• Proceedings of the KIEE Conference
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• 1998.07d
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• pp.1540-1542
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• 1998

This paper presents the deposition and anneling characteristics of Cr thin film strain gaugs, which were deposited on glass by DC magnetron sputtring. The optimzed deposition conditions of Cr thin films were the input DC power, 7 W/$cm^2$ and the Ar vacuuming pressure, 9 mTorr, GF, TCR and TCS of Cr thin film strain gauges were 5.86, 400 ppm/$^{\circ}C$ and $\approx$0 ppm/$^{\circ}C$ respectively. The anneling conditions were investigated with the thinkness rang (1200 $\sim$ 3500$\AA$) of Cr thin films, anneling temperature (100 $\sim$ $300^{\circ}C$) and anneling time (24 $\sim$ 72hr). The maximum resistivity and the minimum TCR value were 1757.03 ${\mu}{\Omega}$cm, -194.07 ppm/$^{\circ}C$, respectively.

• Transactions on Electrical and Electronic Materials
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• v.11 no.3
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• pp.130-133
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• 2010

A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ($R^2$) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.

• Proceedings of the KIEE Conference
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• 2015.07a
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• pp.1235-1236
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• 2015

This paper reports hyperelastically stretchable strain gauges based on liquid metal (eutectic gallium-indium;EGaIn) and a platinum-catalyzed silicone elastomer ($Ecoflex^{TM}$). A custom liquidmetal patterning setup was operated to fabricate liquidmetal straingauge on flexible substrate. The printed strain gauges were tested under cyclic uniaxial stretching, twisting, even bending of human finger. By engineering the orientation of solid wires placed over two terminals of t he printed liquid metal resistor, we stably achieved the stretchability of ~800 % which is the highest value reported so far, to the best of our knowledge.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.9
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• pp.790-794
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• 2003

This paper describes the fabrication and characteristics of ceramic thin film type pressure sensors based on Ta-N strain gauges for high temperature applications. Ta-N thin-film strain gauges are deposited onto a thermally oxidized Si diaphragm by RF sputtering in an argon-nitrogen atmos[here($N_2$ gas ratio: 8%, annealing condition: 90$0^{\circ}C$, 1 hr.), patterned on a wheatstone bridge configuration, and used as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is 1.097 ～ 1.21 mV/Vㆍkgf/$\textrm{cm}^2$ in the temperature range of 25 ～ 200 $^{\circ}C$ and the maximum non-linearity resistance), non-linearity than existing Si piezoresistive pressure sensors. The fabricated ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that os operable under high-temperature.

• Journal of Industrial Technology
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• v.30 no.A
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• pp.89-93
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• 2010

This research suggested a development of a Data Acquisition System for strain gauge sensor which enables the usage of portable device in the various engineering field that includes, a strain indicator which is frequently used in civil and mechanical engineering, and a GUI function of data acquisition device. The developed system can record 16 channels of strain gauges at a time and its resolution is over 16 bits which can be used effectively in the actual field.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.5A
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• pp.901-908
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• 2006

The structural integrity of containment building in Nuclear Power Plants has to be verified by the ISI(In Service Inspection) because there are some variations on the structural behavior of it due to the change of the physical properties of concrete and tendon with the lapse of time. In this study, the program 'SAPONC-CANDU' which can monitor and analyze the structural behavior of the containment building with grouted tendon (CANDU-type, 'Wolsong unit-2, 3, and 4' in Korea) was developed. This program is based on the algorithm which can calculate the prediction values of the quantities of strain variation for the vibrating-wire strain gauges embedded into the concrete of the containment building under temperature and time dependent factors which are creep, shrinkage, and prestressing force. The readings of the strain gauges are used as input data for the operation of the program. And it finally provides graphically a prediction value, line and band of the quantity of strain variation for the respective strain gauges, therefore, it is thought that the site engineers are able to assess the structural integrity of the domestic containment building with grouted tendon with easy using this program.

