• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.237.1-237.1
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• 2014

Etching is one of the most important steps in semiconductor manufacturing. In etch process control a critical task is to stop the etch process when the layer to be etched has been removed. If the etch process is allowed to continue beyond this time, the material gets over-etched and the lower layer is partially removed. On the other hand if the etch process is stopped too early, part of the layer to be etched still remains, called under-etched. Endpoint detection (EPD) is used to detect the most accurate time to stop the etch process in order to avoid over or under etch. The goal of this research is to develop a hardware and software system for EPD. The hardware consists of an Optical Plasma Monitor (OPM) sensor which is used to continuously monitor the plasma optical emission intensity during the etch process. The OPM software was developed to acquire and analyze the data to perform EPD. Our EPD algorithm is based on the following theory. As the etch process starts the plasma generated in the vacuum is added with the by-products from the etch reactions on the layer being etched. As the endpoint reaches and the layer gets completely removed the plasma constituents change gradually changing the optical intensity of the plasma. Although the change in optical intensity is not apparent, the difference in the plasma constituents when the endpoint has reached leaves a unique signature in the data gathered. Though not detectable in time domain, this signature could be obscured in the frequency spectrum of the data. By filtering and analysis of the changes in the frequency spectrum before and after the endpoint we could extract this signature. In order to do that, first, the EPD algorithm converts the time series signal into frequency domain. Next the noise in the frequency spectrum is removed to look for the useful frequency constituents of the data. Once these useful frequencies have been selected, they are monitored continuously in time and using a sub-algorithm the endpoint is detected when significant changes are observed in those signals. The experiment consisted of three kinds of etch processes; ashing, SiO2 on Si etch and metal on Si etch to develop and evaluate the EPD system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.8
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• pp.843-849
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• 2009

The reliable operation of a swing check valve in the main feed water system of a power plant is most essential for successful shout-down process. A failure to close the valve at proper time often leads to the instability of the main feed water system, or even to an emergency stop of the power plant. In reality it is a very difficult task to monitor the behavior of a swing check valve. Furthermore it is impossible to see the motion of the valve. In this work two measurements were carried out simultaneously to determine the precise valve closure time. The dynamic pressure measurements were made at the inlet and outlet regions of the swing check valve. The transient vibration of the valve housing in the direction of water flow was also measured, which enabled the measurement of the transient vibration of the valve housing near valve closure. By comparing the results produced from these measurements the precise valve closure time could be determined. By carrying out order tracking technique using the dynamic pressure signals and pump rpm signal, the complicated dynamic problems inside the main feed water system can be more easily dealt with. This measurement scheme might be implemented in a power plant on a real-time basis without much difficulty. If this could be implemented, valuable information essential for shut-down operations can readily be passed on to the main control room. The feasibility of this implementation was demonstrated by this experimental work.

• Journal of the Korea Society of Computer and Information
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• v.19 no.10
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• pp.55-62
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• 2014

In the intelligent video surveillance system, moving objects generally are detected by calculating difference between background and input image. However formation of reliable background is known to be still challenging task because it is hard to cope with the complicated background. In this paper we propose an adaptive background formation algorithm considering stationary object. At first, the initial background is formed by averaging the initial N frames. Object detection is performed by comparing the current input image and background. If the object is at a stop for a long time, we consider the object as stationary object and background is replaced with the stationary object. On the other hand, if the object is a moving object, the pixels in the object are not reflected for background modification. Because the proposed algorithm considers gradual illuminance change, slow moving object and stationary object, we can form background adaptively and robustly which has been shown by experimental results.

• Journal of rehabilitation welfare engineering & assistive technology
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• v.6 no.1
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• pp.17-27
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• 2012

This study provides development information on Omni-Wheel Drive Rider Robot, futuristic electric scooters, with autonomous driving systems that are used for people including the disabled and senior. Also, it is meaningful in suggesting alternatives to replace motorized wheelchairs or electric scooters for the future. Prior to development of Omni-Wheel Drive Rider Robot with autonomous driving systems, it surveyed 49 people, including 18 people who own electric scooters and 31 senior people who have not. The summary of the survey is as follows. First, inconveniences during riding and exiting and short mileage due and safety driving to problems of recharging batteries are the most urgent task. For these problems, the study shows that charging time of batteries, mileage, armrests, footrests, angle of a seat are the primary considerations. Second, drivers prefer joystick over steering wheels because of convenience in one-handed driving against dangers from footrest and carriageways sloping roads, paving blocks. One-handed driving can reduce driving fatigues with automatic stop systems. Moreover, the study suggests many design factors related to navigation systems, obstacle avoidance systems, omni-wheels, automatic cover-opening systems in rainy.

