• Title/Summary/Keyword: Step filling

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Step Coverage of Laser CVD Deposited $SiO_2$ Films (Laser CVD $SiO_2$ 막의 Step Coverage에 관한 연구)

  • Park, J.W.;Kim, S.W.;Chun, Y.I.;Park, J.S.;Kang, H.B.;Sung, Y.K.
    • Proceedings of the KIEE Conference
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    • 1991.07a
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    • pp.155-157
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    • 1991
  • This paper describe a Laser CVD technology which realizes planarized interlevel dielectrics in sub-micron VLSI's. This technology comprises sub-micron gap filling with $SiO_2$ films between metal lines. Laser CVD process conditions have been investigated to improve step coverage of interlevel dielectrics. An ArF(193nm) Excimer Laser was used to excite and dissociate gas phase $SiH_4\;and\;N_2O$ molecules. The Laser CVD by $N_2O\;and \;SiH_4$. mixture gases has realized conformal deposition above the temperature of $300^{\circ}C$, as a result sub-micron gaps were buried with $SiO_2$ films.

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Cu Electroplating and Low Alpha Solder Bumping on TSV for 3-D Packaging (3차원 실장을 위한 TSV의 Cu 전해도금 및 로우알파 솔더 범핑)

  • Jung, Do hyun;Kumar, Santosh;Jung, Jae pil
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.4
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    • pp.7-14
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    • 2015
  • Research and application of three dimensional packaging technology in electronics have been increasing according to the trend of high density, high capacity and light weight in electronics. In this paper, TSV fabrication and research trend in three dimensional packaging are reported. Low alpha solder bumping which can solve the soft error problem in electronics is also introduced. In detail, this paper includes fabrication of TSV, functional layers deposition, Cu filling in TSV by electroplating using PPR (periodic pulse reverse) and 3 step PPR processes, and low alpha solder bumping on TSV by solder ball. TSV and low alpha solder bumping technologies need more studies and improvements, and the drawbacks of three dimensional packaging can be solved gradually through continuous attentions and researches.

The Fabrication Processes for the Planarization of Sacrificial Layers over Hollow Structures (Hollow Structure에서의 희생층 평탄화 제작 공정)

  • Yoon Yong-Seop;Bae Ki-Deok;Choi Hyung;Jun Chan-Bong;Ro Kwang-Choon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.10
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    • pp.546-550
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    • 2004
  • Two fabrication approaches are proposed to planarize the sacrificial layer over hollow structures. One is the photoresist filling method that makes use of photolithography, thermal curing and plasma ashing. The other is the lamination method that is applying pressure and temperature to the organic film over the hollow structures. The fabrication results are compared with those of CMP process. Trenches and cavities with various dimensions have been made for the porposed process. Upon measuring the planarization levels, they are dependent on planarization methods and the geometrical size of hollow structures. The photoresist filling method is so strongly dependent on the width and depth of trenches that we have problems to use it for large dimensional trenches. To the contrary, the flatness of sacrificial layer over the trenches was found to be almost independent of trench dimensions for the lamination method. A CMP process shows the most excellent results, but the fabrication is complicated and the access to it is not so easy. It is important to choose the proper planarization method by considering the required flatness levels, materials to be planarized, and connection between the planarization step and the previous or the following process of it.

Rapid Manufacturing of Trial Molds and Prototypes by High Speed Machining (고속가공을 이용한 시작금형 및 시작품의 쾌속제작)

  • Sin, Bo-Seong;Yang, Dong-Yeol;Choe, Du-Seon;Je, Tae-Jin;Lee, Eung-Suk;Hwang, Gyeong-Hyeon;Lee, Jong-Hyeon;J. H.
    • Journal of the Korean Society for Precision Engineering
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    • v.18 no.12
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    • pp.124-129
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    • 2001
  • Recently, life cycle and lead-time of products have been shortened with the demand of customers. Therefore, it is important to reduce time and cost at the step of manufacturing trial molds. High speed machining can be applied for this kind of purpose with a lot of practical advantages. In our research, several fundamental experiments are carried out to obtain machining parameters such as cutting force, machining time and surface characteristics for tool paths that are appropriate to high-speed machining. Moreover, a trial mold for an automatic transmission knob is fabricated with aluminum-7075 material. Using automatic set-up equipments, an ABS rapid prototype of a trial product of an AT knob is also manufactured with a filling process.

