• 전자공학회논문지 IE
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• v.44 no.2
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• pp.26-31
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• 2007

A surface treatment was performed after the screen printing of a carbon nanotube paste for obtaining the carbon nanotube field emission array(CNT FEA) on the soda-lime glass substrate. In this experiment, Ar ion bombardment was applied as an effective surface treatment method. After making a cathode electrode on the glass substrate, photo sensitive CNT paste was screen-printed, and then back-side was exposure by uv light. Then, the exposed CNT paste was selectively remained by development. After post-baking, the remained CNT paste was bombarded by accelerated Ar ions for removing some binders and exposing only CNTs. As results, the field emission characteristics were strongly depended on the accelerating energy. At 100 eV, the emission was highest and as the acceleration energy increases more then 100 eV, the emission decreased. This was due to the removal of CNT itself as well as binders.

• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.5-10
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• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.88.1-88.1
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• 2012

Silicon nanowires (SiNWs), due to their unusual quantum-confinement effects that lead to superior electrical and optical properties compared to those of the bulk silicon, have been widely researched as a potential building block in a variety of novel electronic devices. The conventional means for the synthesis of SiNWs has been the vapor-liquid-solid method using chemical vapor deposition; however, this method is time consuming, environmentally unfriendly, and do not support vertical growth. As an alternate, the electroless etching method has been proposed, which uses metal catalysts contained in aqueous hydrofluoric acids (HF) for vertically etching the bulk silicon substrate. This new method can support large-area growth in a short time, and vertically aligned SiNWs with high aspect ratio can be readily synthesized with excellent reproducibility. Nonetheless, there still are rooms for improvement such as the poor surface characteristics that lead to degradation in electrical performance, and non-uniformity of the diameter and shapes of the synthesized SiNWs. Here, we report a facile method of SiNWs synthesis having uniform sizes, diameters, and shapes, which may be other than just cylindrical shapes using a modified nanosphere lithography technique. The diameters of the polystyrene nanospheres can be adjustable through varying the time of O2 plasma treatment, which serve as a mask template for metal deposition on a silicon substrate. After the removal of the nanospheres, SiNWs having the exact same shape as the mask are synthesized using wet etching technique in a solution of HF, hydrogen peroxide, and deionized water. Different electrical and optical characteristics were obtained according to the shapes and sizes of the SiNWs, which implies that they can serve specific purposes according to their types.

• Journal of the Korea Organic Resources Recycling Association
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• v.12 no.1
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• pp.75-83
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• 2004

Temperature-phased anaerobic digestion (TPAD), anaerobic sequencing batch reactor (ASBR), and co-digestion technologies were combined together in order to overcome low efficiencies of conventional anaerobic sewage sludge digestion processes. In the performance, TPAD-ASBR process showed high VS removal efficiency over 60% up to the organic loading rate (OLR) of 2.7 g VS/L/d. The first-stage of TPAD-ASBR and control system played a most significant role in VS destruction and methane production. Methane production rate (0.79 l $CH_4/L/d$) of the system was higher than that (0.59 l $CH_4/L/d$) of the control system. The substrate characteristics of the sewage sludge, such as low VS concentration (1.5%, w/w) and biodegradability, were properly improved by the addition of food waste as a co-substrate, leading to more efficient VS removal and methane production. With several track studies, it was revealed that the independent solid retention time (SRT) of those systems prevented untreated particles from outflowing and also, extended the retention time of the active biomass for further degradation. Consequently, it was confirmed that the sequencing batch operation of the TPAD process using co-substrate was a promising alternative for the recycling of sewage sludge with low VS content.

• Tribology and Lubricants
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• v.30 no.3
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• pp.139-145
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• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• Journal of Environmental Science International
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• v.2 no.2
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• pp.145-152
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• 1993

An experimental research was conducted in order to study the treatability of leachate and a combined wastewater of municipal landfill leachate and municipal sewage. The landfill leachate was that of Nanjido landfill site, and the municipal sewage was obtained from Chungnang municipal sewage treatment plant of Seoul. Several sets of bench-scale sequencing batch reactor(SBR) were used as experimental apparatus. Specially investigated items in this experiment were the removal efficiency of substrate and the influence of the hydraulic retention time(HRT). The experiment lasted for about 8 months. The result are as follows ; 1) The characteristics of leachate were pH 7.4~8.1, BOD 280~450 mg/l, COD 1300 ~ 1350 mg/l, T-N 2021 ~2110 mg/1,7-P 2.7 ~3.2 mg/l, Cl-3540 ~4085 mg/l, and heavy metals are a very small amount. And the characteristics of sewage Ivere pH 6.9~7.3, BOD 78.4~129.3 mg/1, COD 121.2~305.0 mg/l, T-N 14.9~36.4 mg/l, T-P 1.3 ~5.9 mg/l. 2) The treatability of leachate alone was not treat well. So for the good treatment of leachate, it was necessary to deal with the pretreatment before biological treatment and a combined treatment of municipal serfage. 3) The various contents of the leachate were 5%, 10%, and 50% and the removal efficiency of COD was 86.0%, 82.8%, 60.6%, and 31.7%. The maximum content of the leachate which could be sucessfully treated by SBR in the combined treatment was 10% of that of sewage.

