• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.247-247
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• 2012

Plasmon subwavelength nanostructures enable the structurally modulated color due to the resonance conditions for the specific wavelength range of light with the nanoscale hole arrays on a metal layer. While the unique properties offered from a single layer of metal may open up the potential applications of integrated devices to displays and sensors, fabrication requirements in nanoscale, typically on the order of or smaller than the wavelength of light in a corresponding medium can limit the cost-effective implementation of the plasmonic nanostructures. Simpler nanoscale replication technologies based on the soft lithography or roll-to-roll nanoimprinting can introduce economically feasible manufacturing process for these devices. Such replication requires an optimal design of a master template to produce a stamp that can be applied for a roll-to-roll nanoimprinting. In this paper, a master mold with subwavelength nanostructures is fabricated and optimized using focused ion beam for the applications to nanoimprinting process. Au thin film layer is deposited by sputtering on a glass that serves as a dielectric substrate. Focused ion beam milling (FIB, JEOL JIB-4601F) is used to fabricate surface plasmon subwavelength nanostructures made of periodic hole arrays. The light spectrum of the fabricated nanostructures is characterized by using UV-Vis-NIR spectrophotometer (Agilent, Cary 5000) and the surface morphology is measured by using atomic force microscope (AFM, Park System XE-100) and scanning electron microscope (SEM, JEOL JSM-7100F). Relationship between the parameters of the hole arrays and the corresponding spectral characteristics and their potential applications are also discussed.

• Korean Journal of Optics and Photonics
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• v.30 no.2
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• pp.67-73
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• 2019

In this paper, we investigated the sensing ability of an extraordinary optical transmission sensor, which is based on the diverse configurations of highly ordered structures. The diverse nanostructures of subwavelength hole array were designed to have different periods and lattice configurations of the array. To verify the sensing ability of the sensor, we measured the transmittance spectra of samples (n = 1.333, 1.363) for diverse configurations of substrates. The measured transmittance spectra of diverse materials with different refractive indices show that the sensitivity increased as the period of the structures increased. Also, improved sensing performance of the sensor was achieved for the square array, compared to the hexagonal array.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.137-138
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• 2008

• Journal of the Optical Society of Korea
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• v.9 no.4
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• pp.162-168
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• 2005

Extraordinary phenomena related to the transmission of light via metallic films with subwavelength holes and grooves are known to be due to resonant excitation and interference of surface waves. These waves make various surface structures to have optically effective responses. Further, a related study subject involves the control of light transmitted from a single hole or slit by surrounding it with diffractive structures. This paper reports on the effects of controlling light with a periodic groove structure with Fresnel-type chirping. In Fresnel-type chirping, diffracted surface waves are coherently converged into a focus, and it is designed considering the conditions of constructive interference and angular spectrum optimization under the assumption that the surface waves are composite diffracted evanescent waves with a well-defined in-plane wavenumber. The focusing ability of the chirped periodic structures is confirmed experimentally by two-beam attenuated total reflection coupling. Critical factors for achieving subwavelength foci and bounds on size of focal spots are discussed in terms of the simulation, which uses the FDTD algorithm.

• Journal of Sensor Science and Technology
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• v.27 no.5
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• pp.306-310
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• 2018

In order to develop a highly sensitive infrared sensor, it is necessary to develop techniques for decreasing the rate of heat absorption and the transition of the absorption wavelength to a longer wavelength, both of which can be induced by decreasing the pixel size of the bolometer. Therefore, in this study, $1{\mu}m$ hole-arrays with a subwavelength smaller than the incident infrared wavelength were formed on the amorphous silicon-based microbolometer pixels in the absorber, which consisted of a TiN absorption layer, an a-Si resistance layer and a SiNx membrane support layer. We demonstrated that it is possible to reduce the thermal time constant by 16% relative to the hole-patternless bolometer, and that it is possible to shift the absorption peak to a shorter wavelength as well as increase absorption in the $4-8{\mu}m$ band to compensate for the infrared long-wavelength transition. These results demonstrate the potential for a new approach to improve the performance of high-resolution microbolometers.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.334-334
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• 2013

In the past decade, the infrared detectors based on intersubband transition in quantum dots (QDs) have attracted much attention due to lower dark currents and increased lifetimes, which are in turn due a three-dimensional confinement and a reduction of scattering, respectively. In parallel, focal plane array development for infrared imaging has proceeded from the first to third generations (linear arrays, 2D arrays for staring systems, and large format with enhanced capabilities, respectively). For a step further towards the next generation of FPAs, it is envisioned that a two-dimensional metal hole array (2D-MHA) structures will improve the FPA structure by enhancing the coupling to photodetectors via local field engineering, and will enable wavelength filtering. In regard to the improved performance at certain wavelengths, it is worth pointing out the structural difference between previous 2D-MHA integrated front-illuminated single pixel devices and back-illuminated devices. Apart from the pixel linear dimension, it is a distinct difference that there is a metal cladding (composed of a number of metals for ohmic contact and the read-out integrated circuit hybridization) in the FPA between the heavily doped gallium arsenide used as the contact layer and the ROIC; on the contrary, the front-illuminated single pixel device consists of two heavily doped contact layers separated by the QD-absorber on a semi-infinite GaAs substrate. This paper is focused on analyzing the impact of a two dimensional metal hole array structure integrated to the back-illuminated quantum dots-in-a-well (DWELL) infrared photodetectors. The metal hole array consisting of subwavelength-circular holes penetrating gold layer (2DAu-CHA) provides the enhanced responsivity of DWELL infrared photodetector at certain wavelengths. The performance of 2D-Au-CHA is investigated by calculating the absorption of active layer in the DWELL structure using a finite integration technique. Simulation results show the enhanced electric fields (thereby increasing the absorption in the active layer) resulting from a surface plasmon, a guided mode, and Fabry-Perot resonances. Simulation method accomplished in this paper provides a generalized approach to optimize the design of any type of couplers integrated to infrared photodetectors.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.5
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• pp.31-37
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• 2020

In this paper, we propose a novel sub-wavelength unit cell metamaterial absorber using multi-layer structure. The proposed absorber consists of 4 layers, and each layer has a spiral resonator connected by a via hole. This structure increases inductance of the unit cell, and therefore the resonant frequency can shift to lower frequency. We optimized the proposed absorber, and the electrical size of the unit cell is dramatically reduced to 0.013 times of the wavelength. The performance of the proposed absorber is demonstrated with full-wave simulation and measurement results. An absorption rate exceeding 97% is achieved at 1.74GHz. In addition, the proposed absorber attains a high absorption rate of 90% for different polarization and incident angles.

• Korean Journal of Optics and Photonics
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• v.32 no.3
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• pp.126-132
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• 2021

In this research, we have investigated the sensitivity of an extraordinary optical transmission sensor depending on the angle of incident light. Three types of light, including a collimated beam and focused beams (4× and 10×), were designed for the sensor system. To compare the sensitivity of the sensor, we measured transmittance spectra using deionized water (n=1.333) and refractive-index-matching oils (n=1.360 and 1.380). Those spectra were analyzed in terms of redshifting of the peak, so that we could determine the sensitivity. The sensitivity tended to increase when the collimated beam is used on the system, and we have concluded that the sensitivity could be affected by the incidence angle on an extraordinary optical transmission sensor.