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Physical properties of novel composite using Portland cement for retro-filling material (치근단 역충전용 포틀랜드 시멘트 신복합재료의 물리적 성질 고찰)

  • Lee, Sang-Jin;Cho, Ok-In;Yum, Ji-Wan;Park, Jeong-Kil;Hur, Bock;Kim, Hyeon-Cheol
    • Restorative Dentistry and Endodontics
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    • v.35 no.6
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    • pp.445-452
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    • 2010
  • Objectives: The aim of this study was to compare apical sealing ability and physical properties of MTA, MTA - AH-plus mixture (AMTA) and experimental Portland cement - Epoxy resin mixture (EPPC) for a development of a novel retro-filling material. Materials and Methods: Forty-nine extracted roots were instrumented and filled with gutta-percha. Apical root was resected at 3 mm and the retro-filling cavity was prepared for 3 mm depth. Roots were randomly divided into 3 groups of 15 roots each. The retro-filling was done using MTA, AMTA, and EPPC as the groups divided. Four roots were used as control groups. After setting in humid condition for 24 hours, the roots were immersed in 1% methylene blue dye solution for 72 hours to test the apical leakage. After immersion, the roots were vertically sectioned and photos were taken to evaluate microleakage. Setting times were measured with Vicat apparatus and digital radiographs were taken to evaluate aluminum equivalent thickness using aluminum step wedge. The results of microleakage and setting time were compared between groups using one-way ANOVA and Scheffe's post-hoc comparison at the significance level of 95%. Results: AMTA and EPPC showed less microleakage than MTA group (p < 0.05). AMTA showed the highest radio-opacity than other groups and the novel EPPC showed 5 mm aluminum thickness radio-opacity. EPPC showed the shortest initial and final setting times than other groups while the MTA showed the longest (p < 0.05). Conclusions: Under the condition of this study, the novel composite using Portland cement-Epoxy resin mixture may useful for retro-filling with the properties of favorable leakage resistance, radio-opacity and short setting time.

Motion and sloshing analysis for new concept of offshore storage unit

  • Ha, Mun-Keun;Kim, Mun-Sung;Paik, Bu-Keun;Park, Chung-Hum
    • Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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    • 2000.10a
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    • pp.189-195
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    • 2000
  • New concept of LNG-FPSO ship with moonpool and bilge step in bottom is considered and investigated in the point of motion reduction and sloshing phenomena of the cargo and operation tanks. The cargo capacity of the ship of which principle dimensions is L x B x D x t(design) =270.0 x 51.0 x 32.32 x 13.7(m) 16K at 98% loading condition. The two moonpools and rectangular step at bilge part are setted up specially for getting the effect of motion decrease. For the motion analysis, linearized three dimensional diffraction theory with the simplified boundary conditions is used. The six-degree of freedom coupled motion responses are calculated for the LNG-FPSO ship. Viscous effects on the roll motion responses of a vessel are taken into account in this calculation program using an empirical formula suggested by Ikeda, Himeno and Tanaka is used. The case study for the moonpool size had been carried out by theoretical estimation and experimental method. For the optimization of the moonpool size and effect of the step, 9 cases of its size and with and without step are considered. From the results of calculation and experiment, it can be concluded that this designed LNG-FPSO ship have possibility to carry out her missions in the rough sea as for the owner's demand waves condition. The motion responses, especially roll motion, for the designed LNG-FPSO ship are much lower than those of another drillship and shuttle tanker and limit criterions are satisfied. For the check of the cargo tank and operation tank sizes we have performed sloshing analysis in the irregular waves which focuses on the pressure distribution on the tank wall and the time history of pressure and free surface for No.2 and No5. tanks of LNG-FPSO with chamfers. Finally we got the tank size which has no resonance and no impact pressure in all filling in the bow quartering and beam sea.

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The effects of gingival blood flow on pulpal blood flow detection using ultrasound Doppler flowmetry: animal study

  • Dohyun Kim ;Hyoung-Seok Ko;Soo-Yeon Park ;Seung-Yeon Ryu ;Sung-ho Park
    • Restorative Dentistry and Endodontics
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    • v.48 no.1
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    • pp.9.1-9.11
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    • 2023
  • Objectives: This study evaluated the effect of adjacent gingival blood flow on detection of pulpal blood flow (PBF) using ultrasound Doppler flowmetry (UDF) through animal study. Materials and Methods: The study included 36 right and left maxillary the third incisors and canines in 9 experimental dogs. The study included 2 main steps: In the first step, the pulse sound level (PSL) was recorded on the cervical part of each tooth without flap elevation (Group 1), with flap elevation (Group 2), and after it was repositioned in place (Group 3). In the second step, the PSL was recorded on the cervical part of each tooth (Group 4), after pulpotomy (Group 5), after partial pulp extirpation (Group 6), after complete extirpation (Group 7), and after canal filling (Group 8). In Groups 5-8, the study was performed with and without flap elevation in the left and right teeth, respectively. The PSL was graded as follows: 0, inaudible; 1, heard faintly; and 2, heard well. The difference between each group was analyzed using Friedman's test with Wilcoxon signed-rank tests (α = 0.05). Results: In step 1, the PSL results were Group 1 > 2 and 3. In step 2, there was no significant difference between the groups when the flap was not elevated, while PSL results were Group 4 > 5 ≥ 6 and 7 ≥ 8 when the flap was elevated. Conclusions: PBF is affected by gingival blood flow when measured with UDF. UDF measurements require isolation of gingiva from the tooth.

