• 전자공학회논문지 IE
• /
• 제44권2호
• /
• pp.26-31
• /
• 2007

카본나노튜브 전계 방출 어레이(carbon nanotube field emission array, CNT FEA)를 유리기판 상에 형성시키기 위하여 CNT 페이스트를 스크린 프린팅 후 표면처리를 수행하였다. 본 실험에서는 효과적인 표면처리 방법으로서 이온 빔을 조사(expose)시키는 방법을 연구하였다. 먼저, 유리 기판상에 감광성 CNT 페이스트를 스크린 프린팅하고 UV 후면노광 및 현상공정에 의해 선택적으로 CNT 페이스트를 남겼다. 다시 고온에서 소성후 CNT들은 바인더 성분들에 의해 문히게 된다. 본 실험에서는 소성된 CNT 페이스트의 표면상에 Ar 이온빔을 가속시켜 페이스트의 바인더(binder)를 선택적으로 제거함으로써 전계방출 특성을 향상시킬 수 있었다. 표면처리를 위한 이온 빔 가속시 이온빔의 가속에너지에 따라 특성이 크게 변화되었는데, 본 연구에서는 100 V의 낮은 가속 전압에서 가장 높은 전계방출 특성을 나타내었으며 가속 전압이 너무 높으면 바인더 성분 외에도 CNT 자체가 제거됨으로써 오히려 특정이 저하됨을 알 수 있었다.

• 반도체디스플레이기술학회지
• /
• 제9권1호
• /
• pp.5-10
• /
• 2010

Among a variety of cleaning processes, the cryogenic carbon dioxide ($CO_2$) cleaning has merits because it is highly efficient in removing very fine particles, innoxious to humans and does not produce residuals after the cleaning, which enables us to extend its area of coverage in the semi-conductor fabrication society. However, the cryogenic carbon dioxide cleaning method has some technical research issues in aspect to particles' adhesion and removal. To resolve these issues, performing an analysis for the identification of particle adhesion mechanism is needed. In this study, a research was performed by a theoretical approach. To this end, we extended the G-T (Greenwood-Tripp) model by applying the JKR (Johnson-Kendall-Roberts) and Lennard-Jones potential theories and the statistical characteristics of rough surface to investigate and identify the contact, adhesion and deformation mechanisms of soft or hard particles on the rough substrate. The statistical characteristics of the rough surface were taken into account through the employment of the normal probability distribution function of the asperity peaks on the substrate surface. The effects of surface roughness on the pull-off force for these particles were examined and discussed.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2012년도 춘계학술발표대회
• /
• pp.88.1-88.1
• /
• 2012

Silicon nanowires (SiNWs), due to their unusual quantum-confinement effects that lead to superior electrical and optical properties compared to those of the bulk silicon, have been widely researched as a potential building block in a variety of novel electronic devices. The conventional means for the synthesis of SiNWs has been the vapor-liquid-solid method using chemical vapor deposition; however, this method is time consuming, environmentally unfriendly, and do not support vertical growth. As an alternate, the electroless etching method has been proposed, which uses metal catalysts contained in aqueous hydrofluoric acids (HF) for vertically etching the bulk silicon substrate. This new method can support large-area growth in a short time, and vertically aligned SiNWs with high aspect ratio can be readily synthesized with excellent reproducibility. Nonetheless, there still are rooms for improvement such as the poor surface characteristics that lead to degradation in electrical performance, and non-uniformity of the diameter and shapes of the synthesized SiNWs. Here, we report a facile method of SiNWs synthesis having uniform sizes, diameters, and shapes, which may be other than just cylindrical shapes using a modified nanosphere lithography technique. The diameters of the polystyrene nanospheres can be adjustable through varying the time of O2 plasma treatment, which serve as a mask template for metal deposition on a silicon substrate. After the removal of the nanospheres, SiNWs having the exact same shape as the mask are synthesized using wet etching technique in a solution of HF, hydrogen peroxide, and deionized water. Different electrical and optical characteristics were obtained according to the shapes and sizes of the SiNWs, which implies that they can serve specific purposes according to their types.

