전자공학회논문지 IE

The Institute of Electronics and Information Engineers (대한전자공학회)
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Field Emission Characteristics of Surface-treated CNT Emitter by Ar Ion Bombardment

아르곤 이온에 의해 표면처리된 CNT 에미터의 전계방출 특성

  • Published : 2007.06.25
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Abstract

A surface treatment was performed after the screen printing of a carbon nanotube paste for obtaining the carbon nanotube field emission array(CNT FEA) on the soda-lime glass substrate. In this experiment, Ar ion bombardment was applied as an effective surface treatment method. After making a cathode electrode on the glass substrate, photo sensitive CNT paste was screen-printed, and then back-side was exposure by uv light. Then, the exposed CNT paste was selectively remained by development. After post-baking, the remained CNT paste was bombarded by accelerated Ar ions for removing some binders and exposing only CNTs. As results, the field emission characteristics were strongly depended on the accelerating energy. At 100 eV, the emission was highest and as the acceleration energy increases more then 100 eV, the emission decreased. This was due to the removal of CNT itself as well as binders.

카본나노튜브 전계 방출 어레이(carbon nanotube field emission array, CNT FEA)를 유리기판 상에 형성시키기 위하여 CNT 페이스트를 스크린 프린팅 후 표면처리를 수행하였다. 본 실험에서는 효과적인 표면처리 방법으로서 이온 빔을 조사(expose)시키는 방법을 연구하였다. 먼저, 유리 기판상에 감광성 CNT 페이스트를 스크린 프린팅하고 UV 후면노광 및 현상공정에 의해 선택적으로 CNT 페이스트를 남겼다. 다시 고온에서 소성후 CNT들은 바인더 성분들에 의해 문히게 된다. 본 실험에서는 소성된 CNT 페이스트의 표면상에 Ar 이온빔을 가속시켜 페이스트의 바인더(binder)를 선택적으로 제거함으로써 전계방출 특성을 향상시킬 수 있었다. 표면처리를 위한 이온 빔 가속시 이온빔의 가속에너지에 따라 특성이 크게 변화되었는데, 본 연구에서는 100 V의 낮은 가속 전압에서 가장 높은 전계방출 특성을 나타내었으며 가속 전압이 너무 높으면 바인더 성분 외에도 CNT 자체가 제거됨으로써 오히려 특정이 저하됨을 알 수 있었다.

Keywords

References

  1. M. Okuda, S. Matsutani, A. Asai, A. Yamano, K. Hatanako, T. Hara, and T. Nakariri, 'Electron trajectory analysis of surface conduction electron emitter displays (SEDs)', SID 98 Digest, pp. 185-188, 1998
  2. T. Kusunoki, M. Suzuki, S. Sasaki, T. Yaguchi, and T. Aida, 'Fluctuation-Free Electron Emission from Non-Formed Metal-Insulator-Metal (MIM) Cathodes Fabricated by Low Current Anodic Oxidation', Jpn. J. Appl. Phys., Vol. 32, no. 11B, pp. L1695-L1697, November 1993 https://doi.org/10.1143/JJAP.32.L1695
  3. T. Komoda, T. Ichihara, Y. Honda, T. Hatai, T. Baba, Y. Takegawa, Y. Watabe, and K. Aizawa, 'Demonstration of a possibility for a large panel BSD by fabricating 7.6 inches diagonal prototype model', SID 03 Digest, pp. 910-913, 2003
  4. T. Ichihara, T. Komoda, Y. Honda, Y. Watabe, T. Hatai, T. Baba, K. Aizawa, and N. Koshida, 'Improved characteristics of ballistic electron surface-emitting display device (BASD) fabricated on a quartz substrate', Asia Display IDW'01, pp. 1193-1196, 2001
  5. D. Noda, K. Hagiwara, T. Yamamoto, and S. Okamoto, 'Electron Emission Properties of ZnS-Based Thin-Film Cold Cathode for Field Emission Display', Jpn. J. App. Phys., Vol. 44, no. 6A, pp. 4108-4111, June 2005 https://doi.org/10.1143/JJAP.44.4108
  6. K. Mylvaganam, and L. C. Zhang, 'Important issues in a molecular dynamics simulation for characterising the mechnical properties of carbon nanotubes', Carbon 42, pp. 2025-2032, May 2004 https://doi.org/10.1016/j.carbon.2004.04.004
  7. R. Larciprete, A. Goldoni, and S. Lizzit, 'Interaction of molecular oxygen with single wall nanotubes: Role of surfactant contamination', Nuclear Instrument and Methods in Physics Research B 200, pp. 5-10, 2003 https://doi.org/10.1016/S0168-583X(02)01668-3
  8. J. H. Moon, S. H. Lim, K. C. Park and J. Jang, 'Low Temperature Growth of Carbon Nanotubes for Triode-Type Field-Emitter Array by Chemical Vapor Deposition', J. Korean Phys. Soc., Vol. 45, no. 5, pp. 1165-1168, November 2004
  9. Y. H. Kim, C. J. Park, and K. J. Chang, 'Subbands in carbon nanotubes under radial deformation', J. Korean Phys. Soc., Vol. 37, no. 2, pp. 85-88, August 2000
  10. H. S. Uh, 'Low turn-on voltage field emission triodes with selectively grown carbon nanotube emitters', J. Korean Phys. Soc., Vol. 45, no. 5, pp. 1343-1346, Nov. 2004
  11. B. Y. Kong, J. Y. Seon, S. H. Lee, S. J. Jung, and N. S. Lee, 'Density Control of Highly Populated Carbon Nanotubes Grown by Thermal Chemical Vapor Deposition to Improve Their Field Emission Characteristics', J. Korean Phys. Soc., Vol. 45, no. 6, pp. 1580-1583, December 2004
  12. H. Mizukami, M. Ojima, S. Hiwatashi, H. Araki, A. Fujiti, M. Ozaki, and K. Yoshino, 'Fabrication and Field Emission Properties of C60 nanorod Formed by Spin-Cast Treatment', Jpn. J. Appl. Phys., Vol. 44, no. 26, p. L851-L853, June 2005 https://doi.org/10.1143/JJAP.44.L851
  13. K. C. Park, S. H. Lim, J. H. Moon, H. S. Yoon, and J. Jang, 'Bias Polarity Effect on the Growth fo CNTs by a Triode DC-PECVD', J. Korean Phys. Soc., Vol. 45, pp. s833-s835, December 2004
  14. Y. C. Kim, K. H. Shon, Y. M. Cho, and E. H. Yoo, 'Posttreatment-Dependent Current Degradation and Role of Tube Length on Morphology of Printed Carbon Nanotube Field Emitters', Jpn. J. Appl. Phys., Vol. 44, no. 26, pp. L848-L850, June 2005 https://doi.org/10.1143/JJAP.44.L848