• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2001년도 추계학술강연 및 발표대회
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• pp.22-22
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• 2001

전통적으로 초경합금은 무라까미 용액에서 에칭하거나 묽은 염산에 넣고 끓이는 방법에 의해 그 밋구조를 관찰하였다. 그러나 carbide 입자가 suvmicron 크기인 초경합금에서는 전통적인 에칭 방법으 에칭 후에도 입자/기지상, 입자/입자 입계를 동시에 구분시킬 수 있는 SEM 사진을 얻을 수 없다. 본 연구에서는 submicron 크기 초경합금의 고배율 SEM 사진을 얻을 수있는 90H2O2 - 10HNO3 (vol%)의 새로운 에칭 용액을 개발하였다. 경명의 submicron 크기 WC-Co 시편을 샐운 에칭 용액인 90H2O2 - 10HNO3 (vol%)에 넣고 약 6$0^{\circ}C$에서 약 12분 동안 에칭하였다. 에칭에 의해 Co 기지상은 빠르게 제기(dissolution)되었고, 동시에 표면의 WC 입자들은 각각의 결정학적 방향에 따라 천천히(slowly) 다른 속도로 부식(sissolution)되었다. 고배율 SEM을 관찰한 결과 WC/기지상 계면과 WC/WC 입계가 명화갛게 관찰되었다. WC 입자의 성장을 억제시키는입자성장 억제제(Cr3C2, TaC,VC)가 첨가된 WC Co 초경합금을 새로운 에칭 용액인 90H2O2 - 10HNO3 (vol%)에 넣고 약 6$0^{\circ}C$에서 약 12분동안 에칭하였다. 매우 작은 입자를 갖는 미세구조임에도 불구하고 고배율 SEM에서 WC/기지상 계면과 WC/WC 입계가 명확하게 관찰되었다. 90H2O2 - 10HNO3 (vol%)에서 Co 기지상이 빠르게 제거되는 것은 산 (acid)인 HNO3)에서 금속인 Co가 쉽게 녹기 때문이다. 동시에 WC 입자들이 각각 다른 속도로 에칭 된 것은 강력한 산화제인 H2O2가 각각의 WC입자 표면에 얇은 텅스텐 산화물 층을 형성시켰고 이들이 산인 HNO3에서 녹았기 때문이다. 본 연구에서 개발된 새로운 에칭 용액인 90H2O2 - 10HNO3 (vol%)의 에칭 원리가 똑같이 적용 가능한 다른 종류의 초경 합금에서도 사용이 가능할 것으로 판단된다.로 판단된다.

• 대한기계학회논문집B
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• 제30권2호
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• pp.186-192
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• 2006

We applied a new charging system using the condensation and evaporation method to charge the submicron particles with a uniform charging performance. The monodispersed NaCl submicron particles were condensed by n-butanol vapor and grew up to micron droplets with a same size, regardless of their initial size. Those condensed droplets were charged in an indirect corona charger. The indirect corona charger consisted of the ion generation zone and the particle charging zone. In the ion generation zone, Ions were generated by corona discharge and some of them moved into the particle charging zone by a carrier gas and mixed with the condensed droplet. And finally, the charged and condensed droplets dried through an evaporator to shrink to their original size. The average charge and penetration rate of the particles before and after evaporation were measured by CPC and aerosol electrometer and compared with those of a conventional corona charger. The results showed that the average charge was $5\~7$ charges and the penetration rate was over $90\%$, regardless of the initial particle size.

• 대한기계학회논문집B
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• 제28권3호
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• pp.349-358
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• 2004

A low pressure impactor is an impaction device to separate airborne particles into aerodynamic size classes at low pressure condition. We designed a two-stage low-pressure impactor to classify submicron sized environmental aerosols. Performance evaluation was carried out for stages 1 and 2 by using an electrical method. Monodisperse liquid dioctyl sebacate (DOS) particles were generated using evaporation-condensation process followed by electrostatic classification using a DMA (differential mobility analyzer). The test particles were in the range of 0.08∼0.8$\mu\textrm{m}$. For the evaluation of the impactor we used two electrometers; one was connected to the impaction plate of the impactor and the other was to the Faraday cage used as a backup filter. The effect of polydispersity of test aerosols on the performance was investigated. The results showed that the experimental 50-% cutoff diameters at each impactor's operation pressure were 0.53 and 0.187$\mu\textrm{m}$ for stages 1 and stage 2, respectively. The effects of operation pressure on the cutoff diameter and the steepness of collection efficiency curves were also investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 Techno-Fair 및 추계학술대회 논문집 전기물성,응용부문
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• pp.131-132
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• 2008

We describe a fabrication method of submicron glass trenches which have embedded metal lines for the future application of nano-scale RF MEMS devices. The glass wafer was etched using two different conditions to identify the relationship between the slope of glass trenches and the slope of photroresist. A self-aligned metal photomask and negative photroresist (PR) slope were used to insert metal lines inside the glass trenches. The PR slope patterned by backside photolithography was affected by the profile of preformed glass trenches. Gold was well fabricated in the $0.7{\mu}m$ wide trench thanks to the negative PR slope. Nano-scale glass trenches with embedded metal lines can be used as a bottom electrode in submicron beam resonators operating with a high resonant frequency.

