• Journal of the Optical Society of Korea
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• v.16 no.1
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• pp.80-84
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• 2012

A high reflectance mirror, which has very low absorption and scattering loss, was coated onto a crystalline substrate by ion beam sputtering and then annealed at $450^{\circ}C$. We carefully selected the mirror coating material, and designed the high reflectance mirror, in order to avoid UV degradation which comes from the He-Ne plasma. We measured the surface roughness of the Zerodur substrate using phase shift interferometry and atomic force microscopy, and compared it with the TIS scattering of the mirror. The cavity ring-down method was used to measure the absorption of the mirror, and the thin film structure was correlated to its results. We also compared the optical properties of coated mirrors before and after annealing.

• Transactions of the Society of Information Storage Systems
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• v.1 no.2
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• pp.182-187
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• 2005

A large area micro mirror is an optical element that functions as changing an optical path by reflection in integrated optical system. We fabricated the large area silicon mirror by anisotropic etching using MEMS for implementation of integrated optical pickup. In this work, we report the optimum conditions to better fabricate and design, greatly improve mirror surface quality. To obtain mirror surface of $45^{\circ},\;9.74^{\circ}$ off-axis silicon wafer from (100) plane was used in etching condition of $80^{\circ}C$ with 40wt.% KOH solution. After wet etching, polishing process by MR fluid was applied to mirror surface for reduction of roughness. In the next step, after polymer coating on the polished Si wafer, the Si mirror was fabricated by UV curing using a trapezoid bar-type way structure. Finally, we obtained peak to valley roughness about 50 nm in large area of $mm^2$ and it is applicable to optical pickup using blu-ray wavelength as well as infrared wavelength.

• Korean Journal of Materials Research
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• v.28 no.4
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• pp.201-207
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• 2018

Infrared(IR) heating has many advantages, such as energy efficiency, reduced heating time, cleanliness, equipment compactness, high drying rate and easy automation. These features of IR heating provide widely industrial applications, such as surface heat treatment in semiconductor fabrication, thermoforming of polymers, drying and disinfection of food products, heating to metal forging, and drying of wet materials. In this study, the characteristics of a protected gold mirror were examined by spectrophotometer and the lifetime of the coating layers were evaluated by a cross-cutting method and salt spray test. The effects of manufacturing conditions on the protected gold mirror were seen and remedies for these effects were noted in order to improve the properties of the protected gold mirror in the drying process. The reflectance and lifetime of the protected gold mirror was influenced by manufacturing conditions, such as surface roughness and forming conditions of the anti-oxide layer, the adhesion layer, the reflecting layer and the protection layer. The results of this study showed that the protected gold mirror manufactured using a buffing method for pre-treatment resulted in the most effective reflectance. In addition, $Al_2O_3$ coating on an Al substrate as an anti-oxide layer was more effective than the anodizing process in the test of reflectance. Furthermore, the protected gold mirror manufactured by layers forming of various materials resulted in the most effective reflectance and lifetime when coated with $Al_2O_3$ as the anti-oxide layer, coated Cr as the adhesion layer, and coated $MgF_2$ as the protection layer.

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.187-188
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• 2007

Four kinds of mirror substrates with same surface roughness were fabricated. On those substrates, a dielectric multi-layer coating with high reflectivity was deposited by ion beam sputtering technique. Most of the fused silica mirrors showed lower scattering than the ZERODUR mirrors one, which deposited on substrates similar in surface roughness. The ZERODUR mirrors scattering strongly depend on the micro-structure of $Ta_2O_5/SiO_2$ thin films wear deposited on ZERODUR substrates.

• Journal of the Optical Society of Korea
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• v.10 no.2
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• pp.57-62
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• 2006

Adaptive optics (AO) has been applied in various fields including astronomy, ophthalmology and high power laser systems. An adaptive optics system for a high power laser is not significantly different from other AO systems in the point of configuration except that high energy absorbed by the deformable mirror distorts the deformable mirror surface and so degrades system performance. Currently we are researching a bimorph deformable mirror for beam cleaning of a high power class laser. The bimorph mirror was considered to have 99% reflective coating and 1% absorption. So this paper first presents the temperature profiles and corresponding thermal distortions of the bimorph mirror faceplate when the mirror is under a high power lasing for 10 seconds. The analysis was accomplished by the use of finite difference and finite element computer programs to generate the element arrays, calculate the temperature profiles, and determine the structural deformations. Then this paper proposes an 'embedded wafer' type water-cooling system with derived cooling parameters.

