Measurement of Particle Deposition Velocity toward a Horizontal Semiconductor Wafer Using a Wafer Surface Scanner (Wafer Surface Scanner를 이용한 반도체 웨이퍼상의 입자 침착속도의 측정)
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- Korean Journal of Air-Conditioning and Refrigeration Engineering
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- v.5 no.2
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- pp.130-140
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- 1993