• Journal of the Korean Vacuum Society
• /
• v.6 no.4
• /
• pp.326-336
• /
• 1997

From the concept that the ion implantation-induced defect is one of the major factors in determining source/drain junction characteristics, high quality ultra-shallow $p^+$-n junctions were formed through the control of ion implantation-induced defects in silicon substrate. In conventional process of the junction formation. $p^+$ source/drain junctions have been formed by $^{49}BF_2^+$ ion implantation followed by the deposition of TEOS(Tetra-Ethyl-Ortho-Silicate) and BPSG(Boro-Phospho-Silicate-Glass) films and subsequent furnace annealing for BPSG reflow. Instead of the conventional process, we proposed a series of new processes for shallow junction formation, which includes the additional low temperature RTA prior to furnace annealing, $^{49}BF_2^+/^{11}B^+$ mixed ion implantation, and the screen oxide removal after ion implantation and subsequent deposition of MTO (Medium Temperature CVD oxide) as an interlayer dielectric. These processes were suggested to enhance the removal of ion implantation-induced defects, resulting in forming high quality shallow junctions.

• Journal of Korean Society of Water and Wastewater
• /
• v.14 no.2
• /
• pp.196-206
• /
• 2000

Methanogenesis and denitrification in an upflow sludge baffled filter (UBF) reactor were studied using glucose as a fermentative substrate. Experiments were carried out to investigate how to reduce ammonification by changing alkalinity and $COD/NO_3-N$ ratio. Characteristics of granular sludges were examined by specifics methanogenic activity(SMA) and specific denitrification rate(SDR) tests. Microstructures of granules were examined using a scanning electron microscopy(SEM). It was found that COD was removed efficiently owing to the diverse microorganisms. In nitrate conversion, not only $COD/NO_3-N$ ratio but also influent alkalinity played important role in the ratio of denitrification and ammonification of nitrate. This reactor achieved over 95% COD and 99% nitrate removal efficiencies when influent contained 4000 mgCOD/L and $700mgNO_3-N/L$ at the hydraulic retention time of 24 hours. As $COD/NO_3-N$ ratio decreased, granular methanogenic activities using acetate and butyrate as substrates increased while activities using propionate and glucose decreased. There were three types in granules according to the surface color; gray, yellowish gray, and black. Gray or yellowish gray-colored granules were composed two layers, which were composed of black inner side and gray or yellowish gray surface substances. SEM illustrated that both were rod-type and cocci-type microorganisms resembling Methanothrix sp. and Methanococci sp. This study showed that by controlling the influent alkalinity and $COD/NO_3-N$ ratio, ammonification and denitrification could be manipulated.

• Journal of Environmental Science International
• /
• v.4 no.3
• /
• pp.269-276
• /
• 1995

An experimental research was conducted in order to study the treatability of municipal landfill leachate using a combined physio-chemical and biological treatment. The leachate was obtained from Nanjido landfill site in Seoul. Several sets of bench-scale sequencing batch reactor(SBR) and physic-chemical reactors were used as experimental apparatus. This experiment lasted for about 2 years. The results are as follows: 1. The characteristics of Nanjido landfill leachate were pH 7.4~8.2, BOD 79~450mg/L, COD 998~1460mg/L, $NH_3-N$ 1380~3412mg/L, 7-P 2.6~7.0mg/L, color 890~1992 unit, and heavy metals are a very small amount. 2. Either physio-chemical or biological treatment of Landfill leachate alone did not work well. So for the adequate treatment of leachate, it was necessary to deal with the physio-chemical pretreatment before biological treatment. And it was found that both electrolysis and ozone treatment are better pretreatments of leachate than others. 3. In this study, landfill leachate was effectively processed by two step : first by electrolysis pretreatment, and secondly by SBR treatment. Thus, the study showed considerable substrate removal of raw leachate, even though the rate of COD removal depended on HRT.

