• Title/Summary/Keyword: Substrate system

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Al-doped ZnO 박막의 기판 온도에 따른 전기적, 광학적 특성 (The Effect of Different Substrate Temperature on the Electrical Properties of Al-doped ZnO Thin Films)

  • 김봉석;김응권;이규일;오수영;송준태
    • 전기학회논문지
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    • 제56권10호
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    • pp.1782-1785
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    • 2007
  • In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from $9.95{\times}10^{-2}\;{\Omega}-cm\;to\;1.1{\times}10^{-3}\;{\Omega}-cm$ as a result of high substrate temperature and the average transmittances in visible range were above 80%.

플라스틱 기판의 Outgassing이 TCO 박막의 전기적 특성에 미치는 영향 (Out Gassing from Plastic Substrates Affect on the Electrical Properties of TCO Films)

  • 김화민;지승훈
    • 한국전기전자재료학회논문지
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    • 제22권11호
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    • pp.961-968
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    • 2009
  • In this work, transparent conductive oxide(TCO) films such as $In_2O_3-SnO_2$(ITO) and $In_2O_3-ZnO$(IZO) were prepared on polyethylene naphthalene(PEN) and glass substrates by using rf-magnetron sputtering system. The TCO films deposited on PEN substrate show very poor conductivity as compared to that of the TCO films deposited on glass substrates. From the results of the residual gas analysis(RGA) test, this poor stability of plastic substrate is presumed to be caused by the deteriorated adhesion between the TCO films and the plastic substrate due to outgassing from the plastic substrate during deposition of TCO films. From our experiment, it is found that the vaporization of some defects in the plastic substrates deteriorate the adhesion of the TCO films to the plastic substrate, because the most plastic substrates containing the water vapor and/or other adsorbed particles such as organic solvents. Mixing of these gases vaporized in the sputtering process will also affect the electrical property of the deposited TCO films. Inorganic thin composite $(SiO_2)_{40}(ZnO)_{60}$ film as a gas barrier layer is coated on the PEN substrate to protecting the diffusion of vapors from the substrate, so that the TCO films with an improved quality can be obtained.

금속용사 시스템을 이용한 콘크리트 구조물의 마감공법 개발 (Development for Finishing Method of Concrete Structures Applying Metal Spraying System)

  • 이한승
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2001년도 가을 학술발표회 논문집
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    • pp.1225-1228
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    • 2001
  • The purpose of this study is to develop for finishing method of concrete structures applying metal spraying system. In the experiments, the pull out tests were conducted using the specimen which was applied by various surface treatment of concrete substrate. As a result, it was confirmed that the adhesion strength of metal spray was effected by surface condition of concrete and the construction of primer or the coarse surface agent to the concrete substrate is very effective to the new finishing method of concrete for the metal spraying system.

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유한요소해석을 이용한 알루미나 정전척의 글라스 기판 흡착 특성 연구 (A Study on Attractive Force Characteristics of Glass Substrate Using Alumina Electrostatic Chuck by Finite Element Analysis)

  • 이재영;장경민;민동균;강재규;성기현;김혜동
    • 반도체디스플레이기술학회지
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    • 제19권4호
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    • pp.46-50
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    • 2020
  • In this research, the attractive force of Coulomb type electrostatic chuck(ESC), which consisted of alumina dielectric, on glass substrate was studied by using the finite element analysis. The attractive force is caused by the high electrical resistance which occurs in contact region between glass substrate and dielectric layer. This research tries the simple geometrical modeling of ESC and glass substrate with air gap. The influences of the applied voltage, and air gap are investigated. When alumina dielectric with 1014 Ω·cm, 1.5 kV voltage, and 0.01 mm air gap were applied, electrostatic force in this work reached to 4 gf/㎠. This results show that the modeling of air gap is essential to derive the attractive force of the ESC.

Characterization of GaN on GaN LED by HVPE method

  • Jung, Se-Gyo;Jeon, Hunsoo;Lee, Gang Seok;Bae, Seon Min;Kim, Kyoung Hwa;Yi, Sam Nyung;Yang, Min;Ahn, Hyung Soo;Yu, Young Moon;Kim, Suck-Whan;Cheon, Seong Hak;Ha, Hong Ju;Sawaki, Nobuhiko
    • Journal of Ceramic Processing Research
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    • 제13권spc1호
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    • pp.128-131
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    • 2012
  • The selective area growth light emitting diode on GaN substrate was grown using mixed-source HVPE method with multi-sliding boat system. The GaN substrate was grown using mixed-source HVPE system. Te-doped AlGaN/AlGaN/Mg-doped AlGaN/Mg-doped GaN multi-layers were grown on the GaN substrate. The appearance of epi-layers and the thickness of the DH was evaluated by SEM measurement. The DH metallization was performed by e-beam evaporator. n-type metal and p-type metal were evaporated Ti/Al and Ni/Au, respectively. At the I-V measurement, the turn-on voltage is 3 V and the differential resistance is 13 Ω. It was found that the SAG-LED grown on GaN substrate using mixed-source HVPE method with multi-sliding boat system could be applied for developing high quality LEDs.

