• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• 한국전산유체공학회:학술대회논문집
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• 2003.10a
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• pp.77-79
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• 2003

The stability of flows induced by a surface acoustic wave (SAW) propagating along the deformable walls in a confined parallel-plane microchannel or slab in the laminar flow regime is investigated. The governing equation which was derived by considering the nonlinear coupling between the deformable or waving interface and viscous fluids is linearized and then the problem is solved by a verified code based on the spectral method together with the associated interface and boundary conditions. The value of the critical Reynolds number was found to be near 1439 which is much smaller than the rigid-wall case: 5772 for conventional pressure-driven flows.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.4 s.181
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• pp.139-145
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• 2006

This paper presents the design and manufacturing of a sensor using SAW and delay line in order to measure temperature. SAW sensors having single and double electrodes are manufactured on the $128^{\circ}YX-LiNbO_3$ substrate, and its process is addressed. Before manufacturing, the device is simulated using a commercial finite element program. The frequency responses of the saw sensor on the temperature change is measured. Since the center frequency on the temperature change from $-30^{\circ}C$ to $80^{\circ}C$ is linearly changed, the saw sensor is applicable to measure the temperature change or strain variation.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.140-144
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• 2003

To investigate failure analysis of surface acoustic wave (SAW) filter for radio frequency, high temperature storage test was carried out. The failure criteria were insertion loss at passband and rejection level at stopband. As a result, the insertion loss at passband increase about 4 dB was due to damages of interdigital transducer (IDT). That is caused by poor adhesion between metal electrode(AI) and piezoelectric substrate and defects on a manufacturing process. This result indicates that good adhesion between electrode and ceramic substrate is important factor And also we investigated the demage factors of electrode. Screen possible of saw filter using high temperature storage test(HTOL) in the manufacturing phase be presented.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.79-83
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• 2014

In this paper, SAW devices are fabricated using various IDT shape(Single/Double) to check an effect of the IDT on SAW device. And based on theory of a particle velocity moved by SAW and IDT, a particle velocity is measured and calculated. Depend on insert power, a particle velocity using Single-IDT SAW device is about two times bigger than Double-IDT SAW device and it's almost same with a theoretical different.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.41 no.6
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• pp.687-693
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• 1992

To improve dielectric, piezoelectric and temperature stability in 0.50Pb(SnS11/2TSbS11/2T)OS13T - 0.35PbTiOS13T - 0.60PbZrOS13T + 0.4[wt%]MnOS12T piezoelectric ceramics which is used for surface acoustic wave devices, CrS12TOS13T was added and the specimens were fabricated by Hot Press method, and their characteristics were measured with CrS12TOS13T addition. From the results, in the specimen added by 0.2[wt%]CrS12TOS13T, dielectric constant and mechanical quality factor were 380 and 2307, respectively, and it was suited for surface acoustic wave device and the temperature coefficient of the resonant frequency in the specimen added by 0.4[wt%]CrS12TOS13T was the least value of 74.96[ppm/$^{\circ}C$].

• The Journal of the Acoustical Society of Korea
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• v.21 no.4
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• pp.421-429
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• 2002

Sea surface backscattering signal measurements were conducted in the shallow waters off the east coast of Korea to study the acoustic wave scattering from the sea surface. The grazing angles of wave range from 20° to 40° with a frequency of 60 kHz. The wind speed and surface roughness of the experiment area were 3 m/os and below 1 m, respectively. The measured acoustic backscattering strengths greatly exceed the composite roughness predictions at low grazing angles. To account for this discrepancy, the scattering strengths due to a near-surface bubble layer were considered. The prediction with bubble contribution was found to be in good agreement with the experimental measurement.

• Plant Journal
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• v.4 no.3
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• pp.54-59
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• 2008

The resonance of boiler is caused by exciting force in the gas path and it generates the vibration by the harmony of boiler's dimensional factor. According to trending toward the boiler of increasing capacity and a bigger size, it has a problem of the vibration at back-pass heating surfaces. We can predict such vibrations as comparison between vortex frequency and gas column's natural frequency. We can't rely on the method for the past decades because of changing parameters, such as an allowable error, gas temperature, gas velocity, Strouhal number. We can reduce the vibration to use the seasoning effect and change the operating condition in coal fired boiler but it's not essential solution. When the vibration occurred in the model boiler, we must measures the acoustic pressure and frequency of places for considering the means. So far, we confirmed the problem from field measures and theoretical analysis about the acoustic vibration of boiler. We installed anti-acoustic baffle in a existing boiler to change the acoustic natural frequency at the cavity, which results in reducing the acoustic vibration. The first, we prove that the acoustic resonance is caused by harmonizing vortex shedding frequency of tube heat surface with acoustic natural frequency of cavity in the range of 650~750 MW loads. The second, the acoustic resonance at the back-pass heating surface has the third order of acoustic natural frequency at the second economizer. We install five anti-acoustic baffles at the second economizer to reducing the resonance. We confirm considerably reducing the acoustic vibration of boiler during the commercial boiler.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.12
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• pp.1077-1079
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• 2003

This paper describes the development of bulk acoustic wave (BAW) resonators using a PolyVinyliDene Fluoride (PVDF). The resonators have an air gap between a substrate for acoustic isolation without surface micromachining. We measured the resonance frequency and the input reflection coefficient (S$\sub$11/) of resonators using vector network analyzer. The fundamental resonance in this experimental result was measured at 1.4 ㎓ with a return loss of -23.2 ㏈. We can confirm a possibility of resonator application as using a PVDF because it can fabricate the resonator without etching process.

• Journal of Welding and Joining
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• v.23 no.2
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• pp.59-65
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• 2005

A leaky surface acoustic wave (LSAW) velocity was measured using a scanning acoustic microscope on the ceramic/metal interface in order to investigate material properties. The inverse Fourier transform (IFFT) of the V(z) curve contains the reflectance function of a liquid-specimen interface. So, the longitudinal, transverse, and Rayleigh wave velocities for each layer are obtained by the inversion of the V(z) curve at the same time. This paper contains mainly the experimental procedure for measurements of the LSAW velocity, and the results obtained for the velocity variation of individual layer after the thermal shock. It is shown that this method is useful in measuring the material properties under external stress.