• Korean Journal of Applied Biomechanics
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• v.24 no.3
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• pp.287-293
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• 2014

The purpose of this study was to investigate the effects of Hoehn-Yahr scale on the activation of lower-extremity muscles during walking. Electromyography (EMG) analysis was carried out on 36 patients with Parkinson's disease in the off phase of the medication cycle. We recorded EMG signals of the tibialis anterior (TA), medial gastrocnemius (MG), lateral gastrocnemius (LG), soleus (SOL), rectus femoris (RF), vastus lateralis (VL), semitendinosus (ST) and biceps femoris (BF) using Noraxon 16 channels EMG system during walking at preferred speed. Rectified EMG signals were normalized to reference voluntary contractions (RVC) over a gait cycle at the preferred speed, allowing for an assessment of how the activity was distributed over the gait cycle. Compared to the H & Y Scale 1, H & Y Scale 3 exhibited greater activation of the vastus lateralis during mid-stance and greater activation of the medial gastrocnemius during terminal swing. Compared to the H & Y Scale 1, H & Y Scale 2 and 3 exhibited less activation of the tibialis anterior during initial swing. We conclude that the more Hoen & Yahr Scale increase, the more abnormal lower-extremity muscles activation.

• Journal of Korean Academy of Nursing
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• v.29 no.1
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• pp.34-47
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• 1999

This study evaluated the Comparison of the Effectiveness of Pelvic Floor Muscle exercise and Biofeedback treatment for Genuine Stress Incontinence I assigned 60 participants to 2 groups : 30 to the pelvic floor muscle exercise group and 30 to the biofeedback group. Treatment protocol lasted for 6 weeks. Peak pressure, and duration time of pelvic muscle contraction were evaluated by a perineometer. Lower urinary symptoms, sexual matter and life style scores were achieved by using Jackson's scale. The treatment efficacy of the pelvic floor muscle exercise is compared with the biofeedback group and the main results of the comparison are as follows : 1. Pelvic muscle contraction 1) The peak pressure in the biofeedback group was significantly increased(P＝0.000). 2. The frequency and quantity of incontinence 1) The frequency of incontinence in the biofeedback group was significantly decreased(P＝0.000). 2) The quantity of incontinence in the biofeedback group was significantly decreased(P＝0.000). 3. The lower urinary symptoms Daily frequency(P＝0.000), nocturia(P＝0.000), urgency(P＝0.000), bladder pain(P＝0.000), unexplained incontinence(P＝0.048), wearing protection(P＝0.022), changing outer clothing(P＝0.005), hesitancy(P＝0.008), intermittent stream(P＝0.000), abnormal strength of stream(P＝0.004), retention(P＝0.000), incomplete emptying(P＝0.000), and inability to stop mid stream(P＝0.006) of the lower urinary symptoms in the biofeedbatk group were significantly decreased. 4. The sexual matters The dry vagina (P＝0.004) and pain during sexual Intercourse (P＝0.002) in the biofeedback group was significantly decreased. 5. The life style The fluid intake restriction(P＝0.007), affected daily task(P＝0.003), avoidance of places & situation(P＝0.003), interference in Physical activity (P＝0.002), interference in relationship with other people(P＝0.01), and feeling about the rest of life with urinary symptom(P＝0.000) in the biofeedback group were significantly decreased. In conclusion, the biofeedback treatment was more effective than the pelvic floor muscle exercise in genuine stress incontinence.

• Journal of KIISE:Information Networking
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• v.33 no.1
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• pp.59-75
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• 2006

In this paper, we propose a congestion control scheme to control the congestion due to the mobility of ubiquitous devices on ubiquitous computing environment. Especially, this congestion control scheme provides a reverse congestion avoidance state which can classify between packet error by features of wireless network and packet dropping by congestion. Also, it provides a slow stop state which can minimize bandwidth waste due to congestion control. The proposed congestion control scheme controls more adaptive than existing congestion control schemes. The proposed congestion control scheme is designed based on DCCP(Datagram Congestion Control Protocol) being proposed by IETF(Internet Engineering Task Force) and implemented on the Linux kernel. In simulation results, the proposed congestion control scheme provides good bandwidth throughput in wireless network as well as in wired network.