• 유기물자원화
• /
• 제12권1호
• /
• pp.75-83
• /
• 2004

혐기성 소화효율의 극대화를 위해 온도상분리 공정과 혐기성 회분식 공정을 음식물 쓰레기와 하수슬러지의 혼합기질에 적용한 온도상분리 혐기성 회분식 소화공정(TPAD-ASBR)의 거동 특성을 유기물부하의 변화에 따라 평가하여 다음과 같은 결론을 얻었다. TPAD-ASBR 과 대조구의 첫 단에서 대부분의 메탄생성과 유기물 제거가 이루어졌으며, 단위부피당 메탄발생량은 유기물부하 2.7 g VS/L/d에서 각각 0.79와 0.59L $CH_4/L/d$ 였다. 동일 부하에서 TPAD-ASBR의 유기물 제거효율은 61%이었으며 40%의 효율을 보인 대조구에 비해 고온조를 도입한 본 공정의 우수성을 확인하였다. 국내 하수슬러지는 상대적으로 낮은 VS 농도(1.5%, w/w)와 낮은 생분해 효율을 보이는데, 이러한 부정적 특성을 보완하기 위하여 투입된 음식물쓰레기에 의한 기질 특성의 효과적인 개선으로 인해 높은 유기물 감량과 메탄회수가 가능하였다. 또한, track study를 통해 연속회분식 운전방식에 의한 settling 단계의 도입으로 SRT를 HRT보다 길게 유지하여 미처리 입자와 active biomass의 효율적이고 지속적인 접촉을 도모하여 보다 높은 안정화효율 획득이 가능한 것으로 사료된다. 따라서, 혐기성소화공정에 TPAD-ASBR공정과 함께 음식물쓰레기와의 혼합소화를 도입하는 것은 처분이 까다로운 두 가지의 폐기물을 고효율로 처리함과 동시에 효율적인 에너지회수가 가능하여 경제적 운전이 가능하였다.

• Tribology and Lubricants
• /
• 제30권3호
• /
• pp.139-145
• /
• 2014

Nowadays, most micro-patterns are manufactured during flow line production. However, a conventional rotary chemical mechanical polishing (CMP) system has a limited throughput for the fabrication of large and flexible electronics. To overcome this problem, we propose a novel linear roll-CMP system for the planarization of large-area electronics. In this paper, we present a statistical analysis on the linear roll-CMP process of copper-clad laminate (CCL) to determine the impacts of process parameters on the material removal rate (MRR) and its non-uniformity (NU). In the linear roll-CMP process, process parameters such as the slurry flow rate, roll speed, table feed rate, and down force affect the MRR and NU. To determine the polishing characteristics of roll-CMP, we use Taguchi's orthogonal array L16 (44) for the experimental design and F-values obtained by the analysis of variance (ANOVA). We investigate the signal-to-noise (S/N) ratio to identify the prominent control parameters. The "higher is better" for the MRR and "lower is better" for the NU were selected for obtaining optimum CMP performance characteristics. The experimental and statistical results indicate that the down force and roll speed mainly affect the MRR and the down force and table feed rate determine the NU in the linear roll-CMP process. However, over 186.3 N of down force deteriorates the NU because of the bending of substrate. Roll speed has little relationship to the NU and the table feed rate does not impact on the MRR. This study provides information on the design parameter of roll-CMP machine and process optimization.

• 한국환경과학회지
• /
• 제2권2호
• /
• pp.145-152
• /
• 1993

An experimental research was conducted in order to study the treatability of leachate and a combined wastewater of municipal landfill leachate and municipal sewage. The landfill leachate was that of Nanjido landfill site, and the municipal sewage was obtained from Chungnang municipal sewage treatment plant of Seoul. Several sets of bench-scale sequencing batch reactor(SBR) were used as experimental apparatus. Specially investigated items in this experiment were the removal efficiency of substrate and the influence of the hydraulic retention time(HRT). The experiment lasted for about 8 months. The result are as follows ; 1) The characteristics of leachate were pH 7.4~8.1, BOD 280~450 mg/l, COD 1300 ~ 1350 mg/l, T-N 2021 ~2110 mg/1,7-P 2.7 ~3.2 mg/l, Cl-3540 ~4085 mg/l, and heavy metals are a very small amount. And the characteristics of sewage Ivere pH 6.9~7.3, BOD 78.4~129.3 mg/1, COD 121.2~305.0 mg/l, T-N 14.9~36.4 mg/l, T-P 1.3 ~5.9 mg/l. 2) The treatability of leachate alone was not treat well. So for the good treatment of leachate, it was necessary to deal with the pretreatment before biological treatment and a combined treatment of municipal serfage. 3) The various contents of the leachate were 5%, 10%, and 50% and the removal efficiency of COD was 86.0%, 82.8%, 60.6%, and 31.7%. The maximum content of the leachate which could be sucessfully treated by SBR in the combined treatment was 10% of that of sewage.

