• Title/Summary/Keyword: Spin-on method

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Development of Real Time Thickness Measurement System of Thin Film for 12" Wafer Spin Etcher (12" 웨이퍼 Spin etcher용 실시간 박막두께 측정장치의 개발)

  • 김노유;서학석
    • Journal of the Semiconductor & Display Technology
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    • v.2 no.2
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    • pp.9-15
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    • 2003
  • This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

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A Numerical Study on Effect of Variation of Injection Angle on the Emissions (디젤 엔진의 분사각 변화가 배기가스에 미치는 영향에 관한 수치해석적 연구)

  • Bae, Myung-Jik;Lee, Byoung-Hwa;Han, Dong-Sik;Jeon, Chung-Hwan;Chang, Young-June;Song, Ju-Hun
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.3085-3089
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    • 2008
  • In order to reduce NOx and Soot emissions simultaneously, characteristics of diesel spray and combustion were investigated by numerical simulation with StarCD in this paper. This work focuses on effect of Spin Injection. A simulation model of combustion, spray and emissions is developed for heavy duty marine diesel engine application. Simulation is performed with change of spray angle between first and second directions at fixed engine speed, injection timing, injection duration and etc. The results show that Spin Spray Injection method can reduce NOx emission. And the results show that the 1st injection considerably interfere with 2nd injection characteristics.

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Design for Spin/Stall Recovery Parachute System of Turbo-prop Airplane (터보프롭 항공기의 스핀/실속 회복장치 설계)

  • Lee, Dong-Hun;Nho, Byung-Chan;Kang, Myung-Kag;Kang, Gyeong-Woo;Lee, Ju-Ha
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.40 no.8
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    • pp.726-736
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    • 2012
  • This paper deals with Spin/Stall Recovery Parachute System from design to ground taxiing stage which would be deployed on the high speed taxi of turbo-prop airplane. In detail design phase, design parameters- riser length, parachute type, size, porosity, parachute canopy filling time, and deployment method- were considered based on the analytical disciplines such as aerodynamics, structures, and stability & control. Before the installation of Spin/Stall Recovery System of turbo-prop airplane, all control functions of this system were validated by the SBTB(System Breakout Test Box) in the laboratory. SBTB was used to confirm if it can detect faults, and simulate the firing of pyrotechnic devices that control the deployment and jettison of it. Once confirmed normal operation, deployment of parachute on the high speed taxiing were performed.

Growth of Textured CoFe2O4 Thin Films on Platinized Silicon Prepared by a Sol-Gel Method

  • Mustaqima, Millaty;Lee, Min Young;Kim, Deok Hyeon;Lee, Bo Wha;Liu, Chunli
    • Journal of Magnetics
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    • v.19 no.3
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    • pp.227-231
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    • 2014
  • We fabricated textured polycrystalline $CoFe_2O_4$ thin films on $Pt(111)/TiO_2/SiO_2/Si$ substrate through a sol-gel method. We varied the thickness of the films, by using precursor solutions with different concentrations of 0.1, 0.2, and 0.3 M, and by depositing 5, 8, or 10 layers on the substrate by spin-coating. X-ray diffraction spectra indicated that when the precursor concentration of the solution was higher than 0.1 M, the spin-coated films were preferentially oriented in the <111> direction. Inspection of the surface morphology by scanning electron microscopy revealed that $CoFe_2O_4$ thin films prepared with 0.2 M solution and 5-time spin-coatings had smoother surface, as compared to the other conditions. Each coating had an average thickness of about 50 nm. The magnetic properties measured by vibrating sample magnetometer showed magnetic anisotropy, as evidenced from the difference in the in-plane and out-of-plane hysteresis loops, which we attributed to the textured orientation of the $CoFe_2O_4$ thin films.

Ferromagnetic Semiconductors: Preparation and Properties

  • 조성래
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.19-19
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    • 2003
  • The injection of spins into nonmagnetic semiconductors has recently attracted great interest due to the potential to create new classes of spin-dependent electronic devices. A recent strategy to achieve control over the spin degree of freedom is based on dilute ferromagnetic semiconductors. Ferromagnetism has been reported in various semiconductor groups including II-Ⅵ, III-V, IV and II-IV,-V$_2$, which will be reviewed. On the other hand, to date the low solubility of magnetic ions in non-magnetic semiconductor hosts and/or low Curie temperature have limited the opportunities. Therefore the search for other promising ferromagnetic semiconducting materials, with high magnetic moments and high Curie temperatures (Tc), is of the utmost importance. In this talk, we also introduce new pure ferromagnetic semiconductors, MnGeP$_2$ and MnGeAs$_2$, exhibiting ferromagnetism and a magnetic moment per Mn at 5K larger than 2.40 ${\mu}$B. The calculated electronic structures using the FLAPW method show an indirect energy gap of 0.24 and 0.06 eV, respectively. We have observed spin injection in MnGeP$_2$ and MnGeAs$_2$ magnetic tunnel junctions through semiconducting barriers.