Plate Forging Process Design for an Under-drive Brake Piston in Automatic Transmission (자동변속기용 언더드라이브 브레이크 피스톤의 판 단조공정 개선 방안)

  • Jeon, H.W.;Yoon, J.H.;Lee, J.H.;Kim, B.M.
    • Transactions of Materials Processing
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    • v.23 no.2
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    • pp.88-94
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    • 2014
  • The under-drive brake piston is an essential part in the automatic transmissions of automobiles. This component is manufactured by forging after blanking from S55C plate with a thickness of 6mm. It is difficult to design the plate forging process using a thick plate approach since there will be limited material flow as well as large press loads. Furthermore, the under-drive brake piston has a complex shape with a right angle step, which often results in die unfill and abrupt increase in press load. To overcome these obstacles, a separate die for filling material sufficiently to the corner of the right angle step is proposed. However, this approach induces an uncontrolled workpiece surface between the dies, resulting in flash. This excess flash degrades the tool life in the final machining after cold forging as well as increases the cycle time to obtain the net-shape of the part. In the current study, we propose an optimum process design using a conventional die shaped with the benefit of finite element analysis. This approach enhanced the process efficiency without sacrificing the dimensional accuracy in the forged part. As the result, the optimum plate forging process was done with a two stage die, which reduces weight of by 6% compared with previous process for the under-drive brake piston.

DENTIN PERMEABILITY CHANCE ACCORDING TO THE PROCESS OF COMPOMER RESTORATION (컴포머 충전과정에 따른 상아질 투과도의 변화)

  • Cho, Hye-Jin;Lee, Kyung-Ha;Lee, Se-Joon;Lee, Kwang-Won
    • Restorative Dentistry and Endodontics
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    • v.27 no.4
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    • pp.382-388
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    • 2002
  • Compomer is composed of matrix and filler : matrix is made of the combination of resins and polycarboxylic molecules that are light-cured, and a filler is a glass component which is capable of ion-release. The resin content of compomers produces polymerization shrinkage which can adversely affect marginal adaptation. Pretreatment is a fundamental step which is treated with conditioner or primer in the use of these materials. Microleakage of restorative materials has been investigated mostly by dye penetration method. Dye penetration method was not quantitative and not measured repeatedly. Fluid filtration method, introduced and developed by Pashley's group, has been extensively used for 20 years for research purpose to understand the physiology of dentin, as well as the effects of various restorative treatments on dentin permeability. It permits quantitative, nondestructive measurment of microleakage in a longitudinal manner. The purpose of this study was to evaluate the change of dentin permeability according to the process of compomer restoration. In this study. Cl V cavities were prepared on buccal surface of thirty extracted human molars. The prepared cavities were etched by 37% phosphoric acid. The experimental teeth were randomly divided into three groups. Each group was treated with following materials Group 1 : Prime & Bond NT/Dyract AP, Group2: Single Bond/F2000 compomer, Group 3 : Syntac Single Component/Compoglass. The bonding agent and compomer were applied for each group following manufacturers information. Dentin permeability of each group was measured at each process by fluid filtration method; Step 1 : preparation(smear layer). Step 2 : etching(smear layer removal), Step 3 : applying the bonding agent, Step 4 : filling the compomer. Dentin permeability was expressed by hydraulic conductance ($\mu\textrm{l}$ min$^{-1}$cm$H_2O$$^{-1}$). The data were analysed statistically using One-way ANOVA and Sheffe's method. The results were as follows : 1. Dentin permeability differences between each process were significant except between step 1 and step 2(p<0.01). 2. Dentin permeability after removal of smear layer was highly increased(p<0.01). 3. In most case, decrease of dentin permeability was obtained by applying bonding agent(p<0.01). 4. Dentin permeability differences among the experimental groups were not significant(p>0.05). 5. None of compomers used in this study showed perfect seal at the interface.

Generation of Discrete $G^1$ Continuous B-spline Ship Hullform Surfaces from Curve Network Using Virtual Iso-parametric Curves

  • Rhim, Joong-Hyun;Cho, Doo-Yeoun;Lee, Kyu-Yeul;Kim, Tae-Wan
    • Journal of Ship and Ocean Technology
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    • v.10 no.2
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    • pp.24-36
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    • 2006
  • Ship hullform is usually designed with a curve network, and smooth hullform surfaces are supposed to be generated by filling in (or interpolating) the curve network with appropriate surface patches. Tensor-product surfaces such as B-spline and $B\'{e}zier$ patches are typical representations to this interpolating problem. However, they have difficulties in representing the surfaces of irregular topological type which are frequently appeared in the fore- and after-body of ship hullform curve network. In this paper, we proposed a method that can automatically generate discrete $G^1$ continuous B-spline surfaces interpolating given curve network of ship hullform. This method consists of three steps. In the first step, given curve network is reorganized to be of two types: boundary curves and reference curves of surface patches. Especially, the boundary curves are specified for their surface patches to be rectangular or triangular topological type that can be represented with tensor-product (or degenerate) B-spline surface patches. In the second step, surface fitting points and cross boundary derivatives are estimated by constructing virtual iso-parametric curves at discrete parameters. In the last step, discrete $G^1$ continuous B-spline surfaces are generated by surface fitting algorithm. Finally, several examples of resulting smooth hullform surfaces generated from the curve network data of actual ship hullform are included to demonstrate the quality of the proposed method.