The Effect of Different Substrate Temperature on the Electrical Properties of Al-doped ZnO Thin Films
![]() ![]() |
Kim, Bong-Seok
(성균관대학 전자전기공학과)
Kim, Eung-Kwon (성균관대학 전자전기공학과) Lee, Kyu-Il (성균관대학 전자전기공학과) Oh, Su-Young (성균관대학 전자전기공학과) Song, Joon-Tae (성균관대학 전자전기공학과) |
1 | P. Nunes, E. Fortunato, P. TonelIo, F. Braz Fernandes, P. Vilarinho, R. Martins, 'Effect of different dopant elements on the properties of ZnO thin films', Vacuum 64, 281-285, 2002 DOI ScienceOn |
2 | W. Li, Y. Sun. Y. Wang, H. Cai, F. Liu, Q. He, 'Effects of substrate temperature on the properties of facing-target sputtered AI-doped ZnO films', Solar Energy Materials & Solar Cells, V.91, 659-663, 2007 DOI ScienceOn |
3 | J. B. Lee, H. J. Lee, S. H Seo, J. S. Park, 'Deposition of ZnO thin films by RF magnetron sputtering and Cu-doping effects', KIEE, v. 49 no.12, 654-664, 2000 과학기술학회마을 |
4 | I. W. Kim, S. J. Doh, C. C. Kim, H. J. Jung, J. Tashiro, M. Yoshimoto, 'Effect of evaporation on surface morphology of epitaxial ZnO films during postdeposition annealing', Applied Surface Science, 241, 179- 182, 2005 DOI ScienceOn |
5 | H.T. Cao, Z.L. Pei, J. Gong, C. Sun, R.F. Huang, L.S. Wen, 'Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering', Surface and Coatings Technology 184, 84-92, 2004 DOI ScienceOn |
6 | X. Z. Qiang, D. Hong, L. Yan, C. Hang, 'AI-doped effects on structure, electrical and optical properties of c -axis-oriented ZnO:AI thin films', Materials Science in Semiconductor Processing, v.9 no.1, 132-135, 2006 DOI ScienceOn |
7 | J. Mass, P. Bhattacharya, R.S. Katiyar, 'Effect of high substrate temperature on AI-doped ZnO thin films grown by pulsed laser deposition', Materials Science and Engineering B103, 9-15, 2003 |
![]() |