• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.223-225
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• 2008

In this study. we propose a wide bandwidth surface acoustic wave (SAW) motor by design of Inter Digital Transducer (IDT). SAW motor has several benefits compared with preexisted actuator. But it has narrow bandwidth, which causes the lower performance. To widen the bandwidth, the change of IDT structure was proposed, which is slanted IDT and since function apodization. The frequency responses were compared original uniform IDT and changed IDT. And the time responses were compared original uniform IDT and changed IDT. As a result, the feasibility of wide bandwidth SAW motor was certified.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.71-72
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• 2008

In this paper, the effect of thermal annealing on surface acoustic wave (SAW) properties of aluminum nitride (AlN) films were described. The films were fabricated on Si substrates by using Pulsed Reactive Magnetron Sputtering System. The SAW properties of $600^{\circ}C$-annealed AlN films were better than those of both $900^{\circ}C$-annealed AlN films and as-deposited ones. Their SAW velocities (Raleigh mode) and insertion losses were about 5212 m/s and 16.19 dB at $600^{\circ}C$ with the wavelength of $40{\mu}m$. The dependence of characteristics of AlN films on annealing conditions were also evaluated by using Fourier Transform-Infrared Spectroscopy (FT-IR) Spectrums and Atomic Force Microscopy (AFM).

• The Transactions of The Korean Institute of Electrical Engineers
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• v.60 no.3
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• pp.594-599
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• 2011

A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.5
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• pp.291-296
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• 2006

The residual stress in shot-peened Al 7075 alloy was evaluated using surface acoustic wave (SAW). Shot peening was conducted to produce a variation in the residual stress with the depth below the surface under a shot velocity of 30 m/s. The SAW velocity was measured from the V(z) curve using a scanning acoustic microscopy (SAM). The Vickers hardness profile from the surface showed a significant work hardening near the surface layer with a thickness of about 0.25 mm. As the residual stress became more compressive, the SAW velocity increased, whereas as the residual stress became more tensile, the SAW velocity decreased. The variation in the SAW velocity through the shot peened surface layer was in good agreement with the distribution of the residual stress measured by X-ray diffraction technique.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.376-380
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• 2009

Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.

• Journal of the Korean Society for Nondestructive Testing
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• v.33 no.1
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• pp.54-62
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• 2013

In this study, a wireless and non-power SAW (surface acoustic wave) temperature sensor was developed. The single inter-digital transducer (IDT) of SAW temperature sensor of which resonance frequency is 434 MHz was fabricated on $128^{\circ}$ rot-X $LiNbO_3$ piezoelectric substrate by semiconductor processing technology. To find optimal acoustic reflector for SAW temperature sensor, various kinds of acoustic reflectors were fabricated and their reflection characteristics were analyzed. The IDT type acoustic reflector showed better reflection characteristic than other reflectors. The wireless temperature sensing system consisting of SAW temperature sensor with dipole antenna and a microprocessor based control circuit with dipole antenna for transmitting signal to activate the SAW temperature sensor and receiving the signal from SAW temperature sensor was developed. The result with wireless SAW temperature sensing system showed that the frequency of SAW temperature sensor was linearly decreased with the increase of temperature in the range of 40 to $80^{\circ}C$ and the developed wireless SAW temperature sensing system showed the excellent performance with the coefficient of determination of 0.99.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.11
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• pp.30-36
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• 2008

• Journal of Advanced Navigation Technology
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• v.27 no.4
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• pp.469-472
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• 2023

If temperature management is required in factory or environmental monitoring, temperature can be measured by connecting various sensors wired or wirelessly. Surface acoustic wave sensors measure temperature using changes in acoustic waves on the sensor surface according to temperature, and are useful for wireless networks. In this paper, in order to build a wireless temperature measurement system in the 900 MHz frequency band, the temperature characteristics of the passive SAW sensor were measured, and the analysis and removal of multipath reflection wave effect inside the high temperature chamber were conducted. The resonant frequency of the SAW sensor was measured, and radio transmission/reception and multipath reflected wave removal techniques were proposed in the shielded chamber.

• Journal of Sensor Science and Technology
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• v.8 no.2
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• pp.108-114
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• 1999

Surface acoustic wave (SAW) device is very attractive for gas sensor applications because of their small size, low cost, high sensitivity, and good reliability. A dual delay line surface acoustic wave $NO_2$ gas sensors have been designed and fabricated on the $LiTaO_3$ piezoelectric single crystal substrate. The capacitance of the fabricated IDTs was 326.34pF at the frequency of 79.3MHz. The maximum reflection loss of the impedence-matched IDTs was -16.74dB at the frequency of 79.3MHz. The SAW oscillator was constructed and the stable oscillation was obtained by controlling the gain of rf amplifier properly. The oscillation frequency shift of the SAW oscillator to the $NO_2$ gas was 28Hz/ppm.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.6
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• pp.534-549
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• 2009

As the thin film technology has emerged in various fields, adhesion of the film interface becomes an important issue in terms of the longevity and durability of thin film devices. Diverse nondestructive methods utilizing acoustic techniques have been developed to assess the interfacial integrity. As an effective technique based on the ultrasonic wave focusing and the surface acoustic wave(SAW) generation, scanning acoustic microscopy(SAM) has been investigated for adhesion evaluation. Visualization of film microstructures and quantification of adhesion weakness levels by SAW dispersion are the recent achievements of SAM. To overcome the limitations in the theoretical dispersion model only suitable for perfectly elastic and isotropic materials, a new model has been more recently developed in consideration of film anisotropy and viscoelasticity and applied to the adhesion evaluation of polymeric films fabricated on semiconductive wafers.