• KSBB Journal
• /
• 제7권3호
• /
• pp.235-245
• /
• 1992

비표면적이 다른 media를 이용한 호기성 고정생물막공법에서 유기물부하율을 변화시키면서, 유출수의 성상과 활성슬러지의 설계인자가 호기성 고정생물막송법에 적용가능한지를 조사하였다. 유출수의 수질은 낮은 유기물부하율에서는 유출수의 농도가 비표면적에 따라 크게 변화하지 않았으나, 높은 부하율에서는 변화폭이 매우 크게 나타나으며, 비표면적별 유출수 농도를 보면 비표면적이 큰 경우가 유출수 농도가 낮았으며, 유입수농도가 클수록 유출수의 농도차이도 더 크게 나타났다. 동력학적 계수를 산출하기 위해 활성슬러지 공법의 모델을 고정생물막 공법에 적용시켜 본 결과 실험조건에서 실측 미생물 생산량과 계산된 미생물 생산량과의 차이는 COD를 기준으로 하였을 때가 더 잘 일치함을 알았다.

• Journal of Periodontal and Implant Science
• /
• 제29권1호
• /
• pp.209-231
• /
• 1999

Even though titanium(Ti) and its alloys are the most used dental implant materials, there are some problems that Ti wears easily and interferes normal osteogenesis due to the metal ions. Ti coated with bioactive ceramics such as hydroxyapatite has also such problems as the exfoliation or resorption of the coated layer, Recent studies on implant materials have been proceeding to improve physical properties of the implant substrate and biocompatibility of the implant surfaces. The purpose of the present study was to examine the physical property and bone tissue compatibility of bioinert nitrides ion plated Ti, Button type specimens(14mm in diameter, 2.32rrun in height) for the abrasion test and cytotoxicity test and thread type implants(3.75mm in diameter, 6mm in length) for the animal experiments were made from Ti(grade 2) and 316LVM stainless steel. Ti specimens were ion plated with TiN, ZrN by the low temperature arc vapor deposition, and the depth profile of the TiN/Ti, ZrN/Ti ion plated surface was examined by Auger Electron Spectroscopy. Three kind of button type specimens .of TiN/Ti, ZrN/Ti and Ti were used for abrasion test, and HEPAlClC7 cells and CCD cells were cultivated for 4 days with the specimens for cytotoxicity test. Thread type implants of TiN/Ti, ZrN/Ti, Ti, 316LVM were implanted on the femur of 6 adult dogs weighing 10kg-13kg. Two dogs were sacrified for histological examination after 45 days and 90 days, and four dogs were sacrified for the removal torque test of the implant') after 90 days. The removal torque force was measured by Autograph (Shimadzu Co., AGS-1000D series, Japan). Abrasion resistance of TiN/Ti was the highest, and that of ZrN/Ti and Ti were followed. The bioinert nitride ion plated Ti had much better abrasion resistance, compared with Ti, In the cytotoxicity test, the number of both cells were increased in all specimens, and there were no significant difference in cytotoxic reaction among all groups (p>0.1), In histological examination, 316LVM showed the soft tissue engagement in interface between the implant and bone, but the other materials after 45 days noted immature new bone formation in the medullary portion along the implant surface, and those after 90 days showed implant support by new bone formation in both the cortical and the medullary portion, The removal torque force of Tilv/Ti showed significantly higher than that of Ti(p(O,05). The difference in removal torque force between TiN/Ti and ZrN/Ti was not significant(p>0.05), and that of 316LVM was lowest among all groups(p<0.05). These results suggest that bioinert nitrides ion plated Ti can resolve the existing problems of Ti and bioactive ceramics, and it may be clinically applicable to human.