• Journal of the Korean Dietetic Association
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• v.27 no.4
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• pp.232-247
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• 2021

This study attempted to examine the nutrition knowledge of caregivers for the elderly and the diet-related medical treatment and dietary assistance given by them. Thus, this research is a descriptive study focusing on the current nutritional knowledge of caregivers and the dietary assistance given by them. The survey included a questionnaire (nutritional knowledge level of digestive system diseases, diabetes, cardiovascular risk, brain disease, bone disease, and meal assistance performance status) for caregivers working in nursing homes for the elderly. Self-administered questionnaires were completed by 235 caregivers between February and March 2020. The results were analyzed using the SPSS 25.0, and the significance test of each question was verified by the Friedman test and the Chi-square independence test. The number of elderly people who needed meal assistance from caregivers was 4.4 more than the average. The most common types of meal assistance were partial assistance (59.20%) and the task of when to stop eating for the elderly (58.71%). Besides, the higher nutritional knowledge level of the caregivers, the more the time spent on services related to meal assistance (P<0.001), and the higher the meal assistance level. The disease state of the elderly was considered the most relevant (P<0.001). Caregivers with high levels of knowledge and offering significant meal assistance were found to have received nutrition education (P<0.001). Up to 80% of the respondents needed nutrition education, and most of them answered that they needed education on appropriate management methods for the specific disease state of the elderly (P<0.01). Accordingly, providing nutrition education for caregivers for the elderly should be a means to improve their ability to offer meal assistance.

• International Journal of Computer Science & Network Security
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• v.22 no.5
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• pp.294-302
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• 2022

Detection of fake news is a complex and a challenging task. Generation of fake news is very hard to stop, only steps to control its circulation may help in minimizing its impacts. Humans tend to believe in misleading false information. Researcher started with social media sites to categorize in terms of real or fake news. False information misleads any individual or an organization that may cause of big failure and any financial loss. Automatic system for detection of false information circulating on social media is an emerging area of research. It is gaining attention of both industry and academia since US presidential elections 2016. Fake news has negative and severe effects on individuals and organizations elongating its hostile effects on the society. Prediction of fake news in timely manner is important. This research focuses on detection of fake news spreaders. In this context, overall, 6 models are developed during this research, trained and tested with dataset of PAN 2020. Four approaches N-gram based; user statistics-based models are trained with different values of hyper parameters. Extensive grid search with cross validation is applied in each machine learning model. In N-gram based models, out of numerous machine learning models this research focused on better results yielding algorithms, assessed by deep reading of state-of-the-art related work in the field. For better accuracy, author aimed at developing models using Random Forest, Logistic Regression, SVM, and XGBoost. All four machine learning algorithms were trained with cross validated grid search hyper parameters. Advantages of this research over previous work is user statistics-based model and then ensemble learning model. Which were designed in a way to help classifying Twitter users as fake news spreader or not with highest reliability. User statistical model used 17 features, on the basis of which it categorized a Twitter user as malicious. New dataset based on predictions of machine learning models was constructed. And then Three techniques of simple mean, logistic regression and random forest in combination with ensemble model is applied. Logistic regression combined in ensemble model gave best training and testing results, achieving an accuracy of 72%.

• Journal of Korean Library and Information Science Society
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• v.53 no.4
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• pp.101-121
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• 2022

In this study, to expand and develop the policy information portal (POINT) of the National Library of Korea Sejong. This study conducted a survey and in-depth interview with government officials and policy researchers. The suggested ways to support the policy information portal (POINT) in the future. As a result of the analysis, the use of the current policy information portal service was found to be low, and it was found that improvement of information access, integrated search, and expansion of information provision data were more necessary. It was suggested that a one-stop service should be implemented to provide various information, systematic information on related data for each task, overseas trend data, core service data, promotion activation, data linkage by strengthening cooperation with various government ministries and research institutes, and easy information provision and menu composition.