• Journal of Advanced Marine Engineering and Technology
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• v.40 no.4
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• pp.288-294
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• 2016

In modern ships, the shafting system often becomes stiff owing to the high engine power, whereas the hull structure becomes more flexible owing to optimization using high-tensile-strength thick steel plates; therefore, more sophisticated shaft alignments are required. In this study, strain gauge-based measurement was conducted under five vessel operating conditions and bearing reaction forces and hull deflections affecting shaft alignment were analyzed for a 50,000 dead weight tonnage oil/chemical tanker that has gained repute as an eco-friendly vessel in recent years. Furthermore, the analytical results from each technique-theoretical calculation, jacking ups, and strain gauges-were cross-checked against each other in order to enhance the degree of accuracy and reliability of the calculation.

• Tunnel and Underground Space
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• v.19 no.6
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• pp.567-582
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• 2009

The world's largest nucleon decay experiment facility is constructed at a depth of approximately 1,000meters, in the Kamioka mine, Japan. Because of the character as a large cavern in deep underground, in-situ stress measurements were conducted to provide basic information for design of the cavern. Three overcoring methods were used: 8-element embedding gauges developed by Japanese Central Research Institute of Electric Power Industry, hemispherical ended borehole technique with eight strain cross-gauges, and Hollow Inclusion Cell with 12 strain gauges. The principle stresses were not perfectly similar in each measurement. The average values of the 6 stress element were used to provide the direction and the magnitude of three principle stress.

• Smart Structures and Systems
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• v.21 no.4
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• pp.407-420
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• 2018

In structural health monitoring, it is meaningful to comprehensively utilize accelerometers and strain gauges to obtain the modal information of a structure. In this paper, a modal estimation theory is proposed, in which the displacement modes of the locations without accelerometers can be estimated by the strain modes of selected strain gauge measurements. A two-stage sensor placement method, in which strain gauges are placed together with triaxial accelerometers to obtain more structural displacement mode information, is proposed. In stage one, the initial accelerometer locations are determined through the combined use of the modal assurance criterion and the redundancy information. Due to various practical factors, however, accelerometers cannot be placed at some of the initial accelerometer locations; the displacement mode information of these locations are still in need and the locations without accelerometers are defined as estimated locations. In stage two, the displacement modes of the estimated locations are estimated based on the strain modes of the strain gauge locations, and the quality of the estimation is seen as a criterion to guide the selection of the strain gauge locations. Instead of simply placing a strain gauge at the midpoint of each beam element, the influence of different candidate strain gauge positions on the estimation of displacement modes is also studied. Finally, the modal assurance criterion is utilized to evaluate the performance of the obtained multitype sensor placement. A bridge benchmark structure is used for a numerical investigation to demonstrate the effectiveness of the proposed multitype sensor placement method.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.4
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• pp.391-398
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• 2010

In this paper, we propose a sensor design by using a polysilicon strain gauge bonded to a metal diaphragm. The fabrication process of the thin polysilicon strain gauges having thicknesses of $50\;{\mu}m$ was established using conventional MEMS technologies; further, the technique of glass frit bonding of the polysilicon strain gauge to the stainless steel diaphragm was established. Performance of the polysilicon strain gauge bonded to the metal cantilever beam was evaluated. The gauge factor, temperature coefficient of resistance (TCR), nonlinearity, and hysteresis of the polysilicon strain gauge were measured. The results demonstrate that the resistance increases linearly with tensile stress, while it decreases with compressive stress. The value of the gauge factor, which represents the sensitivity of strain gauges, is 34.0; this value is about 7.15 times higher than the gauge factor of a metal-foil strain gauge. The resistance of the polysilicon strain gauge decreases linearly with an increase in the temperature, and TCR is $-328\;ppm/^{\circ}C$. Further, nonlinearity and hysteresis are 0.21 % FS and 0.17 % FS, respectively.