• 제목/요약/키워드: Surface condition

검색결과 7,668건 처리시간 0.033초

최적조건 선정을 위한 Pad 특성과 Wafer Final Polishing의 가공표면에 관한 연구 (The Study on the Wafer Surface and Pad Characteristic for Optimal Condition in Wafer Final Polishing)

  • 원종구;이은상;이상균
    • 한국기계가공학회지
    • /
    • 제11권1호
    • /
    • pp.26-32
    • /
    • 2012
  • Polishing is one of the important methods in manufacturing of Si wafers and in thinning of completed device wafers. This study will report the characteristic of wafer according to processing time, machining speed and pressure which have major influence on the abrasion of Si wafer polishing. It is possible to evaluation of wafer abrasion by load cell and infrared temperature sensor. The characteristic of wafer surface according to processing condition is selected to use a result data that measure a pressure, machining speed, and the processing time. This result is appeared by the characteristic of wafer surface in machining condition. Through that, the study cans evaluation a wafer characteristic in variable machining condition. It is important to obtain optimal condition. Thus the optimum condition selection of ultra precision Si wafer polishing using load cell and infrared temperature sensor. To evaluate each machining factor, use a data through each sensor. That evaluation of abrasion according to variety condition is selected to use a result data that measure a pressure, machining speed, and the processing time. And optimum condition is selected by this result.

다층고조를 갖는 원형 실린더에 의한 전자파 산란 : OSRC 방법 (Electromagnetic Wave Scattering from Multilayered Circular Cylinder : OSRC Approach)

  • 이화춘;이대형;최병하
    • 전자공학회논문지A
    • /
    • 제32A권3호
    • /
    • pp.38-44
    • /
    • 1995
  • The scattered electric field from a multilayered circular dielectric cylinder is caculated. Approximate boundary condition used in on-surface radiation boundary condition(OSRC) method has been applied to all the boundary surface of N-layered dielectric cylinder. It was assumed that scattered electric field at inner boundary surface in one region transmitted to the adjacent region at outer boundary surface. In the whole region, the unknown coefficients of electric field are acquired by the given incident electric field with ease. Electric field distribution at each boundary surface and the scattered electric field in free space are taken with the calculated unknown coefficients. the results obtainted were compared with those results that were used by regular surface boundary condition.

  • PDF

회귀분석을 이용한 STS304의 표면정도에 미치는 엔드밀 가공조건의 상관관계 추정 (Presumption for Mutual Relation of the End-Milling Condition on Surface Roughness of ST S304 by Regression Analysis)

  • 류미라;이상재;배효준;진동규;전태옥;박흥식
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2003년도 추계학술대회
    • /
    • pp.1822-1827
    • /
    • 2003
  • End-milling have been used widely in industrial system because it is effective to a material manufacturing with various shape. Recently the end-milling processing is needed the high-precise technique with good surface roughness and rapid time in precision machine part and electronic part. The optimum surface roughness has an effect on end-milling condition such as, cutting direction, spindle speed, feed rate and depth of cut, etc. Therefore this study was carried out to presume for mutual relation of end-milling condition to get the optimum surface roughness by regression analysis. The results shown that coefficient of determination($R^{2}m$) of regression equation has a fine reliability over 80% and regression equation of surface rough is made by regression analysis.

  • PDF

Diamond 공구에 의한 aluminium 합금의 초정밀 절삭가공에 관한 연구 (A Study on the Ultraprecision Cutting of Aluminium Alloy by the Diamond Tool)

  • 유기현;문상돈;유종선;김태영;서남섭
    • 한국정밀공학회지
    • /
    • 제13권1호
    • /
    • pp.78-83
    • /
    • 1996
  • This paper presents the characteristics of surface roughness and cutting force in ultraprecision cutting of aluminium alloy using natural diamond tools whose edge radii are smaller than those of tools made of other materials. The feed rate and depth of engagement were set to be a micrometer order. After measuring the surface roughness of machined surface and cutting force for each cutting condition, the relations between the surface quality and its condition were investigated qualitatively. If the feed rate was under a certain limit, the machined surface quality was deteriorated unexpectedly. This is supposed to have happened due to vibration leading its condition to abnormal one. In a certain situation the machined surface roughness by a natural diamond tool was inferior to that made by a carbide tool whose cutting edge radius is larger. This is supposed to be caused by not normal machining but burnishing effect.

  • PDF

A comparison of the neumann-kelvin and rankine source methods for wave resistance calculations

  • Yu, Min;Falzarano, Jeffrey
    • Ocean Systems Engineering
    • /
    • 제7권4호
    • /
    • pp.371-398
    • /
    • 2017
  • Calm water wave resistance plays a very important role in ship hull design. Numerical methods are meaningful for this reason. In this study, two prevailing methods, the Neumann-Kelvin and the Rankine source method, were implemented and compared. The Neumann-Kelvin method assumes linearized free surface boundary condition and only needs to mesh the hull surface. The Rankine source method considers nonlinear free surface boundary condition and meshes both the ship hull surface and free surface. Both methods were implemented and the wave resistance of a Wigley III and three Series 60(Cb=0.6, 0.7, 0.8) hulls were analyzed. The results were compared with experimental results and the merits of both numerical techniques were quantified. Based on the results, it is concluded that the Rankine source method is more accurate in the calculation of the wave-making resistance. Using the Neumann-Kelvin method, it is found to be easier to model the hull and can be used for slender ships to solve problems like wave current coupling calculation.

