Fabrication of Multi-Fin-Gate GaN HEMTs Using Honeycomb Shaped Nano-Channel
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Kim, Jeong Jin
(Electronics and Telecommunications Research Institute)
Lim, Jong Won (Electronics and Telecommunications Research Institute) Kang, Dong Min (Electronics and Telecommunications Research Institute) Bae, Sung Bum (Electronics and Telecommunications Research Institute) Cha, Ho Young (Metamaterial Electronic Device Research Center, Hongik University) Yang, Jeon Wook (School of Semiconductor and Chemical Engineering, Chonbuk National University) Lee, Hyeong Seok (Electronics and Telecommunications Research Institute) |
1 | F. Lee, L. Y. Su, C. H. Wang, Y. R. Wu, and J. Huang, IEEE Electron Device Lett., 36, 232 (2015). [DOI: https://doi.org/10.1109/led.2015.2395454] DOI |
2 | K. S. Kim, Jpn. J. Appl. Phys., 56, 091002 (2017). [DOI:https://doi.org/10.7567/jjap.56.091002] DOI |
3 | D. Song, J. Liu, Z. Cheng, W.C.W. Tang, K.M. Lau, and K. J. Chen, IEEE Electron Device Lett., 28, 189 (2007). [DOI: https://doi.org/10.1109/led.2007.891281] DOI |
4 | P. Fiorenza, G. Greco, E. Schiliro, F. Iucolano, R. L. Nigro, and F. Roccaforte, Jpn. J. Appl. Phys., 57, 050307 (2018). [DOI: https://doi.org/10.7567/jjap.57.050307] DOI |
5 | S. Nakazawa, N. Shiozaki, N. Negoro, N. Tsurumi, Y. Anda, M. Ishida, and T. Ueda, Jpn. J. Appl. Phys., 56, 091003 (2017). [DOI: https://doi.org/10.7567/jjap.56.091003] DOI |
6 | Y. W. Jo, D. H. Son, C. H. Won, K. S. Im, J. H. Seo, I. M. Kang, and J. H. Lee, IEEE Electron Device Lett., 36, 1008 (2015). [DOI: https://doi.org/10.1109/led.2015.2466096] DOI |
7 | K. S. Im, H. S. Kang, J. H. Lee, S. J. Chang, S. Cristoloveanu, M. Bawedin, and J. H. Lee, Solid-State Electron., 97, 66 (2014). [DOI: https://doi.org/10.1016/j.sse.2014.04.033] DOI |
8 | G. Hu, H. Qiang, S. Hu, R. Liu, L. Zheng, and X. Zhou, Jpn. J. Appl. Phys., 56, 021002 (2017). [DOI: https://doi.org/10.7567/jjap.56.021002] DOI |
9 | J. H. Lim, J. J. Kim, K. H. Shim, and J. W. Yang, J. Korean Inst. Electr. Electron. Mater. Eng., 17, 71 (2013). [DOI: https://doi.org/10.7471/ikeee.2013.17.1.071] |
10 | G. S. Kim, D. J. Kim, J. H. Hyung, M. K. Lee, and S. K. Lee, Anal. Chem., 86, 5330 (2014). [DOI: https://doi.org/10.1021/ac5001916] DOI |
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