• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.223-225
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• 2008

In this study. we propose a wide bandwidth surface acoustic wave (SAW) motor by design of Inter Digital Transducer (IDT). SAW motor has several benefits compared with preexisted actuator. But it has narrow bandwidth, which causes the lower performance. To widen the bandwidth, the change of IDT structure was proposed, which is slanted IDT and since function apodization. The frequency responses were compared original uniform IDT and changed IDT. And the time responses were compared original uniform IDT and changed IDT. As a result, the feasibility of wide bandwidth SAW motor was certified.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.71-72
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• 2008

In this paper, the effect of thermal annealing on surface acoustic wave (SAW) properties of aluminum nitride (AlN) films were described. The films were fabricated on Si substrates by using Pulsed Reactive Magnetron Sputtering System. The SAW properties of $600^{\circ}C$-annealed AlN films were better than those of both $900^{\circ}C$-annealed AlN films and as-deposited ones. Their SAW velocities (Raleigh mode) and insertion losses were about 5212 m/s and 16.19 dB at $600^{\circ}C$ with the wavelength of $40{\mu}m$. The dependence of characteristics of AlN films on annealing conditions were also evaluated by using Fourier Transform-Infrared Spectroscopy (FT-IR) Spectrums and Atomic Force Microscopy (AFM).

• 전기학회논문지
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• 제60권3호
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• pp.594-599
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• 2011

A SAW strain sensor based on Shear Horizontal wave with an 92 MHz central frequency was developed. It consists of SAW sensor, PCB substrate and bonding material (Loctite 401). External force applied to PCB substrate bonded to a piezoelectric substrate induces strain at the substrate surface, which causes changes in the elastic constant and density of the substrate and hence the propagation velocity of the SAW. The change in the velocity of the SAW result in a frequency shift of the sensor and by measuring a frequency shift, we can extract the strain induced by the external force. The $41^{\circ}$ YX $LiNbO_3$ was used because it has a Leaky shear horizontal(SH) wave propagation mode and a high electromechanical coupling coefficient ($K^2$=17.2%). And to compare with Rayleigh wave mode, $128^{\circ}$ YX $LiNbO_3$ was used. And to make a stable and low insert loss, Split IDT structure was used. The obtained sensitivity and linearity of the SAW strain sensor in the case of Split IDT were measured to be 17.2 kHz / % and 0.99, respectively.

• 비파괴검사학회지
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• 제26권5호
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• pp.291-296
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• 2006

표면파를 이용하여 쇼트피닝된 Al 7075 합금의 잔류응력 분포를 평가하고자 하였다. 재료 내 표면층에 대한 잔류응력분포를 달리하기 위해서 피닝볼의 속도를 30m/s로 하여 쇼트피닝을 수행하였다. 표면파의 속도는 초음파현미경을 이용하여 V(z)곡선법으로 측정하였다. 쇼트피닝 후 비커스경도를 측정한 결과 쇼트피닝에 의한 소성변형으로 0.25mm 깊이까지 가공경화가 나타났다. 압축잔류응력이 증가하면서 표면파의 속도는 증가를 하였고 인장잔류응력이 작용할수록 표면파의 속도가 감소하였다. 표면파의 속도 변화는 X선 회절에 의해 측정한 잔류응력 변화와 밀접한 연관성을 나타내었다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 추계학술대회 논문집
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• pp.376-380
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• 2009

Surface acoustic wave (SAW) device is widely used as a bandpass filter, a chemical or physical sensor, and an actuator. In this paper, we propose the capacitive gap measurement system with high precision through the signal processing using SAW device. The research process is mainly composed of theoretical part and experimental part. In theoretical part, equivalent circuit model was used to simulate the SAW response by the change of capacitance. In experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance. After that, gap adjustment system was made physically and the SAW response by the change of gap which caused the capacitance change was measured. And resolution and stroke was decided comparing the signal change and basic measurement noise level.