알루미늄 합금의 스파이럴 상향가공 시 절삭조건이 표면거칠기에 미치는 영향 (Effects of cutting condition on surface roughness in the spiral up milling of aluminum alloy)

  • 천세호
    • 한국기계가공학회지
    • /
    • 제13권4호
    • /
    • pp.83-90
    • /
    • 2014
  • The spiral up milling of an aluminum alloy was performed in this study. In accordance with the cutting condition, the surface roughness behavior and significance of the research with regard to specific factors were analyzed. The cutting speed, feed, and depth of the cut were found to be statistically significant. A higher cutting speed improved the surface roughness. On the other hand, as the feed and depth of the cut increase, the surface roughness decreases. An interaction effect between the feed and depth of the cut was detected. According to the surface roughness in relation to the cutting conditions, the model showed non-linear behavior.

회귀분석을 이용한 Al 합금의 표면거칠기에 미치는 엔드밀 가공조건의 상관관계 추정 (Presumption for Mutual Relation of the End-Milling Condition on Surface Roughness of Al Alloy by Regression Analysis)

  • 이상재;배효준;박흥식;전태옥
    • 한국공작기계학회논문집
    • /
    • 제12권5호
    • /
    • pp.46-52
    • /
    • 2003
  • End-milling have been used widely in industrial system because it is effective to a material manufacturing with various shape. Recently the end-milling processing is needed the high-precise technique with good surface roughness and rapid time in precision machine part and electronic part. The optimum surface roughness has an effect on end-milling condition such as, cutting direction spindle speed, feed rate and depth of cut, etc. Therefore this study was carried out to presume for mutual relation of end-milling condition to get the optimum surface roughness by regression analysis. The results shown that coefficient of determination($\textrm{R}^2$) of regression equation has a fine reliability of 87.5% and regression equation of surface rough is made by regression analysis.

Bicubic Patch체 의한 보간곡면의 모델링 및 가공에 관한 연구

  • 이진모;이동주
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 1997년도 춘계학술대회 논문집
    • /
    • pp.1025-1030
    • /
    • 1997
  • In this study,the procedure of interpolation surface modeling on bicubic spline patch equation and NC machining are presented. The procedure consists of three parts : patch modeling,cutter location data generation,post processing and NC milling machining. For generation of the cutter location data,tangent vectors and units normal vectors on the patch must be calculated. In order to investigate the properties of the interpolation surface created by bicubic spline patch, two kinds of end conditions, clamped end condition and relaxed end condition,were applied in this study. The shape of the patch depends on the magnitide of the tangent vectors and twist vectors at the corners of bicubic surface patch. the patch generated by relaxed end condition more approximated to the surface patch which was given.

  • PDF

도로 노면 조건을 고려한 차량 엔진 주변 부품의 피로손상도 분석 (Analysis of Fatigue Damage of the parts around the vehicle engine with Respect to Road surface conditions)

  • 신성영;김찬중;이봉현
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2014년도 추계학술대회 논문집
    • /
    • pp.581-586
    • /
    • 2014
  • In general vibration test considers both harmonic vibration and random vibration, When developing the vehicle component. But the effect of harmonic vibration is larger in the parts around the vehicle engine, sole testing the harmonic vibration is considered. In this study, the fatigue damage of the linear system fixed around the engine is analyzed when the effect of random vibration is higher, harsher than the normal road surface condition. In condition the vehicle speed and the engine RPM are similar, the higher the harshness of the road surface condition is, the larger the fatigue damage level is. Therefore both random vibration and harmonic vibration must be considered in vibration test of components around the engine. Proposing the sine on random(SOR) vibration test that can exam considering both of vibrations, harmonic and random.

  • PDF

측벽 엔드밀 가공 시 반응표면법을 이용한 최적 가공조건 (Optimum Working Condition of Side Wall End Milling Using Response Surface Methodology)

  • 홍도관;최재기;박진우;백황순;안찬우
    • 한국소음진동공학회논문집
    • /
    • 제18권11호
    • /
    • pp.1097-1104
    • /
    • 2008
  • Working condition is one of the most important factors in precision working. In this study, we optimized the vibration acceleration of working progress direction using RSM(response surface methodology) by table of orthogonal array. RSM was well adapted to make analytic model for minimizing vibration acceleration, created the objective function and saved a great deal of computational time. Therefore, it is expected that the proposed optimization procedure using RSM can be easily utilized to solve the optimization problem of working condition. The experimental results of the surface roughness and vibration acceleration showed the validity of the proposed working condition of side wall end-milling as it can be observed.