• Title/Summary/Keyword: Sub-50nm

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Coatings Properties and Efficiency Performance of Cr-DLC Films Deposited by Hybrid Linear Ion Source for Hydraulic Gear Pump (하이브리드 선형이온원에 의한 유압 기어펌프용 Cr-DLC코팅막의 특성과 효율성능)

  • Cha, Sun-Yong;Kim, Wang-Ryeol;Park, Min-Suk;Kwon, Se-Hun;Chung, Won-Sub;Kang, Myung-Chang
    • Journal of Powder Materials
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    • v.17 no.6
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    • pp.456-463
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    • 2010
  • This paper describes the results of the application of Cr-Diamond-like carbon (DLC) films for efficiency improvement through surface modification of spur gear parts in the hydraulic gear pump. Cr-DLC films were successfully deposited on SCM 415 substrates by a hybrid coating process using linear ion source (LIS) and magnetron sputtering method. The characteristics of the films were systematically investigated using FE-SEM, nano-indentation, sliding tester and AFM instrument. The microstructure of Cr-DLC films turned into the dense and fine grains with relatively preferred orientation. The thickness formed in our Cr buffer layer and DLC coating layer were obtained the 487 nm and $1.14\;{\mu}m$. The average friction coefficient of Cr-DLC films considerably decreased to 0.15 for 0.50 of uncoated SCM415 material. The hardness and surface roughness of Cr-DLC films were measured 20 GPa and 10.76 nm, respectively. And then, efficiency tests were performed on the hydraulic gear pump to investigate the efficiency performance of the Cr-DLC coated spur gear. The experimental results show that the volumetric and mechanical efficiency of hydraulic gear pump using the Cr-DLC spur gear were improved up to 2~5% and better efficiency improvement could be attributed to its excellent microstructure, higher hardness, and lower friction coefficient. This conclusion proves the feasibility in the efficiency improvement of hydraulic gear pump for industrial applications.

Formation of a MnSixOy barrier with Cu-Mn alloy film deposited using PEALD

  • Moon, Dae-Yong;Hwang, Chang-Mook;Park, Jong-Wan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.229-229
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    • 2010
  • With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

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Fabrication of Multi-Fin-Gate GaN HEMTs Using Honeycomb Shaped Nano-Channel (벌집구조의 나노채널을 이용한 다중 Fin-Gate GaN 기반 HEMTs의 제조 공정)

  • Kim, Jeong Jin;Lim, Jong Won;Kang, Dong Min;Bae, Sung Bum;Cha, Ho Young;Yang, Jeon Wook;Lee, Hyeong Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.1
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    • pp.16-20
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    • 2020
  • In this study, a patterning method using self-aligned nanostructures was introduced to fabricate GaN-based fin-gate HEMTs with normally-off operation, as opposed to high-cost, low-productivity e-beam lithography. The honeycomb-shaped fin-gate channel width is approximately 40~50 nm, which is manufactured with a fine width using a proposed method to obtain sufficient fringing field effect. As a result, the threshold voltage of the fabricated device is 0.6 V, and the maximum normalized drain current and transconductance of Gm are 136.4 mA/mm and 99.4 mS/mm, respectively. The fabricated devices exhibit a smaller sub-threshold swing and higher Gm peak compared to conventional planar devices, due to the fin structure of the honeycomb channel.

Characteristics of Barium Hexaferrite Nanoparticles Prepared by Temperature-Controlled Chemical Coprecipitation

  • Kwak, Jun-Young;Lee, Choong-Sub;Kim, Don;Kim, Yeong-Il
    • Journal of the Korean Chemical Society
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    • v.56 no.5
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    • pp.609-616
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    • 2012
  • Ba-ferrite ($BaFe_{12}O_{19}$) nanoparticles were synthesized by chemical coprecipitation method in an aqueous solution. The particle size and the crystallization temperature of the Ba-ferrite nanoparticles were controlled varying the precipitation temperature. The precipitate that was prepared at $0^{\circ}C$ showed the crystal structure of Ba-ferrite in X-ray diffraction when it was calcined at the temperature above $580^{\circ}C$, whereas what was prepared at $50^{\circ}C$ showed the crystallinity when it was calcined at the temperature higher than about $700^{\circ}C$. The particle sizes of the synthesized Ba-ferrite were in a range of about 20-30 nm when it was prepared by being precipitated at $0^{\circ}C$ and calcined at $650^{\circ}C$. When the precipitation temperature increased, the particle size also increased even at the same calcination temperature. The magnetic properties of the Ba-ferrite nanoparticles were also controlled by the synthetic condition of precipitation and calcination temperature. The coercive force could be appreciably lowered without a loss of saturation magnetization when the Ba-ferrite nanoparticles were prepared by precipitation and calcination both at low temperatures.

