• Title/Summary/Keyword: Structured illumination

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Endoscopic Precise 3D Surface Profiler Based on Continuously Scanning Structured Illumination Microscopy

  • Park, Hyo Mi;Joo, Ki-Nam
    • Current Optics and Photonics
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    • v.2 no.2
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    • pp.172-178
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    • 2018
  • We propose a precise 3D endoscopic technique for medical and industrial applications. As the 3D measuring principle, the continuously scanning structured illumination microscopy (CSSIM), which enables to obtain 3D sectional images by the synchronous axial scanning of the target with the lateral scanning of the sinusoidal pattern, is adopted. In order to reduce the size of the probe end, the illumination and detection paths of light are designed as coaxial and a coherent imaging fiber bundle is used for transferring the illumination pattern to the target and vice versa. We constructed and experimentally verified the proposed system with a gauge block specimen. As the result, it was confirmed that the 3D surface profile was successfully measured with $16.1{\mu}m$ repeatability for a gauge block specimen. In order to improve the contrast of the sinusoidal illumination pattern reflected off on the target, we used polarizing optical components and confirmed that the visibility of the pattern was suitable in CSSIM.

Illumination Invariant Ranging Sensor Based on Structured Light Image (조명잡음에 강인한 구조광 영상기반 거리측정 센서)

  • Shin, Jin;Yi, Soo-Yeong
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.24 no.12
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    • pp.122-130
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    • 2010
  • This paper presents an active ranging system based on laser structured-light image. The structured-light image processing is computationally efficient in comparison with the conventional stereo image processing, since the burdensome correspondence problem is avoidable. In order to achieve robustness against environmental illumination noise, an efficient image processing algorithm, i.e., integration of difference images with structured-light modulation is proposed. Distance equation from the measured structured light pixel distance and system parameter calibration are addressed in this paper. Experiments and analysis are carried out to verify performance of the proposed ranging system.

Development of Structured Hybrid Illumination System and Optimum Illumination Condition Selection for Detection of Surface Defects on Silicon Wafer in Solar Cell (태양전지 실리콘 웨이퍼의 표면결함 검출을 위한 구조적 하이브리드 조명시스템의 개발 및 최적 조건 선정)

  • An, Byung-In;Kim, Gyung-Bum
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.5
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    • pp.505-512
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    • 2012
  • In this study, an inspection system based on an optical scanning mechanism is developed for the inspection of silicon wafers in solar cells. In particular, a structured hybrid illumination system that can satisfy the illumination requirement for the detection of various defects is designed. In the hybrid illumination system, the optimum illumination conditions are selected by considering the design of experiment in master glass and silicon wafer. The illumination conditions available are B-high, BG-high, BR-high, and BGR-high for master glass and R-middle-B-medium for silicon wafers. By using the illumination conditions for silicon wafers, numerous surface defects like pinhole, scratch, and chipping, can be accurately detected. The hybrid illumination system is expected to be widely used for the inspection of silicon wafers in solar cells.

Simultaneous Estimation of Spatial Frequency and Phase Based on an Improved Component Cross-Correlation Algorithm for Structured Illumination Microscopy

  • Zhang, Yinxin;Deng, Jiajun;Liu, Guoxuan;Fei, Jianyang;Yang, Huaidong
    • Current Optics and Photonics
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    • v.4 no.4
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    • pp.317-325
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    • 2020
  • Accurate estimation of spatial frequencies and phases for illumination patterns are essential to reconstructing super-resolution images in structured illumination microscopy (SIM). In this manuscript, we propose the improved component cross-correlation (ICC) algorithm, which is based on optimization of the cross-correlation values of the overlapping information between various spectral components. Compared to other algorithms for spatial-frequency and phase determination, the results calculated by the ICC algorithm are more accurate when the modulation depths of the illumination patterns are low. Moreover, the ICC algorithm is able to calculate the spatial frequencies and phases simultaneously. Simulation results indicate that even if the modulation depth is lower than 0.1, the ICC algorithm still estimates the parameters precisely; the images reconstructed by the ICC algorithm are much clearer than those reconstructed by other algorithms. In experiments, our home-built SIM system was used to image bovine pulmonary artery endothelial (BPAE) cells. Drawing support from the ICC algorithm, super-resolution images were reconstructed without artifacts.

