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The Effect of Different Substrate Temperature on the Electrical Properties of Al-doped ZnO Thin Films  

Kim, Bong-Seok (성균관대학 전자전기공학과)
Kim, Eung-Kwon (성균관대학 전자전기공학과)
Lee, Kyu-Il (성균관대학 전자전기공학과)
Oh, Su-Young (성균관대학 전자전기공학과)
Song, Joon-Tae (성균관대학 전자전기공학과)
Publication Information
The Transactions of The Korean Institute of Electrical Engineers / v.56, no.10, 2007 , pp. 1782-1785 More about this Journal
Abstract
In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from $9.95{\times}10^{-2}\;{\Omega}-cm\;to\;1.1{\times}10^{-3}\;{\Omega}-cm$ as a result of high substrate temperature and the average transmittances in visible range were above 80%.
Keywords
Al-doped ZnO; Substrate Temperature; TCO;
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Times Cited By KSCI : 1  (Citation Analysis)
Times Cited By SCOPUS : 0
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