• Smart Structures and Systems
• /
• v.11 no.2
• /
• pp.185-197
• /
• 2013

We developed a simultaneous strain measurement and damage detection technique using a pair of surface-mounted piezoelectric transducers and a fiber connecting them. This is a novel sensor configuration of the fiber acoustic wave (FAW) piezoelectric transducer. In this study, lead-zirconate-titanate (PZT) transducers are installed conventionally on a plate's surface, which is a technique used in many structural health monitoring studies. However, our PZTs are also connected with an optical fiber. A FAW and Lamb wave are simultaneously guided in the optical fiber and the structure, respectively. The dependency of the time-of-flight of the FAW on the applied strain is quantified for strain sensing. In our experimental results, the FAW exhibited excellent linear behavior and no hysteresis with respect to the change in strain. On the other hand, the well-known damage detection function of the surface-mounted PZT transducers was still available by monitoring the waveform change in the conventional Lamb wave ultrasonic path.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.32 no.1
• /
• pp.20-26
• /
• 2012

The objective of this study is to assess plastic deformation in aluminium alloy by acoustic nonlinearity of laser-generated surface waves. A line-arrayed laser beam made by high-power pulsed laser and mask slits is utilized to generate the narrowband surface wave and the frequency characteristics of laser-generated surface waves are controlled by varying the slit opening width and slit interval of mask slits. Various degrees of tensile deformation were induced by interrupting the tensile tests so as to obtain aluminum specimens with different degrees of plastic deformation. The experimental results show that the acoustic nonlinear parameter of a laser-generated surface wave increased with the level of tensile deformation and it has a good correlation with the results of micro-Vickers hardness test and electron backscatter diffraction (EBSD) test. Consequently, acoustic nonlinearity of laser-generated surface wave could be potential to characterize plastic deformation of aluminum alloy.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.447-449
• /
• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 1992.05a
• /
• pp.144-146
• /
• 1992

Surface acoustic wave(SAW) oscillator offers many attractive features for application to vapor sensors. The perturbation of SAW velocity by the hexafluoropropence plasma polymer thin film has been studied for relative humidity sensing. adsorption of moisture produces rapid aid changes in the properties of the film, resulting in a change in the velocity of surface acoustic waves and, hence, in the frequency of one SAW oscillator. The device used in our experiments have 55 MHZ SAW oscillator fabricated on a LiNbO substrate.

• Journal of the Korean Society for Nondestructive Testing
• /
• v.29 no.6
• /
• pp.534-549
• /
• 2009

As the thin film technology has emerged in various fields, adhesion of the film interface becomes an important issue in terms of the longevity and durability of thin film devices. Diverse nondestructive methods utilizing acoustic techniques have been developed to assess the interfacial integrity. As an effective technique based on the ultrasonic wave focusing and the surface acoustic wave(SAW) generation, scanning acoustic microscopy(SAM) has been investigated for adhesion evaluation. Visualization of film microstructures and quantification of adhesion weakness levels by SAW dispersion are the recent achievements of SAM. To overcome the limitations in the theoretical dispersion model only suitable for perfectly elastic and isotropic materials, a new model has been more recently developed in consideration of film anisotropy and viscoelasticity and applied to the adhesion evaluation of polymeric films fabricated on semiconductive wafers.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2008.11a
• /
• pp.368-371
• /
• 2008

Cellulose based Electroactive Paper (EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used fur a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer (IDT) structure using lift-off technique with a finger gap of $10{\mu}m$ was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.

• Transactions of the Korean Society for Noise and Vibration Engineering
• /
• v.18 no.11
• /
• pp.1128-1133
• /
• 2008

Cellulose based electroactive paper(EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used for a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer(IDT) structure using lift-off technique with a finger gap of 10mm was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2010.11a
• /
• pp.407-408
• /
• 2010

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2002.07a
• /
• pp.156-159
• /
• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be fabricated as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible Suspended FBAR using surface micromachining. It is possible to make Si$_3$N$_4$/SiO$_2$/Si$_3$N$_4$membrane by using surface micromachining and its good effect is to remove the substrate silicon loss. FBAR was made on 2$\mu\textrm{m}$ multi-layered membrane using CVD process. According to our result, Fabricated film bulk acoustic wave resonator has two adventages. First, in the respect of device Process, our Process of the resonator using surface micromachining is very simple better than that of resonator using bull micromachining. Second, because of using the multiple layer, thermal expansion coefficient is compensated, so, the stress of thin film is reduced.

• Journal of the Korean Society of Visualization
• /
• v.20 no.3
• /
• pp.19-26
• /
• 2022

In droplet microfluidics, precise droplet manipulation is required in numerous applications. This study presents ultrasonic surface acoustic wave (USAW)-based microfluidic device for label-free droplet separation based on size. The proposed device is composed of a slanted-finger interdigital transducer on a piezoelectric substrate and a polydimethylsiloxane microchannel placed on the substrate. The microchannel is aligned in the cross-type configuration where the USAWs propagate in a perpendicular direction to the flow in the microchannel. When droplets are exposed to an acoustic field, they experience the USAW-induced acoustic radiation force (ARF), whose magnitude varies depending on the droplet size. We modeled the USAW-induced ARF based on ray acoustics and conducted a series of experiments to separate different-sized droplets. We found that the experimental results were in good agreement with the theoretical estimation. We believe that the proposed method will serve as a promising tool for size-based droplet separation in a label-free manner.