• Title/Summary/Keyword: Substrate Removal Characteristics

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Properties of VES-LMC Adhesive Strength for Surface Removal Methods (절삭방법에 따른 VES-LMC의 부착강도 특성)

  • Kim, Ki-Heun;Jeong, Won-Kyong;Lee, Jin-Beom;Lee, Bong-Hak;Yun, Kyong-Koo
    • Proceedings of the Korea Concrete Institute Conference
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    • 2005.11a
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    • pp.543-546
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    • 2005
  • The development and maintenance of a sound bond are an essential requirements of concrete repair and replacement. The bond property of a bonded overlay to its substrate concrete during the lifetime is one of the most important performance requirements which should be quantified This study was performed to investigate the characteristics of adhesive strength for overlay concrete. Three different removal methods of deteriorated concrete such as chip-patch, mill-patch and water-jet were varied in this study. According to the adhesive strength of pull- off test, case III using water-jet was measured $2\~3$ times higher than that of chip-patch or mill-patch.

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A Study on Pressure Distribution for Uniform Polishing of Sapphire Substrate

  • Park, Chul jin;Jeong, Haedo;Lee, Sangjik;Kim, Doyeon;Kim, Hyoungjae
    • Tribology and Lubricants
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    • v.32 no.2
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    • pp.61-66
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    • 2016
  • Total thickness variation (TTV), BOW, and surface roughness are essential characteristics for high quality sapphire substrates. Many researchers have attempted to increase removal rate by controlling the key process parameters like pressure and velocity owing to the high cost of consumables in sapphire chemical mechanical polishing (CMP). In case of the pressure approach, increased pressure owing to higher deviation of pressure over the wafer leads to significant degradation of the TTV. In this study, the authors focused on reducing TTV under the high-pressure conditions. When the production equipment polishes multiple wafers attached on a carrier, higher loads seem to be concentrated around the leading edge of the head; this occurs because of frictional force generated by the combination of table rotation and the height of the gimbal of the polishing head. We believe the skewed pressure distribution during polishing to be the main reason of within-wafer non-uniformity (WIWNU). The insertion of a hub ring between the polishing head and substrate carrier helped reduce the pressure deviation. Adjusting the location of the hub ring enables tuning of the pressure distribution. The results indicated that the position of the hub ring strongly affected the removal profile, which confirmed that the position of the hub ring changes the pressure distribution. Furthermore, we analyzed the deformation of the head via finite element method (FEM) to verify the pressure non-uniformity over the contact area Based on experiment and FEM results, we determined the optimal position of hub ring for achieving uniform polishing of the substrate.

Research Trends on Chemical Mechanical Polishing Using Ultraviolet Light (자외선 광을 활용하는 화학기계적 연마에 관한 연구 동향)

  • Lee, Hyunseop
    • Tribology and Lubricants
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    • v.38 no.6
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    • pp.247-254
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    • 2022
  • Chemical mechanical polishing (CMP) is a hybrid surface-polishing process that utilizes both mechanical and chemical energy. However, the recently emerging semiconductor substrate and thin film materials are challenging to process using the existing CMP. Therefore, previous researchers have conducted studies to increase the material removal rate (MRR) of CMP. Most materials studied to improve MRR have high hardness and chemical stability. Methods for enhancing the material removal efficiency of CMP include additional provision of electric, thermal, light, mechanical, and chemical energies. This study aims to introduce research trends on CMP using ultraviolet (UV) light to these methods to improve the material removal efficiency of CMP. This method, photocatalysis-assisted chemical mechanical polishing (PCMP), utilizes photocatalytic oxidation using UV light. In this study, the target materials of the PCMP application include SiC, GaN, GaAs, and Ru. This study explains the photocatalytic reaction, which is the basic principle of PCMP, and reviews studies on PCMP according to materials. Additionally, the researchers classified the PCMP system used in existing studies and presented the course for further investigation of PCMP. This study aims to aid in understanding PCMP and set the direction of future research. Lastly, since there have not been many studies on the tribology characteristics in PCMP, research on this is expected to be required.

