Study of Deposition Mechanism of Al2O3 Films According to Al2O3 Particle Size via Aerosol Deposition Process (에어로졸 증착 공정을 통해 제작한 Al2O3 코팅층의 Al2O3 입자 크기에 따른 성막 메커니즘 연구)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.33 no.3
- /
- pp.219-224
- /
- 2020