• KSBB Journal
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• v.7 no.3
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• pp.235-245
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• 1992

A number of experiments to treat wastewater of a dye plant were conducted to investigate the basic design parameters and effluent characteristics for aerobic fixed biofilm reactor upon the variation of organic loading rate. The media used for this study were SARAN 4000 D with specific surface area $153m^2/m^3$, and 1000 D with specific surface area $307m^2/m^3$. The influent COD concentration ranged from 1250 to 4080 mg/L. Substrate removal and variation of biomass concentration were observed. At the beginning, the effluent quality was poor but improved as the time passed. However the effluent quality became seriously deteriorated when the media clogged. At influent COD of 1250mg/L, the effluent COD varied little, even if the organic loading rate increased from 0.63 to 2.5kg COD/$m^3$/day. It was also noted that the design parameters for activated sludge process could be applied to an aerobic fixed biofilm process under the experimental conditions.

• Journal of Periodontal and Implant Science
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• v.29 no.1
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• pp.209-231
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• 1999

Even though titanium(Ti) and its alloys are the most used dental implant materials, there are some problems that Ti wears easily and interferes normal osteogenesis due to the metal ions. Ti coated with bioactive ceramics such as hydroxyapatite has also such problems as the exfoliation or resorption of the coated layer, Recent studies on implant materials have been proceeding to improve physical properties of the implant substrate and biocompatibility of the implant surfaces. The purpose of the present study was to examine the physical property and bone tissue compatibility of bioinert nitrides ion plated Ti, Button type specimens(14mm in diameter, 2.32rrun in height) for the abrasion test and cytotoxicity test and thread type implants(3.75mm in diameter, 6mm in length) for the animal experiments were made from Ti(grade 2) and 316LVM stainless steel. Ti specimens were ion plated with TiN, ZrN by the low temperature arc vapor deposition, and the depth profile of the TiN/Ti, ZrN/Ti ion plated surface was examined by Auger Electron Spectroscopy. Three kind of button type specimens .of TiN/Ti, ZrN/Ti and Ti were used for abrasion test, and HEPAlClC7 cells and CCD cells were cultivated for 4 days with the specimens for cytotoxicity test. Thread type implants of TiN/Ti, ZrN/Ti, Ti, 316LVM were implanted on the femur of 6 adult dogs weighing 10kg-13kg. Two dogs were sacrified for histological examination after 45 days and 90 days, and four dogs were sacrified for the removal torque test of the implant') after 90 days. The removal torque force was measured by Autograph (Shimadzu Co., AGS-1000D series, Japan). Abrasion resistance of TiN/Ti was the highest, and that of ZrN/Ti and Ti were followed. The bioinert nitride ion plated Ti had much better abrasion resistance, compared with Ti, In the cytotoxicity test, the number of both cells were increased in all specimens, and there were no significant difference in cytotoxic reaction among all groups (p>0.1), In histological examination, 316LVM showed the soft tissue engagement in interface between the implant and bone, but the other materials after 45 days noted immature new bone formation in the medullary portion along the implant surface, and those after 90 days showed implant support by new bone formation in both the cortical and the medullary portion, The removal torque force of Tilv/Ti showed significantly higher than that of Ti(p(O,05). The difference in removal torque force between TiN/Ti and ZrN/Ti was not significant(p>0.05), and that of 316LVM was lowest among all groups(p<0.05). These results suggest that bioinert nitrides ion plated Ti can resolve the existing problems of Ti and bioactive ceramics, and it may be clinically applicable to human.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.7 no.3
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• pp.23-31
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• 1987

In land treatment systems for organic waste removal, especially rapid intiltration method is well known as less climatic restrictions and less field area requirements as against the others. Therefore the present study on rapid infiltration is aimed to survey the waste removal rate, infiltration rate, variation of dissolved oxygen due to biological oxygen absorption and pH decrement using pilot infiltration column filled with permeable soil(sand) as media, also to find the waste load(COD) per unit area and nitrate conversion ratio from TKN. The results obtained here are as follows. 1) When the depth of sand layer is more than 1 meter, the COD removal would be reached steadly to 90% or more under the infiltration rate below 15~20cm/day, and would be no problem due to leached organic pollutants considering the depth of ground water table. 2) The COD removal per unit area($m^2$) can readily be expected to 10~14g/day with proper operation, and the decomposition of substrate would be attained mostly at the surface layer of the media. 3) Generally the conversion of TKN to the $NO_3{^-}$-N is seemed to be proportional to the COD removal rate if provided proper retention time.

• Journal of Life Science
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• v.30 no.2
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• pp.129-136
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• 2020

For effective treatment of wastewater containing ammonium nitrogen (NH₄-N), AT2, AT9, and AT12 strains, having high total organic carbon (TOC) removal capability, and FN47, possessing excellent ammonia nitrogen removal capability present in the activated sludge in the aeration tank of food wastewater treatment plants, were isolated and identified. The cells of these isolated strains were used for microbial augmentation with FIW-1 in the defatted rice bran as a medium to treat industrial wastewater. The investigation of the cultural characteristics of these isolated strains in the aeration tank showed that the affinities for substrate of the isolated strains were extremely high, of which AT12 (Alcaligenes sp. AT12) was the highest among the isolated strains. Ammonium nitrogen removal efficiency in the food wastewater was 71% in the isolated strain FN47 (Microbacterium sp. FN47) treatment group. When only activated sludge was added in the lab scale pilot using food wastewater during continuous culture experiment, the TOC removal efficiency was 63%. Meanwhile, the removal efficiency of 92% was obtained when the microbial augmentation FIW-1 for wastewater treatment was applied. In addition, the chemical oxygen demand (COD) level from the effluent wherein microbial augmentation FIW-1 was input for the initial three days in the wastewater treatment site experiment showed a treatment rate of about 43%, which was increased to 62% after an elapse of 5 days.