Profilometry based on Structured Illumination with Hypercentric Optics (하이퍼센트릭 광학계를 이용한 구조 조명 형상 측정 방법)

  • Kim, Sungmin;Cho, Minguk;Lee, Maengjin;Hahn, Joonku
    • Journal of Institute of Control, Robotics and Systems
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    • v.19 no.12
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    • pp.1089-1093
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    • 2013
  • Depth extraction using the structured illumination method is popularly applied since it has the benefit of measuring the object without contact. With multiple spatial frequencies and phase-shifting techniques, it is possible to extract the depth of objects with large discontinuity. For applications such as 3D (Three Dimensional) displays, 3D information of the object is required and is useful if corresponding to each view of the display. For this purpose, hypercentric optics is appropriate to measure the depth information of an object with a large field of view that is applicable for a 3D display. By experiment, we present the feasibility for phase-shifting profilometry using hypercentric optics to obtain the depth information of an object with the field of view appropriate for a 3D display.

Development of Inspection System With Optical Scanning Mechanism and Near-Infrared Camera Optics for Solar Cell Wafer (광학스캐닝 메커니즘 및 근적외선 카메라 광학계를 이용한 태양전지 웨이퍼 검사장치 개발)

  • Kim, Gyung Bum
    • Journal of the Semiconductor & Display Technology
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    • v.11 no.3
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    • pp.1-6
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    • 2012
  • In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

Development of Ranging Sensor Based on Laser Structured Light Image (레이저 구조광 영상기반 거리측정 센서 개발)

  • Kim, Soon-Cheol;Yi, Soo-Yeong
    • Journal of Institute of Control, Robotics and Systems
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    • v.21 no.4
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    • pp.309-314
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    • 2015
  • In this study, an embedded ranging system based on a laser structured light image is developed. The distance measurement by the structured light image processing has efficient computation because the burdensome correspondence problem is avoidable. In order to achieve robustness against environmental illumination noise and real-time laser structured light image processing, a bandpass optical filter is adopted in this study. The proposed ranging system has an embedded image processor performing the whole image processing and distance measurement, and so reduces the computational burden in the main control system. A system calibration algorithm is presented to compensate for the lens distortion.

Development of Omnidirectional Ranging System Based on Structured Light Image (구조광 영상기반 전방향 거리측정 시스템 개발)

  • Shin, Jin;Yi, Soo-Yeong
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.5
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    • pp.479-486
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    • 2012
  • In this paper, a ranging system is proposed that is able to measure 360 degree omnidirectional distances to environment objects. The ranging system is based on the structured light imaging system with catadioptric omnidirectional mirror. In order to make the ranging system robust against environmental illumination, efficient structured light image processing algorithms are developed; sequential integration of difference images with modulated structured light and radial search based on Bresenham line drawing algorithm. A dedicated FPGA image processor is developed to speed up the overall image processing. Also the distance equation is derived in the omnidirectional imaging system with a hyperbolic mirror. It is expected that the omnidirectional ranging system is useful for mapping and localization of mobile robot. Experiments are carried out to verify the performance of the proposed ranging system.

Omnidirectional Distance Measurement based on Active Structured Light Image (능동 구조광 영상기반 전방향 거리측정)

  • Shin, Jin;Yi, Soo-Yeong;Hong, Young-Jin;Suh, Jin-Ho
    • Journal of Institute of Control, Robotics and Systems
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    • v.16 no.8
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    • pp.751-755
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    • 2010
  • In this paper, we proposed an omnidirectional ranging system that is able to obtain $360^{\circ}$ all directional distances effectively based on structured light image. The omnidirectional ranging system consists of laser structured light source and a catadioptric omnidirectional camera with a curved mirror. The proposed integro-differential structured light image processing algorithm makes the ranging system robust against environmental illumination condition. The omnidirectional ranging system is useful for map-building and self-localization of a mobile robot.