• 비파괴검사학회지
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• 제33권1호
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• pp.54-62
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• 2013

본 연구는 비접촉 무전원 표면탄성파(surface acoustic wave, SAW) 온도센서를 개발하기 위하여 수행되었다. 단일전극 구조의 IDT(inter-digital transducer)와 434 MHz의 공진주파수를 가지는 SAW 소자를 $128^{\circ}$ rot-X $LiNbO_3$ 압전기판위에 반도체 공정으로 제작하였다. SAW 온도센서의 음향 반사판에 따른 반사 신호의 특성을 분석하기 위하여 다양한 형태의 음향 반사판을 제작하여 표면탄성파 신호의 반사특성을 분석한 결과 빗살형 전극형태의 반사판이 가장 양호한 반사특성을 나타내었다. SAW 온도센서를 구동하기 위한 신호를 송신하고 온도에 따른 SAW 센서의 출력신호를 수신하기 위하여 다이폴 안테나와 마이크로프로세서에 기반한 무선 송수신 시스템을 제작하였다. $40{\sim}80^{\circ}C$의 온도 범위에서 개발된 SAW 온도센서와 무선 송수신 시스템을 평가한 결과 온도증가에 따라 SAW 온도센서의 공진 주파수가 선형적으로 감소하였으며 결정계수가 0.99 이상으로 정확한 무선 온도측정이 가능한 것으로 나타났다.

• 한국정밀공학회지
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• 제25권11호
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• pp.30-36
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• 2008

• 한국항행학회논문지
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• 제27권4호
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• pp.469-472
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• 2023

If temperature management is required in factory or environmental monitoring, temperature can be measured by connecting various sensors wired or wirelessly. Surface acoustic wave sensors measure temperature using changes in acoustic waves on the sensor surface according to temperature, and are useful for wireless networks. In this paper, in order to build a wireless temperature measurement system in the 900 MHz frequency band, the temperature characteristics of the passive SAW sensor were measured, and the analysis and removal of multipath reflection wave effect inside the high temperature chamber were conducted. The resonant frequency of the SAW sensor was measured, and radio transmission/reception and multipath reflected wave removal techniques were proposed in the shielded chamber.

• 센서학회지
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• 제8권2호
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• pp.108-114
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• 1999

표면 탄성파 가스센서는 소자의 크기가 작고, 값이 싸며, 가스에 대한 감도가 매우 높고 소자의 신뢰도가 높은 장점을 갖고 있다. 본 연구에서는, $LiTaO_3$ 단결정 압전기판 위에 이중지연선을 갖는 표면 탄성파 $NO_2$ 가스센서를 설계 및 제작하였다. 제조된 IDT의 커패시턴스는 79.3MHz의 주파수에서 326.34pF였다. 임피던스 매칭이 된 IDT의 반사손실은 79.3MHz의 주파수에서 최대인 -16.74dB로 나타났다. SAW 발진기를 성하여 고주파증폭기의 이득을 적절히 조정함으로써 안정된 발진이 이루어짐을 확인하였다. SAW 발진기의 $NO_2$ 가스에 대한 발진주파수의 변이는 28Hz/ppm으로 나타났다.

• 비파괴검사학회지
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• 제29권6호
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• pp.534-549
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• 2009

As the thin film technology has emerged in various fields, adhesion of the film interface becomes an important issue in terms of the longevity and durability of thin film devices. Diverse nondestructive methods utilizing acoustic techniques have been developed to assess the interfacial integrity. As an effective technique based on the ultrasonic wave focusing and the surface acoustic wave(SAW) generation, scanning acoustic microscopy(SAM) has been investigated for adhesion evaluation. Visualization of film microstructures and quantification of adhesion weakness levels by SAW dispersion are the recent achievements of SAM. To overcome the limitations in the theoretical dispersion model only suitable for perfectly elastic and isotropic materials, a new model has been more recently developed in consideration of film anisotropy and viscoelasticity and applied to the adhesion evaluation of polymeric films fabricated on semiconductive wafers.