A Newly Designed Contact Profiler for Microstructure (새로운 구조의 접촉식 미세구조 프로필러)

  • Choi, Dong-Jun;Choi, Jai-Seong;Choi, In-Mook;Kim, Soo-Hyun
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.3
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    • pp.39-45
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    • 2002
  • A simple and low cost stylus profiler made of ferrite cores is developed. The devised profiler consists of a contact probe, a measuring transducer, a signal processing unit, and a motorized stage. The contact probe attached to 4-bar spring maintains sufficient stiffness to protect disturbances. An overlap-area type inductive position sensing system is selected as a measuring transducer, which has high sensitivity, repeatability and linearity. The transducer is composed of coil bundles and ferrite cores which have good electromagnetic characteristics in spite of low cost. The repeatability of the profiler with the proposed inductive sensing system is better than 50nm. Experimental results are shown that the proposed profiler can measure the line or 3D profile of an object with sub-micron features.

Folate-Targeted Nanostructured Lipid Carriers (NLCs) Enhance (Letrozol) Efficacy in MCF-7 Breast Cancer Cells

  • Sabzichi, Mehdi;Mohammadian, Jamal;Khosroushahi, Ahmad Yari;Bazzaz, Roya;Hamishehkar, Hamed
    • Asian Pacific Journal of Cancer Prevention
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    • v.17 no.12
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    • pp.5185-5188
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    • 2016
  • Objective: Targeted-drug-delivery based lipid nanoparticles has emerged as a new and effective approach in cancer chemotherapy. Here, we investigated the ability of folate-modified nanostructured lipid carriers (NLCs) to enhance letrozol (LTZ) efficacy in MCF-7 breast cancer cells. Methods: New formulations were evaluated regarding to particle size and scanning electron microscope (SEM) features. Anti-proliferative effects of LTZ loaded nanoparticles were examined by MTT assay. To understand molecular mechanisms of apoptosis and cell cycle progression, flow cytometric assays were applied. Results: Optimum size of nanoparticles was obtained in mean average of $98{\pm}7nm$ with a poly dispersity index (PDI) of 0.165. The IC50 value was achieved for LTZ was $2.2{\pm}0.2{\mu}M$. Folate-NLC-LTZ increased the percentage of apoptotic cells from 24.6% to 42.2% compared LTZ alone (p<0.05). Furthermore, LTZ loaded folate targeted NLCs caused marked accumulation of cells in the subG1 phase. Conclusion: Taken together, our results concluded that folate targeted LTZ can be considered as potential delivery system which may overcome limitations of clinical application of LTZ and improve drug efficacy in tumor tissue.

Comparison of Slotted and Slotless Ring-wound PM Brushless Machines for Electro-Mechanical Battery (EMB용 전동발전기 선정을 위한 슬롯형과 슬롯리스 Ring-wound형 영구자석 브러시리스 기기의 특성 비교)

  • Jang, Seok-Myeong;Jeong, Sang-Sub;Ryu, Dong-Wan;Choi, Sang-Kyu
    • The Transactions of the Korean Institute of Electrical Engineers B
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    • v.50 no.3
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    • pp.107-114
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    • 2001
  • Electro-mechanical battery (EMB) consists of a high-speed fly wheel with an integral motor/ generator suspended on magnetic bearings and in an evacuated housing. Permanent magnet (PM) machines as the EMB motor/ generator are a popular choice, since there are no excitation losses which means substantial increase in the efficiency. In this paper we present the comparison of conventional slotted and slotless ring-wound types, aimed at EMB and other high-speed drives. We firstly discuss the topology of each machine for this particular application. these machines are primarily designed as 1kW two-pole PM generator with the rated speed of 40000 rpm. the motoring torque of 0.51 Nm has to be enough to accelerate the flywheel to the rated speed. We then present the comparison of the open-circuit field, the armature reaction field and winding inductance. next we analyze the induced voltage and the developed torque per unit stack length and unit weight of different machines. Finally, we estimate and compare the losses and the efficiency at motoring and generating modes.

