• Title/Summary/Keyword: Surface concentration

Search Result 6,117, Processing Time 0.033 seconds

Si Anisotropic Etching Characteristics of TMAH/IPA (TMAH/IPA의 실리콘 이방성 식각특성)

  • 정귀상;박진성;최영규
    • Electrical & Electronic Materials
    • /
    • v.10 no.5
    • /
    • pp.481-486
    • /
    • 1997
  • This paper describes the anisotropic etching characteristics of Si in acqueous TMAH/IPA solutions. The etch rates of (100) oriented Si crystal planes decrease with increasing TMAH concentration and IPA concentration. Etchant concentration and etch temperature have a large effect on hillock density. Hillock density strongly increase with lower TMAH concentration and higher etch temperature. The etched (100) planes are covered by pyramidal-shaped hillocks below TMAH 15 wt.%, but very smooth surface is obtained TMAH 25 wt.%. The addition of IPA to TMAH solution leads to smoother surfaces of sidewalls etched planes. Undercutting ratio of pure TMAH solution is much higher than KOH. But, addition of IPA to TMAh the underrcutting ratio reduces by a factor of 3∼4. Therefore, acqueous TMAH/IPA solution is able to use as anisotropic etchant of Si because of full compability with IC fabrication process.

  • PDF

On the Development of the Statistical $SO_2$ Forecasting Technique by the Multiple Regression Analysis in Wonju City (중회귀식을 이용한 원주시 $SO_2$ 오염도 예보기법 개발에 관한 연구)

  • 송동웅
    • Journal of Environmental Science International
    • /
    • v.7 no.6
    • /
    • pp.827-831
    • /
    • 1998
  • Statistical $SO_2$ forecasting technique by multiple regression analysis was designed and developed to predict $SO_2$ concentration in Wonju City. $SO_2$ concentration data measured from air pollution monitoring system and meteorological factors data such as : wind speed, atmospheric stability, surface temperature, relative humidity and precipitation were used in Wonju City during the 1996~1997. As the results, correlation model for forecasting was well fitted with some parameters including minimum temperature, wind speed and the $SO_2$ concentration of the previous day.

  • PDF

A Device Parameter Extraction Method for Thin Film SOI MOSFETs (얇은 박막 SOI (Silicon-On-Insulator) MOSFET 에서의 소자 변수 추출 방법)

  • Park, Sung-Kye;Kim, Choong-Ki
    • Proceedings of the KIEE Conference
    • /
    • 1992.07b
    • /
    • pp.820-824
    • /
    • 1992
  • An accurate method for extracting both Si film doping concentration and front or back silicon-to-oxide fixed charge density of fully depleted SOI devices is proposed. The method utilizes the current-to-voltage and capacitance-to-voltage characteristics of both SOI NMOSFET and PMOSFET which have the same doping concentration. The Si film doping concentration and the front or back silicon-to-oxide fixed charge density are extracted by mainpulating the respective threshold voltages of the SOI NMOSFET and PMOSFET according to the back surface condition (accumulation or inversion) and the capacitance-to-voltage characteristics of the SOI PMOSFET. Device simulations show that the proposed method has less than 10% errors for wide variations of the film doping concentration and the front or the back silicon-to-oxide fixed charge density.

  • PDF

Mechanical properties of polycrystalline 3C-SiC thin films with various doping concentrations (도핑농도에 따른 다결정 3C-SiC 박막의 기계적 특성)

  • Kim, Kang-San;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
    • /
    • v.17 no.4
    • /
    • pp.256-260
    • /
    • 2008
  • This paper describes the mechanical properties of poly(polycrystalline) 3C-SiC thin films with various doping concentration, in which poly 3C-SiC thin fil's mechanical properties according to the n-doping concentration 1($9.2{\times}10^{15}cm^{-3}$), 3($5.2{\times}10^{17}cm^{-3}$), and 5%($6.8{\times}10^{17}cm^{-3}$) respectively were measured by nano indentation. In the case of $9.2{\times}10^{15}cm^{-3}n$-doping concentration, Young's modulus and hardness were obtained as 270 and 30 GPa, respectively. When the surface roughness according to n-doping concentrations was investigated by AFM(atomic force microscope), the roughness of poly 3C-SiC thin films doped by 5% concentration was 15 nm, which is also the best of them.

Characteristics of Volatile Organic Compounds Emitted in Building Materials and Their Predictions of Time-dependent Variation

  • Pang, Seung Ki;Sohn, Jang Yeul;Lee, Kwang Ho
    • Architectural research
    • /
    • v.7 no.1
    • /
    • pp.19-26
    • /
    • 2005
  • Unlike other countries, Korea uses various kinds of wall-paper as finishing material. Conventional wall-paper consists of paper and vinyl, and petrochemical ink is used for the decoration of the surface. Adhesive is used to paste the wall with the wall-paper, which emit substantial amounts of VOCs and formaldehyde. In this study, VOCs characteristics emitted from specimens made of concrete, mortar, gypsum board and wall-paper were investigated using small chamber method. Moreover, concentration and emission factor of BTEX(Benzene, Toluene, Ethylbenzene, m,p,o-Xylene) and TVOC were investigated, and concentration and emission factor decay were estimated. As a result of the prediction, both time-dependent concentration decay and cumulative concentration can be converted into the logarithmic scale. Furthermore, prediction equations were developed from the experimental results under accurately controlled experimental conditions. Therefore, there may be difference if the estimated equations are directly applied to real buildings. Further research should be done on the generalization of the developed prediction equations.