• Journal of Environmental Science International
• /
• v.4 no.3
• /
• pp.117-117
• /
• 1995

An experimental research was conducted in order to study the treatability of municipal landfill leachate using a combined physio-chemical and biological treatment. The leachate was obtained from Nanjido landfill site in Seoul. Several sets of bench-scale sequencing batch reactor(SBR) and physic-chemical reactors were used as experimental apparatus. This experiment lasted for about 2 years. The results are as follows: 1. The characteristics of Nanjido landfill leachate were pH 7.4~8.2, BOD 79~450mg/L, COD 998~1460mg/L, $NH_3-N$ 1380~3412mg/L, 7-P 2.6~7.0mg/L, color 890~1992 unit, and heavy metals are a very small amount. 2. Either physio-chemical or biological treatment of Landfill leachate alone did not work well. So for the adequate treatment of leachate, it was necessary to deal with the physio-chemical pretreatment before biological treatment. And it was found that both electrolysis and ozone treatment are better pretreatments of leachate than others. 3. In this study, landfill leachate was effectively processed by two step : first by electrolysis pretreatment, and secondly by SBR treatment. Thus, the study showed considerable substrate removal of raw leachate, even though the rate of COD removal depended on HRT.

• Journal of the Microelectronics and Packaging Society
• /
• v.20 no.4
• /
• pp.53-58
• /
• 2013

An innovative packaging solution, Flip Chip with Copper (Cu) Column bond on lead (BOL) Enhanced Process (fcCuBE$^{(R)}$) delivers a cost effective, high performance packaging solution over typical bond on capture pad (BOC) technology. These advantages include improved routing efficiency on the substrate top layer thus allowing conversion functionality; furthermore, package cost is lowered by means of reduced substrate layer count and removal of solder on pad (SOP). On the other hand, as electronic packaging technology develops to meet the miniaturization trend from consumer demand, reliability testing will become an important issue in advanced technology area. In particular, electromigration (EM) of flip chip bumps is an increasing reliability concern in the manufacturing of integrated circuit (IC) components and electronic systems. This paper presents the results on EM characteristics on BOL and BOC structures under electrical current stressing in order to investigate the comparison between two different typed structures. EM data was collected for over 7000 hours under accelerated conditions (temperatures: $125^{\circ}C$, $135^{\circ}C$, and $150^{\circ}C$ and stress current: 300 mA, 400 mA, and 500 mA). All samples have been tested without any failures, however, we attempted to find morphologies induced by EM effects through cross-sectional analysis and investigated the interfacial reaction characteristics between BOL and BOC structures under current stressing. EM damage was observed at the solder joint of BOC structure but the BOL structure did not show any damage from the effects of EM. The EM data indicates that the fcCuBE$^{(R)}$ BOL Cu column bump provides a significantly better EM reliability.

• KSBB Journal
• /
• v.16 no.5
• /
• pp.466-473
• /
• 2001

A bacterium was isolated from soils in Suwon, Korea for the purpose of H$_2$S removal using a biofilter system. The isolate was gram-negative, rod-shaped, catalase-positive, motile, and the isolated bacterium showed a positve in utilizing energy sources including citrate, mannitol, sucrose, fructors, and trehalsoe. Based on its biochemical characteristics it was identified as Burkholderia(Pseudomonas) cepacia. The growth rate of the bacterium in thiosulfate medium with yeast extract was 0.15 hr$\^$-1/ and generation time was 4.6 hr. The cell productivity was 8.05 mg/L$.$h and the isolate grew logarithmically up to 12 hr. The maximum rate of sulfur oxidation was 0.18 g-S/L$.$h. The optimum pH and temperature for the growth of the bacterium were 7.0 and 30$\^{C}$, respectively. The pH range for the growth of B. cepacia was 5.0-8.0. The oxidation rate of thiosulfate was lowered by a substrate thiosulfate when the concentration was higher than 0.12 M. both growth rate and sulfur oxidation rate of Burkholderia(Pseudomonas) cepacia was enhanced about 1.5 times with the addition of 0.2% yeast extract. The removal of hydrogen sulfide was investigated by immobilized B. cepacia with Ca-alginate. The maximum rate removal for H$_2$S was 6.25 g$.$㎤ $.$h$\^$-1/ when 12 L/h of flow rate was supplied. From this study suggest the immobilized B. cepacia could have a potential for H$_2$S removal.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.10 no.3
• /
• pp.127-136
• /
• 1990