Fungal Metabolism of Environmentally Persistent Compounds: Substrate Recognition and Metabolic Response

  • Wariishi, Hiroyuki
    • Biotechnology and Bioprocess Engineering:BBE
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    • 제5권6호
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    • pp.422-430
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    • 2000
  • Mechanism of lignin biodegradation caused by basidiomycetes and the history of lignin biodegradation studies were briefly reviewed. The important roles of fungal extracellular ligninolytic enzymes such as lignin and manganese peroxidases (LiP and MnP) were also summarized. These enzymes were unique in their catalytic mechanisms and substrate specificities. Either LiP or MnP system is capable of oxidizing a variety of aromatic substrates via a one-electron oxidation. Extracellular fungal system for aromatic degradation is non-specific, which recently attracts many people working a bioremediation field. On the other hand, an intracellular degradation system for aromatic compounds is rather specific in the fungal cell. Structurally similar compounds were prepared and metabolized, indicating that an intracellular degradation strategy consisted of the cellular systems for substrate recognition and metabolic response. It was assumed that lignin-degrading fungi might be needed to develop multiple metabolic pathways for a variety of aromatic compounds caused by the action of non-specific ligninolytic enzymes on lignin. Our recent results on chemical stress responsible factors analyzed using mRNA differential display techniques were also mentioned.

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Pre Calendering Effect after Primary Coating in Double Coating System(1)

  • 김병수
    • 한국펄프종이공학회:학술대회논문집
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    • 한국펄프종이공학회 2006년도 춘계학술발표논문집
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    • pp.124-131
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    • 2006
  • It is well known that smoother surface in substrate for coating or converting can obtain better results. Generally paper substrate is taking machine calendar process in papermaking system to give more uniformity and to get better coating runnability. This paper was prepared to find better idea for obtaining smoother surface after precalendering precoated paper as a substrate of double coating system. It was shown precalendering had effect on roughness improvement for precoating layer but was difficult to say it was effected to supercalendering results for double coating. The porosity and ink evaluation with precalendered double coated paper is needed to identify more essential clue for precalendering effect.

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A Case-based Decision Support Model for The Semiconductor Packaging Tasks

  • Shin, Kyung-shik;Yang, Yoon-ok;Kang, Hyeon-seok
    • 한국지능정보시스템학회:학술대회논문집
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    • 한국지능정보시스템학회 2001년도 The Pacific Aisan Confrence On Intelligent Systems 2001
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    • pp.224-229
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    • 2001
  • When a semiconductor package is assembled, various materials such as die attach adhesive, lead frame, EMC (Epoxy Molding Compound), and gold wire are used. For better preconditioning performance, the combination between the packaging materials by studying the compatibility of their properties as well as superior packaging material selection is important. But it is not an easy task to find proper packaging material sets, since a variety of factors like package design, substrate design, substrate size, substrate treatment, die size, die thickness, die passivation, and customer requirements should be considered. This research applies case-based reasoning(CBR) technique to solve this problem, utilizing prior cases that have been experienced. Our particular interests lie in building decision support model to aid the selection of proper die attach adhesive. The preliminary results show that this approach is promising.

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Nonlinear Adaptive Control of Fermentation Process in Stirred Tank Bioreactor

  • Kim, Hak-Kyeong;Nguyen, Tan-Tien;Nam soo Jeong;Kim, Sang-Bong
    • Transactions on Control, Automation and Systems Engineering
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    • 제4권4호
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    • pp.277-282
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    • 2002
  • This paper proposes a nonlinear adaptive controller based on back-stepping method for tracking reference substrate concentration by manipulating dilution rate in a continuous baker's yeast cultivating process in stirred tank bioreactor. Control law is obtained from Lyapunov control function to ensure asymptotical stability of the system. The Haldane model for the specific growth rate depending on only substrate concentration is used in this paper. Due to the uncertainty of specific growth rate, it has been modified as a function including the unknown parameter with known bounded values. The substrate concentration in the bioreactor and feed line are measured. The deviation from the reference is observed when the external disturbance such as the change of the feed is introduced to the system. The effectiveness of the proposed controller is shown through simulation results in continuous system.