An Investigation of Particle Detachment Ratios From Rotating Data Storage Disks (데이터 저장용 디스크의 회전 시 입자이탈에 관한 실험적 연구)

  • Park, Hee-Sung;Lee, Dae-Young;Hwang, Jung-Ho;Kim, Kwang;Jang, Dong-Sub
    • Proceedings of the KSME Conference
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    • 2001.06d
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    • pp.585-588
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    • 2001
  • Particle contamination on the data storage disks has been a serious problem for magnetic hard disk drive manufacturers. For high storage optical disks, such as DVD-ROM/RAM or NFR (near field recording) system, particle-induced damages can be also detected because only a few micrometer particles can prevent read/write signal from optical lens. The increasing areal density and smaller bit size accelerates particle induced damages on the optical disk. One of the methods to prevent particle contamination on the optical disk surface is to handle the disk enclosed in a cartridge like a modern DVD-RAM disk. However, even for a perfectly sealed disk drive, particles are found inside the drive. The other method is to improve disk surface characteristics. Particle contamination on the surface can be reduced by proper selection of disk coating materials. [n this paper, particle detachment ratios for CD (compact disk), DVD (digital versatile disk), HD (magnetic hard disk), HD with Jut lubricant, and aluminosilicate substrate HD were investigated. Surface roughness and surface energy of the test disks were compared with the particle detachment ratios. Proper substrate and lubricant characteristics to reduce particle contamination on the disk surface were found.

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RESEARCH PAPERS : THE KINETICS ON THE BIOLOGICAL REACTION IN MEMBRANE BIOREACTOR (MBR) WITH GRAVITATIONAL AND TRANSVERSAL FILTRATION

  • Jang, Nam-J.;Hwang, Moon-H.;Yeo, Young-H.;Shim, Wang-G.;S. Vigneswaran;Kim, In-S.
    • Environmental Engineering Research
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    • v.9 no.5
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    • pp.238-247
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    • 2004
  • The objective of this study was to develop kinetic model for the MBR and investigate kinetic characteristics of the gravitational flow transverse direction MBR system. Kinetic model was derived by mass balance of substratc and biomass combined with empirical membranc filtration rerm for the MBR. To find kinctic values, permeale flux and COD removal were analyzed through the laboratory, MBR operation as different solids retention times. Permeate flux was ranged 2.5-5.0 LMH (L/m$^2$/hr) as sludge characteristics in each run. Although the soluble COD in the bioreactor was changed, the effluent COD was stable as average 99% removal rate during the experimental periods. Y$_g$ of this MBR system was higher than those of cross-flow MBR processes. The kinetics of this MBR showed that smaller k, larger b, and larger K$_s$ values than the conventional activated sludge process. These results indicated that substrate was used for cell maintenance rather than growth in this MBR system.

A Study on a Fixed Bed Biofilm Process Using Porous Glass Media (다공성(多孔性) 유리메디아를 이용한 고정상(固定床) 생물막법(生物膜法)에 관한 연구(硏究))

  • Yoon, Tae Il;Kim, Jae Hoon
    • Journal of Korean Society of Water and Wastewater
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    • v.10 no.1
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    • pp.112-120
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    • 1996
  • In this study, the porous glass media was utilized as biomass carrier, and the optimum characteristics of this new media in fixed bed biofilm process were investigated. The characteristics of media considered here are a void volume fraction, a specific surface area, and surface characteristics of media. The effect of surface roughness and material could be clearly demonstrated by the fact that the porous glass media showed a good potential for biofilm development. This might results from the fact that biofilm is initially formed in the surface cavities of the media is protect from the shear effect. Therefore, the microcolonies are not readily detached by the fluid shear. In the steady state, biofilm formation along the packing bed depth was different from media to media. The specific area was also an important factor for the attachment of microorganism on the media surface. The specific area was also an important factor for the attachment of microorganism on the media surface. In the case of porous glass media, about $100m^2/m^3$ was enough to obtain a good organic removal efficiency The organic removal efficiency could be improved by increasing the void volume fraction in the reactor, at least 80% was required to obtain a high removal efficiency and prevent clogging. From the analysis of kinetics study, the yield coefficient, Y, was 0.42 mgMLSS/mgSBOD, endogenous respiration coefficient, ke, was $0.12day^{-1}$ and substrate removel coefficient of Mckinney. km, was $16.8hr^{-1}$ for the porous glass media G-2

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Enzymatic Characteristics of ${\alpha}-Galactosidase$ for the Removal of Flatulence Factor in Soybean (대두(大豆)의 Flatulence Factor 제거(除去)를 위한 ${\alpha}-Galactosidase$ 효소제의 특성)

