외적 안정화 방법이 큰 볼기근의 선택적 근활성에 미치는 영향)

  • Noh, Kyung-Hee;Moon, Se-Na;Lee, Dong-Kyu;Yoon, Ji-Yeon;Kim, Tae-Ho;Oh, Jae-Seop
    • Physical Therapy Korea
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    • v.18 no.3
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    • pp.1-7
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    • 2011
  • The effects of an abdominal drawing-in maneuver (ADIM) using a pressure bio-feedback unit (PBFU) were compared to the effects of a pelvic belt (PB) on the muscle activities of the hip and back extensor muscles during hip extension in the prone position. Fifteen healthy male participants all performed prone hip extensions under three conditions: 1) preferred hip extension (PHE), 2) performing an ADIM, and 3) using a PB. The muscle activities of the erector spinae, the gluteus maximus, and the medial hamstring on the right side were recorded by surface electromyography. The muscle activity of the erector spinae was significantly lower while performing an ADIM during prone hip extension than during PHE or with a PB (p<.05). Gluteus maximus muscle activity was significantly higher while performing an ADIM (p<.05). No significant difference was found for the medial hamstring muscle among the three conditions (p>.05). We concluded that the internal stabilization of the pelvis and lumbar spine afforded by the ADIM using a PBFU could be more effective than the external stabilization provided by a PB in terms of increasing selectively gluteus maximus activation during prone hip extension.

EMG Activity of Abdominal Muscles During Lumbopelvic Stabilization Exercises (척추 안정화 운동 방법들에 따른 배근육의 근 활성도 비교)

  • Lee, Gyu-Wan;Yoon, Tae-Lim;Kim, Ki-Song;Lee, Ji-Hyun;Yi, Chung-Hwi
    • Physical Therapy Korea
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    • v.21 no.2
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    • pp.1-7
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    • 2014
  • Lumbopelvic stabilization exercise has become the most popular treatment method in lumbar rehabilitation since its effectiveness was shown in some aspects of pain and disability. The abdominal drawing-in maneuver (ADIM) has been extensively implemented to promote lumbopelvic stability. However, performing ADIM correctly is difficult even for healthy subjects, and it is time consuming to train people in ADIM. Thus, the purpose of this study was to compare abdominal muscle [rectus abdominalis (RA), external oblique (EO), and transverse abdominis/internal oblique (TrA/IO)] activity during lumbopelvic stabilization exercises (ADIM only, ADIM with a ball, maximum exhalation only, and maximum exhalation with a ball) performed in a supine position with feet against a wall. Fifteen healthy subjects were recruited for this study. Surface electromyography was used to measure abdominal muscle activity during lumbopelvic stabilization exercises. A one-way repeated-measures analysis of variance was used to determine the statistical significance of RA, EO, and TrA/IO muscle activity during four lumbopelvic stabilization exercises. Both-side TrA/IO muscle activity was significantly greater with maximum exhalation with a ball than with ADIM only or ADIM with a ball (p<.008). The results of this study suggest that maximum exhalation with a ball can be used as an effective lumbopelvic stabilization exercise to increase TrA/IO muscle activity in healthy subjects.

Computational Thermo-Fluid Analysis for the Effects of Helium Injection Methods on Glass Fiber Cooling Process in an Optical Fiber Manufacturing System (광섬유 냉각장치의 헬륨 주입기 설계를 위한 전산열유동해석)

  • Park, Shin;Kim, Kyoungjin;Kim, Dongjoo;Park, Junyoung;Kwak, Ho Sang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.13 no.2
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    • pp.124-130
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    • 2014
  • In a mass manufacturing system of optical fibers, the sufficient cooling of glass fibers freshly drawn from a draw furnace is essential, asinadequately cooled glass fibers can lead to poor resin coating on the fiber surface and possibly fiber breakage during the process. In order to improve fiber cooling at a high drawing speed, it is common to use a helium injection into a glass fiber cooling unit in spite of the high cost of the helium supply. The present numerical analysis carried out three-dimensional thermo-fluid computations of the cooling gas flow and heat transfer on moving glass fiber to determine the cooling performance of glass fiber cooling depending on the method of helium injection. The results showed that afront injection of helium is most effective compared to a uniform or rear injection for reducing air entrainment into the unit and thus cooling the glass fibers at a high fiber drawing speed. However, above a certain amount of injected helium, there was no more increase of the cooling effect regardless of the helium injection method.

