• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.167-170
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• 2002

The influence of Si surface damage on Ni-silicide with TiN Capping layer and the effect of $H_2$ anneal are characterized. Si surface is intentionally damaged using Ar Sputtering. The sheet resistance of NiSi formed on damaged silicon increased rapidly as Ar sputtering time increased. However, the thermal stability of Ni-Si on the damage silicon was more stable than that on at undamaged Si, which means that damaged region retards the formation of NiSi. It was shown that $H_2$ anneal and TiN capping is highly effective in reducing NiSi sheet resistance.

• Journal of the Korean institute of surface engineering
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• v.50 no.5
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• pp.332-338
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• 2017

In this study, we evaluated tendency and degree of corrosion damages of Inconel 600 after chemical decontamination treatments under three different conditions. In the decontamination processes, the oxidation and reduction were performed as one cycle. Each process was continued up to 5 cycles. Characteristics of corrosion under decontamination processes were evaluated by Tafel analysis and weight loss. Characteristics of surface damage were observed by scanning electron microscope(SEM) and three-dimensional(3D) microscope. As the cycle proceeded, weight loss and corrosion current density increased. Intergranular corrosion damage occurred on the surface of the materials. The result revealed that the surface of Inconel 600 was attacked by the strong acid solution under all chemical decontamination processes, but the degree of the corrosion damage was different depending on the processes.

• Journal of the Korean Society for Railway
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• v.7 no.1
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• pp.14-19
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• 2004

The effect of surface damage on fatigue properties of catenary wires were investigated to estimate their service lift. As surface defects of the wires caused by surface corrosion increase, surface roughness gets worse, and as roughness increases, it is easy for moisture coming from rain and dew to be condensed around uneven parts of the surface. The condensed moisture causes a locally severe corrosion which leads to damage of the wires. Corrosion of catenaty wires can make their actual lifetime shorter than that originally designed. The amount of decrease was more prominent as environmental conditions became more corrosive. They are also vibrated with some amplitude everytime pantographs touch contact line. The frequent cyclic load on the wire may result in a fatigue fracture. Surface damage by corrosion can make formation of crack initiation at fatigue. In the present study, the fatigue life of the used wire was measured 35 to 50% compared with that of new one in average.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.19-20
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• 2006

Two methods that can reduce reflectance in solar cells are surface texturing and anti-reflection coating. Wet chemical etching is a typical method that surface texturing of multi-crystalline silicon. Wet chemical etching methods are the acid texturization of saw damage on the surface of multi-crystalline silicon or double-step chemical etching after KOH saw damage removal too. These methods of surface texturing are realized by chemical etching in acid solutions HF-$HNO_3$-$H_2O$. In this solutions we can reduce reflectance spectra by simple process etching of multi-crystalline silicon surface. We have obtained reflectance of 27.19% m 400~1100nm from acidic chemical etching after KOH saw damage removal. This result is about 7% less than just saw damage removal substrate. The surface morphology observed by microscope and scanning electron microscopy (SEM).

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Journal of the Korea Institute of Military Science and Technology
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• v.11 no.2
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• pp.144-151
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• 2008

An experimental study has been conducted to investigate the effects of circular damage hole on the characteristics of airfoil performance. The damage on a wing created from a hit by anti-air artillery was modeled as a circular hole. Force balance measurements and static pressure measurements on the wing surface were carried out for the cases of having damage holes of 10% chord size at quarter chord and/or half chord positions. All experiments were conducted at Reynolds number of $2.85\times10^5$ based on the chord length. The surface pressure data show big pressure alterations near the circular damage holes. This abnormal surface pressure distribution produces shear stress that could lead to the acceleration of the structural degradation of the wing around the circular damage hole. However, in spite of the existence of circular damage holes, the measured force data indicated the only a slight decrease in lift accompanied by increase in drag compared to the results of undamaged one. The influence of damage hole on the aerodynamic performance was increased as the location of damage moved to the leading edge. The effect on the control force was insignificant when the damaged size was not large.

• 전자공학회논문지 IE
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• v.47 no.2
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• pp.8-12
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• 2010

TEM is a powerful tool for semiconductor material analyses in structure or biological sample in micro structure. TEM observation need to make to coincide specimens for special purpose. in this paper, we have experimented for minimum surface damage on bulk wafer and patterned specimen by various conditions such as accelerating energy, depth of ion beam, ion milling types, and etc. in various specimen preparation methods by FIB (Focus Ion Beam). The optimal qualified specimens are contain low mounts of surface damage(about 5 nm) on patterned specimen.

• KSTLE International Journal
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• v.1 no.1
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• pp.48-51
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• 2000

Surface damage accumulation of alumina ceramics under the cyclic stress state was analyzed. The alternating stress state in repeat pass sliding contact was simulated by a synchronized biaxial (normal and tangential) repeated indentation technique. Wear debris formation mechanism through damage accumulation and fatigue grain failure in both alumina ceramic balls and flat disks was confirmed, and the contact induced surface degradation due to fatigue cracking accumulation was quantified by measuring vertical contact displacement. Variation of structural compliance (slope of load-displacement curve) of two contacting bodies was expressed as a variation of the apparent elastic property, called pseudo-elastic constant, of the contact system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.581-586
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• 2014

In general vibration test considers both harmonic vibration and random vibration, When developing the vehicle component. But the effect of harmonic vibration is larger in the parts around the vehicle engine, sole testing the harmonic vibration is considered. In this study, the fatigue damage of the linear system fixed around the engine is analyzed when the effect of random vibration is higher, harsher than the normal road surface condition. In condition the vehicle speed and the engine RPM are similar, the higher the harshness of the road surface condition is, the larger the fatigue damage level is. Therefore both random vibration and harmonic vibration must be considered in vibration test of components around the engine. Proposing the sine on random(SOR) vibration test that can exam considering both of vibrations, harmonic and random.

• Advances in aircraft and spacecraft science
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• v.10 no.6
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• pp.555-572
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• 2023

Airplanes in flight collide with raindrops, and the leading edges of the airframe can be damaged when colliding with raindrops. A single waterjet testing platform was created to study rain erosion damage. Carbon fiber samples with three types of skins were studied and the mechanical properties were measured using a nanoindentation instrument. The research results show that the impact force on the sample increases with the continuous increase in the impact speed of raindrops, which leads to an increase in the damage area. Sheathing with low surface roughness is more damaged than other sheathings due to its rougher surface, and the result proves that surface roughness has a more significant effect on rain erosion damage to sheathings compared to their hardness.