Studies on the Viscoelasticities of Acetal Type Nonionic Surfactants (아세탈형(型) 비(非)이온성(性) 계면활성제(界面活性劑)의 점탄성(粘彈性)에 관한 연구(硏究))

  • Shon, Joo-Hwan;Lee, Seung-Youl;Nam, Ki-Dae;Kim, Yu-Bae
    • Journal of the Korean Applied Science and Technology
    • /
    • v.5 no.1
    • /
    • pp.53-62
    • /
    • 1988
  • Properties of aqueous solution, that is, the viscosities and solubilities of benzene were observed in relation to critical micelle concentration of each alkyl aldehyde polyoxyethylene glycol acetal type surfactant. These showed that the mininum points in specific viscosity/concentration-concentration curves were corresponded with the critical micelle concentration obtained by surface tension and appeared the remarkable increase of non-Newtonics according to the increase of the number of carbon in hydrophobic groups. The fluidity of non-Newtonics is not observed by a little increase of the degree of polymerization in polyoxyethylene glycol groups.

Drug Release Characteristics of Biodegradable Polymers for Stent Coating (스텐트 코팅용 생분해성 고분자의 약물 방출 특성)

  • 강혜수;김진설;김동운;강병철;이봉희;김범수
    • KSBB Journal
    • /
    • v.18 no.2
    • /
    • pp.107-110
    • /
    • 2003
  • Biodegradable polymers, poly(lactic-co-glycolic acid) (PLGA), poly(3-hydroxybutyrate) (PHB), and medium chain length polyhydroxyalkanoates (MCL-PHA) containing rose bengal (model drug) were coated onto the surface of stainless steel (stent materials) and their in vitro release characteristics were investigated. Drug release increased with; decreasing PLGA concentration, increasing rose bengal concentration, and Increasing dip-coating duration. The order of drug release from the polymer coating was: PHB > PLGA > MCL-PHA. These results suggest that drug release can be controlled by: changing the concentration and type of polymer, the drug concentration, and the dip-coating duration.

Some heavy metal concentration of surface sediments from the southwestern coast of Korea (서남해안 연근해저 퇴적물의 중금속 함량 및 분포)

  • 전수경;조영길
    • Journal of Environmental Science International
    • /
    • v.11 no.12
    • /
    • pp.1299-1305
    • /
    • 2002
  • Thirty sediment samples of the <63${\mu}{\textrm}{m}$ fraction collected from the southwestern coast of Korea were analysed for their heavy metal (Fe, Mn, Cr, Co, Cu, Ni, Zn and Pb) concentration. The results show that sediment texture plays a controlling role on the total metal concentrations and their spatial distribution. A single lM HCl extraction procedure was used in order to assess the environmental risk of heavy metals in bottom sediments. The non-residual fraction was the most abundant pool for Mn and Pb in most samples, which means that this metals are highly avaliable in these sediments. Cr, Ni, Fe, Co, Zn and Cu were mainly associated with the residual fraction, suggesting that their concentrations are controlled significantly by transport processes with the fine particles as carriers from diffuse pollution source. Concentration enrichment ratios(CER) were calculated from the non-residual contents and their values allowed us to classify the sediments according to their environmental risk.

Numerical Simulation of Ozone Concentration using the Local Wind Model in Pusan Coastal Area, Korea (부산연안역에서 국지풍모델을 이용한 오존농도의 수치모의)

  • Jeon, Byung-Il;kim, Yoo-Keun;Lee, Hwa-Woon
    • Journal of Environmental Science International
    • /
    • v.6 no.4
    • /
    • pp.335-350
    • /
    • 1997
  • Numerical simulations of photochemical air pollution (CBM: Carbon-Bond Mechanisms under a theoretical three-dimensional local wind system are carried to clarify the fundamental characteristics of the effects of local wind on photochemical air pollution. According to the AWS data of Pusan coastal area and KMA, the surface wind of Pusan during summertime showed a very remarkable land and sea breeze circulation. The ozone concentration distribution using local wind model showed that high ozone concentration zone near coastal area moved toward inland In the afternoon. This change implies a sea breeze Increases the ozone concentration, but a land breeze decreases it in Pusan coastal area.

  • PDF

Effect of Binder's Concentration and Fiber Type on Mechanical Properties of Fragrant Fabrics (마이크로캡슐을 이용한 방향가공시 바인더 농도 및 섬유 종류에 따른 물성)

  • 김혜림;송화순
    • Journal of the Korean Society of Clothing and Textiles
    • /
    • v.28 no.7
    • /
    • pp.1029-1036
    • /
    • 2004
  • The fragrant fabrics were prepared by treatment with eucalyptus microcapsules. 100% cotton fabric, 100% polyester fabric and 100% wool fabric were used as test specimens. Using pad-dry-cure method, microcapsules were attached on each specimen by acrylic binder under conditions of varying concentration. Surface property, stiffness, and air permeability of fragrant fabrics were evaluated. As increasing concentration of binder, add-on yield was increased. Add-on yield was decreased with increasing laundering cycle, especially in polyester fabric. As the concentration of binder was increased, the properties of stiffness and air permeability were decreased. Also it fumed out that pad-dry-cure method was not suitable to polyester fabric.