• Aerospace Engineering and Technology
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• v.11 no.2
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• pp.26-32
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• 2012

The purpose of this paper is to present the summary of trouble shooting result on the dendrite defect of SSM(Second Surface Mirror) which is one of major thermal control elements for satellite. Through this failure analysis on SSM dendrite, it is found that the dendrite defect may happen to silver coated layer of SSM if SSM is directly exposed to the environment containing sulfur or chlorine compound. As a preventive action, it is required that SSM shall not contact directly with rubber pad containing sulfur compound.

• Journal of the Korean Society for Heat Treatment
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• v.8 no.1
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• pp.44-52
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• 1995

The specimen for laser hardening have been carried out using SM45C which is coated with black paint or graphite for better absorption. Segmented mirror was used in order to produce a square beam ($10{\times}10mm$) at the surface with a homegeneous intensity distribution across the beam. $CO_2$-Laser power was changed from 2kW to 4kW and transfer velocity was varied from 0.1m/min to 2.0m/min. The maximum hardness and case depth of SM45C steel are 790Hv and 1.5mm by laser hardening. When the surface of specimens was melted during laser hardening. the surface hardness of SM45C steel was decreased. The surface hardness of 2 layer coated specimen(black paint: $15.4{\mu}m$, graphite coating: $9.5{\mu}m$) was increased than that of 1 layer coated specimen. It is desirable to prepare 2 or more coating layer on the steel surface in order to sufficient case depth and hardness in laser hardening. The graphite coating on the specimen surface was obtained more uniform temperature distribution than black paint coating in laser hardening process.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.66 no.6
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• pp.962-967
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• 2017

The Diamond-Like-Carbon (DLC) coating is a new carbon-based amorphous material. Carbon ions in the plasma are electrically accelerated and collide with the substrate to form a thin film. This film has similar properties to diamonds such as high surface hardness, low coefficient of friction, corrosion resistance and durability that do not react with acids and bases. Also, since there is no thermal deformation, it can be printed at room temperature. and coated on almost all materials such as paper, polymer, ceramics and various metals even aspheric lens it is possible to mirror surface coating with excellent surface roughness. In this paper, we have analyzed the DLC film formed by Filtered Arc Ion Plating (Filtered AIP) process.

• Korean Journal of Optics and Photonics
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• v.29 no.4
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• pp.166-172
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• 2018

In this paper, we propose a new method to predict a mirror's surface deformation due to the stress of moisture release by a coating in the environment of outer space. We measured the surface deformation of circular samples 50 mm in diameter and 1.03 mm thick, using an interferometer. The results were analyzed using Zernike fringe polynomials. The coating stress caused by moisture release was calculated to be 152.7 MPa. This value was applied to an analytic model of a 1.25 mm thickness sample mirror, confirming that the change of surface deformation could be predicted within the standard deviation of the measurement result ($78.9{\pm}5.9nm$). Using this methodology, we predicted the surface deformation of 600 mm hyperbolic mirror for the Compact Advanced Satellite, which will be launched in 2019. The result is only $2.005{\mu}m$ of focal shift, leading to 2.3% degradation of modulation transfer function (MTF) at the Nyquist frequency, which satisfies the requirement.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.6
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• pp.45-51
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• 1996

Silicon wafers are required to be finished under the roughness of nanometer order for the subsequent chip fabrication processes. Recently, the finish grinding techniques have been researched for the improvement of accuracy and surface roughness simultaneously. Among them, the grinding technique using fine abrasive has been known as an easily accessible method. However, the manufacture of the fine grit grinding wheel has been very difficult because of the coherence of the grits. In this paper, the development of the ultrafine grit silica($SiO_2$) grinding wheel by the combination of the binder coating and the vacuum forming techniques is reported. And, the mechanochemical removal effects of the grinding conditions are discussed. Finally, a successful result of Ra O.4nm. Rmax 4nm in the ground surface roughness of a 6 inch silicon wafer was achieved.