Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.07d
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- Pages.1540-1542
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- 1998
Anneling Characteristics of Chromium Thin Film Strain Gauges
크롬박막 스트레인 게이지의 열처리 특성
- Kang, Kyung-Doo (Dongseo University) ;
- Kim, Sun-Cheol (Kyungnam Imformation College) ;
- Park, Jeong-Do (Kyungnam Imformation College) ;
- Chung, Gwiy-Sang (Dongseo University)
- Published : 1998.07.20
Abstract
This paper presents the deposition and anneling characteristics of Cr thin film strain gaugs, which were deposited on glass by DC magnetron sputtring. The optimzed deposition conditions of Cr thin films were the input DC power, 7 W/
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