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http://dx.doi.org/10.4313/JKEM.2003.16.12.1077

A Study on Frequency Properties of Bulk Acoustic Wave Resonators using PVDF  

정영학 (성균관대학교 정보통신공학부)
김응권 (성균관대학교 정보통신공학부)
윤창진 (성균관대학교 정보통신공학부)
송준태 (성균관대학교 정보통신공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.16, no.12, 2003 , pp. 1077-1079 More about this Journal
Abstract
This paper describes the development of bulk acoustic wave (BAW) resonators using a PolyVinyliDene Fluoride (PVDF). The resonators have an air gap between a substrate for acoustic isolation without surface micromachining. We measured the resonance frequency and the input reflection coefficient (S$\sub$11/) of resonators using vector network analyzer. The fundamental resonance in this experimental result was measured at 1.4 ㎓ with a return loss of -23.2 ㏈. We can confirm a possibility of resonator application as using a PVDF because it can fabricate the resonator without etching process.
Keywords
BAW resonator; PVDF; Return loss;
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Times Cited By KSCI : 2  (Citation Analysis)
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