A Study on Pressure Distribution for Uniform Polishing of Sapphire Substrate |
Park, Chul jin
(Korea Institute of Industrial Technology)
Jeong, Haedo (Graduate School of Mechanical Engineering, Pusan National University) Lee, Sangjik (Korea Institute of Industrial Technology) Kim, Doyeon (Korea Institute of Industrial Technology) Kim, Hyoungjae (Korea Institute of Industrial Technology) |
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