  • Jung, Sang-Soo;Lee, Su-Rae
    • Korean Journal of Food Science and Technology
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    • v.18 no.6
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    • pp.450-457
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    • 1986
  • For the removal of raffinose and stachyose related to flatulence in soybean, ${\alpha}-Galactosidase$ activity of six commercial enzyme preparations was compared and their enzymatic characteristics were investigated. Among the tested enzymes, one product from Aspergillus niger was shown to be the most potent in ${\alpha}-Galactosidase$ activity. The enzyme characteristics of the selected preparation were shown to be pH 4.0-4.5 for optimum activity, pH 4-5 for optimum stability and $45^{\circ}C$ for optimum activity. Upon reaction on a synthetic substrate, $p-nitrophenyl-{\alpha}-D-galactoside$, Michaelis constant was 2.08 mM and maximum velocity was 435 micromoles of substrate/minute/g enzyme preparation. The enzyme was proved to be essential for SH group for its activity and capable of hydrolyzing raffinose, sucrose and $p-nitrophenyl-{\alpha}-D-galactoside$ almost completely. Thin-layer chromatographic analysis exhibited that the enzyme treatments of raffinose and stachyose were resulted to produce only monosaccharides in 2 hours of hydrolysis. It was, therefore, assumed that the flatulence factor in soybean foods can be easily removed by the use of enzymes showing ${\alpha}-Galactosidase$ activity.

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Electrochemical Characteristics of the MFCs using the Ceramic Membrane as a Separator (세라믹막을 이용한 미생물연료전지의 전기화학적 특성 연구)

  • Lim, Ji-Young;Park, Dae-Seok;Kim, Jin-Han
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.8
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    • pp.5728-5735
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    • 2015
  • This study attempts to verify the applicability of ceramic membrane as a separator by comparing the power generation characteristics in single-chamber MFCs using ceramic membranes to those in the MFCs using nafion membrane. The generated power in MFCs by using acetate as a substrate was more stable than that by using formate, propionate and butyrate, respectively. It was shown that the generated power by using formate substrate in MFCs was unstable and a little higher than that by using acetate, and the power generated by using propionate and butyrate were lower than that by using acetate. In order to find out the Pt catalyst effect, it was compared the power generated in MFCs using Pt-coated carbon cloth as electrode to that power using normal carbon cloth. The power generated in MFCs using Pt-coated carbon cloth as electrode was 1.2 times higher than that using normal carbon cloth. The Pt-coated carbon cloth was about 5 times more expensive than normal carbon cloth. It is suggested that both power generation efficiency and cost together should be considered in selecting electrodes of MFCs. It was found that the ceramic membrane was superior to nafion membrane by comparing to the power generation characteristics obtained. It was shown that average voltage values were $523.67mV{\pm}49.41mV$ by using synthetic wastewater, in MFCs of ceramic membrane as a separator. While average voltage values were $424.09mV{\pm}79.95mV$ by using synthetic wastewater, in MFCs of nafion membrane as a separator. The organic removal efficiency, 41.7% by using ceramic membrane was a little bit higher than 40.8% by using nafion membrane. This research implies ceramic membrane can be a valid alternative to nafion membrane as a separator when considering the power generation and the efficiency of organics removal.

Characteristics of Ag Etching using Inductively Coupled Halogen-based Plasmas

  • Park, Sang-Duk;Lee, Young-Joon;Kim, Sang-Gab;Choe, Hee-Hwan;Hong, Moon-Poe;Yeom, Geun-Young
    • 한국정보디스플레이학회:학술대회논문집
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    • 2002.08a
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    • pp.860-863
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    • 2002
  • In this study, Ag thin films deposited on LCD-grade glass were etched using inductively coupled fluorine-based plasmas and the effect of various $CF_4$-based gas mixtures on the Ag etching characteristics were studied. When $CF_4$-based gas mixtures were used with $N_2$, due to the very low vapor pressure of etch products, etch products remained on the substrate after the etching. However, when $CF_4$ used with Ar, residue-free Ag etching could be obtained due to the removal of etch product by sputtering by $Ar^+$ ions.

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A Study on the Design of Denitrification Reactor and the Characteristics (탈질화 반응기의 설계 및 특성에 관한 연구)

  • 김선화;송주영
    • Journal of Life Science
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    • v.11 no.3
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    • pp.273-278
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    • 2001
  • Removal of nitrogen compound from waste water is essential and often accomplished by biological process. Deni-trification bacterium. Paracoccus denitrificans(KCTC 2350) is employed to estimate the ability and the characteristics of denitrification. In the immobilized biological reactor system, the measurement of absolute amount of active strain in the reactor is comparatively difficult or impossible. In this study, strain immobilized denitrification reactor was designed with the unwoven texture wrapped peeped hole plastic tube to calculated the absolute amount of active strain by comparing the activity of the immobilized reactor adn the free cell reactor. The reactor system was continuous stirred tank reactor and the rate of substrate consumption was assumed to be Michaelis-Menten equation. As a result, we found that the amount of immobilized active strain was the half of the total active strain in the reactor and the time required to reach in the equilibrium state in the immobilized reactor system was shorter than that of the free cell reactor system.

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