1 |
Jeff Donnelly, Winston Sze, 'Stylus profilers in AMLCD manufacturing,' Solid State Technology, JUNE, pp. 157-160, 1996
|
2 |
Jeffrey B et al, 'Stylus NanoProfilometry: A new approach to CD metrology,' Solid State Technology, June, pp. 45-53, 1999
|
3 |
V.B. Badami, S.T. Smith, et al, 'A portable three-dimensional stylus profile measuring instrument,' Precision Engineering, Vol. 18, pp. 147-156, 1996
DOI
ScienceOn
|
4 |
熊田毅史, 三井公之, 中暢和雄, 生田日英幸, '粗微動連動制微による表面租さ測定に關する硏究,' 精密工學會誌, Vol. 63, No. 10, pp. 1439-1443, 1997
|
5 |
K. C. Fan, C. Y. Lin and L. H. Shyu, 'The development of a low-cost focusing probe for profile measurement,' Meas. Sci. Technol. 11, N1-N7, 2000
DOI
ScienceOn
|
6 |
최동준, 최인묵, 김수현, '인덕턴스형 미소 변위 측정 시스템과 응답 특성의 분석,' 한국정밀공학회지, 제 18 권, 제 3 호, pp. 189-194, 2001
과학기술학회마을
|
7 |
E. C. Teague, F. E. Scire, S. M. Baker and S. W. Jensen, 'Three-dimensional stylus profilometry,'Wear, Vol. 83, pp. 1-12, 1982
DOI
ScienceOn
|
8 |
Euan Morrison, 'The development of a prototype high-speed stylus profilometer and its application to rapid 3D surface measurement,' Nanotechnology 7, pp. 37-42, 1996
DOI
ScienceOn
|
9 |
Dong-June Choi and Soo Hyun Kim, 'Flexible Inductive Transducer with Magnetic Resistance Influenced by Variable Overlap Area,' Jpn. J. Appl. Phys. Vol. 40, pp. 5153-5158, 2001
DOI
|
10 |
Barry E Jones, 'Sensors in industrial metrology,' J. Phys. E: Sci. Instrum., Vol. 20, pp. 1113-1126, 1987
DOI
ScienceOn
|
11 |
Web site, http://www.tencor.com
|
12 |
Euan Morrison, 'A Prototype Scanning Stylus Profilometer for Rapid Measurement of Small Surface Areas,' Int. J. Mach. Tools Manufact., Vol. 35, No. 2, pp. 352-331, 1995
DOI
ScienceOn
|
13 |
R. Nicolaides, et al, 'Scanning tunneling microscope tip structures,' J. Vac. Sci. Technol., A. Vol. 6, No. 2, pp. 445-447, 1988
DOI
|
14 |
Web site: http://www.renishaw.com
|
15 |
Web site, http://www.taylor-hobson.com
|
16 |
D. K. Biegelsen, F. A. Ponce and J. C. Tranomtana and S. M. Koch, 'Ion milled tips for scanning tunneling microscopy,' Appl. Phys. Lett. Vol. 50, No. 11, pp. 696-698, 187
DOI
|
17 |
Web site, http://www.veeco.com
|