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Manufacturing of Ag Nano-particle Ink-jet Printer and the Application into Metal Interconnection Process of Si Solar Cells (Si 태양전지 금속배선 공정을 위한 나노 Ag 잉크젯 프린터 제작 및 응용)

  • Lee, Jung-Tack;Choi, Jae-Ho;Kim, Ki-Wan;Shin, Myoung-Sun;Kim, Keun-Joo
    • Journal of the Semiconductor & Display Technology
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    • v.10 no.2
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    • pp.73-81
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    • 2011
  • We manufactured the inkjet printing system for the application into the nano Ag finger line interconnection process in Si solar cells. The home-made inkjet printer consists of motion part for XY motion stage with optical table, head part, power and control part in the rack box with pump, and ink supply part for the connection of pump-tube-sub ink tanknozzle. The ink jet printing system has been used to conduct the interconnection process of finger lines on Si solar cell. The nano ink includes the 50 nm-diameter. Ag nano particles and the viscosity is 14.4 cP at $22^{\circ}C$. After processing of inkjet printing on the finger lines of Si solar cell, the nano particles were measured by scanning electron microscope. After the heat treatment at $850^{\circ}C$, the finger lines showed the smooth surface morphology without micropores.

Effects of Citrate-capped Silver Nanoparticles on the Blood Coagulation and Platelet Aggregation in Rats (랫드의 혈액응고 및 혈소판 응집에 미치는 은나노 입자의 영향)

  • Lee, Yeonjin;Park, Kwangsik
    • YAKHAK HOEJI
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    • v.56 no.6
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    • pp.382-389
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    • 2012
  • Effects of citrate-capped silver nanoparticles (AgNPs) on the blood coagulation and platelet aggregation were investigated using whole blood, platelet rich plasma (PRP) and washed platelet obtained from SD male rats. To confirm the stability of AgNPs in the test, size distribution of the nanoparticles was measured in the vehicles including distilled water, serum, and platelet buffers. The average size of AgNPs was 20 nm in the vehicles, which means that the stability was maintained during the whole experimental period. When blood coagulation was monitored by using whole blood impedance aggregometer, coagulation was not observed at the concentration of 1, 10 and 50 ppm. Platelets in plasma or in buffer were not aggregated by AgNPs at the concentration of 1, 2 and 4 ppm, respectively. The test concentration of AgNPs could not be increased because the dark color of the nanoparticles impeded the transmission of light, which is an indicator of aggregation. Although the blood or platelets were pre-activated by collagen, thrombin, or ADP with sub-threshold level, aggregation was not observed at the test concentration. Microscopic observation also supported the result obtained by the aggregometer.

Enhanced 2-Chorophenol Photodecomposition using Nano-Sized Mn-incorporated TiO2 Powders Prepared by a Solvothermal Method

  • Kim, Dongjin;Im, Younghwan;Jeong, Kyung Mi;Park, Sun-Min;Um, Myeong-Heon;Kang, Misook
    • Bulletin of the Korean Chemical Society
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    • v.35 no.8
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    • pp.2295-2298
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    • 2014
  • To effectively destruct 2-chlorophenol, a representative sterile preservative, nanometer-sized Mn (0.5, 1.0, 3.0 mol %)-incorporated $TiO_2$ powders were synthesized by a solvothermal method. XRD result demonstrated that the Mn ingredients were perfectly inserted into $TiO_2$ framework. The Mn-$TiO_2$ particles exhibited an anatase structure with a particle size of below 20 nm. The absorbance was shifted to the higher wavelength on Mn-$TiO_2$ compared to that of $TiO_2$. Otherwise, the PL intensities which has a close relationship for recombination between holes and electrons significantly decreased on Mn-$TiO_2$. The photodecomposition for 2-chlorophenol in a liquid system was enhanced over Mn-doped $TiO_2$ compared with pure $TiO_2$: 2-chlorophenol of 50 ppm was completely decomposed after 12 h when 1.0 mol % Mn-$TiO_2$ was used. Consequently, the core of this paper is as follows. introducing Mn into $TiO_2$ framework reduced the band-gap, moreover, it played as an electron capture resulted to lower recombination between electrons and holes during photocatalytic reaction for removal of 2-cholophenol.