• 대한기계학회논문집B
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• 제25권1호
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• pp.124-132
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• 2001

This paper reports on the charge distribution measurements of submicron particles for three different charging mechanisms, which are spray electrification, bipolar ionization and corona discharge process, respectively. The number of elementary charges per particle was investigated by classifying and counting of a discrete mobility class. Charge distribution measurements were performed with NaCl particles generated from a collision atomizer for 0.01, 0.1, 1% NaCl solutions. Experimental results show than charge level of atomized NaCl particles is high and decreases with increasing the dissolved ion concentration. The charge level of the atomized NaCl particles can be reduced to that o Boltzmann equilibrium conditions by the bipolar ionization(Po(sup)210 bipolar ionizer). The charge level on NaCl particles passing through the corona discharge reactor is much higher than those of atomized or bipolar ionized NaCl particles. The evaluation of these measurements results in charge distribution of the submicron particles.

• 대한전자공학회논문지
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• 제27권3호
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• pp.63-71
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• 1990

Hydrodynamic model에 의해서 submicron GaAs device를 simulation 할 때 필요한 hydrodynamic model parameter 들을 Monte Carlo code를 개발하여 추출하였다. GaAs 전도대의 밴드구조로 $\Gamma$, L, X세개의 valley를 고려하였고, 산란기구로는 polar optic phonon, acoustic phonon, equivalent intervalley, non-equivalent intervalley, ionized impurity 및 piezoelectric scattering을 고려하였다. 계산으로부터 얻은 속도 - 전계 곡선은 실험결과와 잘 일치하였고, 다른 연구자들이 소자 시뮬레이션에 사용할 수 있도록 모델 파라메터들을 표로 제시하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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• pp.557-560
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• 2003

The submicron $YBa_2Cu_3O_x$ powder was prepared by the sol-gel method. The particle size is distributed from 0.2 to $1.0\;{\mu}m$, which benefits to eliminate the micro-cracks formed in the $YBa_2Cu_3O_x$ films deposited by electrophoresis. The powder was single phase of $YBa_2Cu_3O_x$ examined by X-ray diffraction. In the sol-gel process the citrate gel was formed from citric acid and nitrate solution of $Y_2O_3$, $Ba(NO_3)O_2$ and CuO. When pH values were adjusted to $6.4{\sim}6.7,\;Ba(NO_3)O_2$ could be dissolved in the citrate solution completely. Appropriate evaporative temperature of the sol-gel formation is discussed. After the heat treatment the transition temperature($T_c$) and critical current density($J_c$) of the $YBa_2Cu_3O_x$ samples made of the submicron powder were measured.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.250-251
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• 2014

This study introduces a simple deposition of $Cu_2O$ thin films with surface morphologies composed of columns, submicron-rods and submicron-branches on glass substrate from metallic Cu targets by tailoring the $Ar/O_2$ ratios during the sputtering. The obtained samples were used to fabricate gas sensor. The $H_2S$ sensing properties of the sensors at working temperatures from $100^{\circ}C$ to $300^{\circ}C$ were studied, in which $Cu_2O$ submicron-branches performed the best sensing property comparing with the rest morphologies. A transformation of $Cu_2O$ to $Cu_2S$ and CuS was consider as a main factor to the sensing mechanism of the sensors.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권10호
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• pp.465-470
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• 2005

In this paper. an experimental study, for method of increasing the efficiency of electrostatic precipitator for the collection of submicron-sized particles has been studied. All AC electric field was used to induce agglomeration of bipolory charged Particles. .4 bipolar AC-agglomeration system. consisted with a multineedle-mesh discharge system with a control grid, was proposed and investigated. Systematic experiments were carried out to investigate the agglomeration ratio of the AC-agglomeration system as a function of the different grid spacings and grid resistances for the submicron particles generated from liquid prorhane gas burning. The agglomeration ratios, which indicate the particle numbers before and after agglomeration of the test particles in number concentration base, were found to be 0.87, 1.80, 3.86, 9.50 and, 11.00 times for the particle sizes of 0.3. 0.5, 0.7, 1.0, and 2.0$\mu$m at applied voltage of 3.5kV, respectively which showed that the fine particle numbers were decreased while the larger particle numbers were increase greatly.

• 대한기계학회논문집B
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• 제29권4호
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• pp.453-459
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• 2005

In this paper, we are proposing a robust tool which is capable of measuring the size and elemental composition of submicron particles from twenty to several hundreds nanometers at the same time, i.e., named Single Particle Mass Spectrometer (SPMS). The home-made SPMS employs a laser ablation/multi-photon ionization method to tear a nanoparticle into the constituent elemental ions. One thing different from the conventional Aerosol Time-of-Flight Mass Spectrometer (ATOFMS) is the power of the ionization laser. Much strong laser used in this work makes it possible to generate elemental ions rather than molecular ions from a nanoparticle. Also the use of high power laser may guarantee a complete ionization of a particle, which was confirmed by the existence of multiple charged ions. If a particle is evaporated/ionized completely and detected through electric field-free TOF tube without any loss, we can extract the original particle volume from the measured total ion numbers. Collecting a number of particles mass spectra, we get a database of size and elemental composition of nanoparticles, with which we may take a took into any kinds of chemical reaction occurring at nanoscale. Several issues related to size estimation by SPMS will be discussed.