• 대한토목학회논문집
• /
• 제7권3호
• /
• pp.23-31
• /
• 1987

유기물(有機物)을 제거(除去)키 위한 토양처리(土壤處理) system에 있어서 특히 급속토양삼투법(急速土壤渗透法)은 다른 토양처리방법(土壤處理方法)에 비(比)해 기온(氣溫) 변화(變化)에 대한 제한(制限)을 덜 받고 수지면적(數地面積)을 적게 요구(要求)하는 것으로 알려져 있다. 따라서 급속토양처리(急速土壤處理)에 대한 본(本) 연구(硏究)에서는 유기물(有機物) 제거율(除去率)과 침투율(浸透率), 생물학적(生物學的) 산소흡수(酸素吸收)에 따른 용존산소(溶存酸素)의 변화(變化), 그리고 pH 등을 사토(砂土)를 채운 실험통(實驗筒)을 이용(利用)하여 규명코자 했으며 또한 단위면적당(單位面積當) COD 제거량(除去量) 및 TKN으로부터의 질산화율(窒酸化率) 등을 구(求)하였다. 그 결과(結果)는 다음과 같다. 1) 사시(砂尸)이 1m 이상(以上)인 경우 침투율(浸透率)이 15~20cm/day 이하(以下)에서는 COD제거(除去)가 90% 이상(以上)으로 안정(安定)하게 유지되며 지하수위(地下水位)까지의 깊이를 고려(考慮)하면 침투오염물(浸透汚染物)로 인(因)한 오염(汚染)영향은 매우 작다고 본다. 2) 단위면적당(單位面積當) COD 제거량(除去量)은 적절(適切)한 운영하(運營下)에서 10~14g/day를 쉽게 기대할 수 있고 기질분해(基質分解)는 대부분(大部分) media표층(表層)에서 이루어지는 것으로 판단된다. 3) 일반적(一般的)으로 TKN의 $NO_3{^-}$-N으로의 전환(轉換)은 상당한 체류시간(滯留時間)이 주어진다면 COD제거율(除去率)에 비례(比例)한다고 본다.

• 생명과학회지
• /
• 제30권2호
• /
• pp.129-136
• /
• 2020

암모니아성 질소(NH₄-N) 함유폐수의 효과적인 처리를 위하여 암모니아성 질소가 함유되어있는 식품폐수처리장의 폭기조 활성오니에 우점적으로 존재하는 미생물 중 TOC (total organic carbon) 제거율이 높은 AT2, AT9, AT12 균주와 암모니아성 질소 제거능이 우수한 FN47을 분리, 동정하였다. 이들 분리균주의 균체를 탈지강을 담체로하여 산업폐수처리용 미생물제제 FIW-1 을 제조하였다. 폭기조 분리균주들의 대상으로 폐수자체를 배양기질로 하여 배양학적 특성을 조사하였을 때 분리균주들의 기질친화성이 매우 높은 것으로 나타났으며, 분리균주 중 AT12 균주(Alcaligenes sp. AT12)가 가장 높은 기질친화성을 나타내었다. 식품폐수 중의 암모니아성 질소 제거효율은 분리균주 FN47 (Microbacterium sp. FN47)의 처리구에서 71%의 제거율을 나타내었다. 실험실규모의 반응조에서 식품폐수를 이용한 연속배양 실험에서 활성슬러지만을 첨가한 경우 63% TOC제거효율을 나타내었으며, 폐수처리용 미생물제제 FIW-1을 첨가 시에는 92%의 제거효율을 나타내었다. 또한 폐수처리용 미생물제제 FIW-1의 폐수처리장 현장실험에서는 미생물제제 FIW-1을 투입한 초기 3일간의 유출수COD (chemical oxygen demand) 값은 43% 내외의 처리율을 나타내었으나, 5일이 경과하였을 때 유출수의 COD값은 62%의 처리효율을 나타내었다.