Dimensional Change in Drawn Wire Product in the Two Cross-Roll Straightening Process (2롤 교정공정에서 인발선재의 선경변화)

  • Moon, Changsun;Kim, Naksoo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.3
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    • pp.295-302
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    • 2013
  • The two cross-roll straightening process at room temperature is a manufacturing method for improving the straightness of a drawn wire. The distribution and magnitude of the internal and surface residual stresses of the drawn wire are changed after the wire-drawing process through the two cross-rolls; this also results in a change in the diameter of the drawn wire. The remaining residual stresses of the drawn wire after the wire-drawing dimensional changes were analyzed according to the distance between the rolls, oblique angle between the axes of the roll and the wire, predicted residual stresses, and dimensional change in the final product. The oblique angle between the concave and convex rolls did not affect the residual stresses or dimensional change, but the distance between rolls did.

Current R&D Trend of Nanofiber Membranes (나노섬유 분리막의 최근 연구개발동향)

  • Kim, Tae Heon
    • Membrane Journal
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    • v.22 no.6
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    • pp.395-403
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    • 2012
  • R&D of Nanofiber membrane has been carried out in the various fields, gas, water treatment, energy, and etc, with the continuous growth of membrane technology. There are several preparation methods for nanofiber, i.e. drawing, template synthesis, phase separation, self-assembly, and electrospinning. However, an electrospinning has many advantages such as high productivity, low production cost, easy to select law material, high relative surface area, and easy to functionalize. Nanofiber has been used in the field of membrane technologies such as secondary battery and water treatment fields. For the secondary battery separator, the separators having a high power and high thermal stability can be developed with spread of nanofiber on the commercial PP or PE/PP separators. High functional membranes can be also developed by adding the functional additives like antibacterial materials in the nanofiber membrane. It can be expected the high value added with nanofiber membrane because of its diverse applications from the water treatment to the energy field and because of its various functional advantages.

Effect of the Abdominal Drawing-in Maneuver on the Scapular Stabilizer Muscle Activities and Scapular Winging During Push-up Plus Exercise in Subjects With Scapular Winging

  • Kim, Da-eun;Shin, A-reum;Lee, Ji-hyun;Cynn, Heon-seock
    • Physical Therapy Korea
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    • v.24 no.1
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    • pp.61-70
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    • 2017
  • Background: Scapular winging is a prominence of the entire scapular medial border, mainly caused by insufficient activity of the serratus anterior (SA) and imbalance of scapulothoracic muscles. Push-up plus (PUP) exercise has been commonly used to increase SA muscle activity. The facilitation of abdominal muscle may affect scapular muscle activity by myofascial connections. Thus, the sequential activation of the turnk muscles is suggested to facilitate the transition of proper force from upper limb and restore force couple of scapular muscles. The abdominal drawing-in maneuver (ADIM) has been effective in improving activation of the deep trunk muscles during movement. Objects: The aim of this study was to determine the effect of ADIM on the activity of the upper trapezius (UT), lower trapezius (LT), and SA during PUP exercises in subjects with scapular winging. Methods: Fourteen men with scapular winging (determined as a of distance between the scapular medial border and thoracic wall over 3 cm) volunteered for our study. The subjects performed the PUP exercise with and without ADIM. Surface electromyography was used to collect the electromyography data of the UT, LT, and SA. A scapulometer was used to measure the amount of scapular winging. Results: SA activity was significantly greater and scapular winging significantly lower during the PUP exercise with ADIM than during those without ADIM. Conclusion: PUP exercise with ADIM can be used as an beneficial method to improve SA activation and to reduce the amount of scapular winging in subjects with scapular winging.