In this paper, the experimental study was carried out for the removal of olive oil in wastewater by the use of Biological Fluidized Bed(BFB) with the reticulated polypropylene sheets as media. The nonbiodegradable olive oil, one of the animal and vegitable oil, was used bacause of the relative simplicity of constitution. Biological degraciability and removal characteristics of emulsified olive oil were studied by batch and continuous experiments respectively. From the results of batch experiments, it was observed that the emulsified olive oli used in BFB reactor was absorbed by media and sludge in about 12 hours, and degradation of the absorbed olive oli was mostly completed for 24 hours. The functional relationship of Michaelis-Menten's Enzyme reaction equation exists between oil concentration and maximum specific rate of olive oil. From the continuous experiments for the removal of olive oil using BFB reactor, it was proved that the substrate removal rate coefficient $k=0.004d^{-1}$, which is the first order kinetics. It was apperared that oxygen utlization coefficients for synthesis(a') and endogeneous respiration(b') of microorganisms in the reactor are respectively 0.85mg $O_2/mg$ $COD_{cr}$ and 0.011mg $O_2/mg$ BVS. day.

• Journal of the Korea Organic Resources Recycling Association
• /
• v.31 no.4
• /
• pp.41-49
• /
• 2023

This study examined the effect of input substrate concentration on hydrogen production of microbial electrolysis cells. To compare the performance of MEC according to the input substrate concentration, six laboratory-scale MEC reactors were operated by sequentially increasing the input substrate concentration from 2 g/L of sodium acetate, to 4 g/L, and 6 g/L. The current density, hydrogen production, and SCOD removal rate were analyzed, and energy efficiency and cathodic hydrogen recovery were calculated to compare the performance of MEC. The maximum volumetric current density was obtained at 4 g/L condition (76.3 A/m³) and it decreased to 19.0 A/m³, when the input concentration was increased to 6 g/L, which was a 75% decrease compared to the 4 g/L input condition. Maximum hydrogen production was obtained also at 4 g/L condition (47.3 ± 16.8 mL), but maximum hydrogen yield was obtained at 2 g/L input condition (1.1 L H₂/g COD_in). Energy efficiencies were also highest in 2 g/L condition; the lowest result was observed at 6 g/L condition. Maximum electrical energy efficiency was 76.4%, and the maximum overall energy efficiency was 39.7% at 2 g/L condition. However, when the substrate concentration increased to 6 g/L, the performance was drastically decreased. Cathodic hydrogen recovery also showed a similar tendency with energy efficiency, with the lowest concentration condition showing the best performance. It can be concluded that operating at low input substrate concentration might be better when considering not only hydrogen yield but also energy efficiency.

• Journal of the Korean Institute of Telematics and Electronics A
• /
• v.28A no.5
• /
• pp.380-386
• /
• 1991

Hydrogen plasma-assisted epitaxial(PAE) growth of GaAs/Si and GaAs/Ge/Si with Ge buffer layer has been investigated. By means of photoluminescence, Nomarski microscopu, and $\alpha$-step, it could be known that GaAs on Si with Ge buffer layer has better crystalline quality than GaAs on Si without Ge buffer layer. The stoichiometry of GaAs layer on Si was confirmed by the depth profile of Auger electron spectroscope (AES). Also the native oxide(SiO$_2$) layer on Si substrate was plama-etched and the removal of the oxide layer was confirmed by AES. Photoluminescence peak wavelength of GaAs/Ge/Si with Ge buffer of 1\ulcorner thickness and GaAs growth rate of 160$\AA$/min was 8700$\AA$and FWHM was 12$\AA$.

• Journal of the Semiconductor & Display Technology
• /
• v.7 no.4
• /
• pp.29-33
• /
• 2008

Rapid increase of integrity for recent semiconductor industry highly demands the development of removal technology of contaminated particles in the scale of a few microns or even smaller. It is known that the surface cleaning technology using $CO_2$ snow has its own merits of high efficiency. However, the detailed removal mechanism of particles using this technology is not yet fully understood due to the lack of sophisticated research endeavors. The detachment mechanism of particles from the substrates is known to be belonged in four types; rebounding, sliding, rolling and lifting. In this study, a modeling effort is performed to explain the detachment mechanism of a contaminant particle due to the rebounding caused by the vertical collision of the $CO_2$ snow. The Hertz and Johnson-Kendall-Roberts(JKR) theories are employed to describe the contact, adhesion and deformation mechanisms of the particles on a substrate. Numerical simulations are followed for several representative cases, which provide the perspective views on the dynamic characteristics of the particles as functions of the material properties and the initial inter-particle collision velocity.