• Title/Summary/Keyword: Stanford University

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Process Considerations for 80-GHz High-Performance p-i-n Silicon Photodetector for Optical Interconnect

  • Cho, Seong-Jae;Kim, Hyung-Jin;Sun, Min-Chul;Park, Byung-Gook;Harris, James S. Jr.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.12 no.3
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    • pp.370-376
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    • 2012
  • In this work, design considerations for high-performance silicon photodetector are thoroughly investi- gated. Besides the critical dimensions of device, guidelines for process architecture are suggested. Abiding by those criteria for improving both direct-current (DC) and alternating-current (AC) perfor- mances, a high-speed low-operation power silicon photodetector based on p-i-n structure for optical interconnect has been designed by device simulation. An $f_{-3dB}$ of 80 GHz at an operating voltage of 1 V was obtained.