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Property of Spin-sprayed ZnO Film on PC Substrate (스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성)

  • Hoong, Jeongsoo;Matsushita, Nobuhiro;Katsumata, Ken-ichi;Park, Yongseo;Kim, Kyunghwan
    • Journal of the Semiconductor & Display Technology
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    • v.17 no.3
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    • pp.27-30
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    • 2018
  • In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of $85^{\circ}C$. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to $3.9{\times}10^{-2}{\Omega}{\cdot}cm$, after UV irradiation.

A Priority Evaluation Methodology for Spin-off of Defense Technology : Patent Analysis and AHP Approach (국방 기술의 민수화 우선순위 평가 방법론 : 특허 분석 및 계층분석과정 (AHP) 기반)

  • Park, Yun-Mi;Seol, Hyeon-Ju
    • Journal of the military operations research society of Korea
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    • v.36 no.3
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    • pp.15-27
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    • 2010
  • Dual-use technology, upon its effective development, can be a highly efficient technology that may be utilized for both achieving industry competitiveness and building National Security. Although research needs for such development methodology and call for corresponding efforts have long been proposed, actual outputs have not reached its desired level. Hence, this paper aims to provide more concrete and quantitative process in technology planning used to activate development of dual-use technology, considering dual usability and transferability of such technologies. In such effort, we propose use of patent analysis and the Analytic Hierarchy Process (AHP) for determining priorities for spin-off defense technology. First, the necessity of R&D and potential spin-off are measured based on patent information. Second, the necessity of R&D results from a quantitative analysis and the potentials spin-off are derived from analysis of patent citations. Then, AHP is used to calculate the importance of evaluating factors, and to assess alternative scores. Finally, we present the result of spin-off priority. A case study on the Korea defense technology is presented to illustrate the proposed method. We expect this study to make contribution in vision making of the military R&D spending.

An Experimental study on Improvement of Mechanical Press-Joining Strength of the Spin Drum Seaming Division in Washing Machine (스핀드럼 시밍부의 기계적 프레스 접합강도 향상에 관한 실험적 연구)

  • Kim, E.S.;Kim, B.M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2006.05a
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    • pp.127-131
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    • 2006
  • There are being a lot of studies for achievement of high speed Dehydration, high-strength and Lightweight of washing machine in the latest washing machine business. It is essential that Press-joining Strength of Spin Drum Seaming division is improved .to attain that target. Generally, we are using Mechanical press-joining by Seaming and T.I.G (Tungsten Inert Gas) welding among part joint method. Mechanical press-joining method that is mainly using for Stainless Steel (STS430) Drum have lots of merit that consumption of energy is low more than welding and production costs cut down and generation of the corrosion is solved by removing weld zone defect and materials having different properties are enable to join without special equipment. But, it is difficult to realize joint strength required at high speed operation because joint strength of mechanical press-joining method is low remarkably in comparison with welding. Also, there are a lot of analysis difficulties and very limited research is under way due to the dynamic factor such as multistage plastic working, elastic recovery, residual stress etc. The results of this study show optimal joining condition for mechanical press-joining by performing lots of tensile joining strength test with various specimen under multi-change of important design factor such as seaming width, bead area and bead depth etc.

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A Study on the Improvement of the Interface Contact and the Prevention of the Charge Recombination by the Surface Treatment of Transparent Conductive Oxide in Dye-sensitized Solar Cell (염료감응형 태양전지 투명전도성 막의 표면처리를 통한 계면 접촉 향상 및 재결합 방지 연구)

  • Seo, Hyun-Woong;Hong, Ji-Tae;Son, Min-Kyu;Kim, Jin-Kyoung;Shin, In-Young;Kim, Hee-Je
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.58 no.11
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    • pp.2214-2218
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    • 2009
  • Dye-sensitized solar cell (DSC) has been considered as a possible alternative to current silicon based p-n junction photovoltaic devices due to its advantages of high efficiency, simple fabrication process and low production cost. Numerous researches for high efficient DSC in the various fields are under way even now. Among them, the compact layer, which prevents the back electron transfer between transparent conductive oxides and the redox electrolyte, is fabricated by various methods such as a ZnO dip-coating, $TiCl_4$ dip-coating, and Ti sputtering. In this study, we tried to fabricate the $TiO_2$ compact layer by the spin-coating method using aqueous $TiCl_4$ solution. The effect of the spin-coating method was checked as compared with conventional dip-coating method. As a result, DSC with a spin-coated compact layer had 33.4% and 6% better efficiency than standard DSC and DSC with a dip-coated compact layer.

A Relativistiv Configuration Interaction Method Using Effective Core Potentials with Spin-Orbit Interactions

  • 김명청;이상연;이윤섭
    • Bulletin of the Korean Chemical Society
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    • v.16 no.6
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    • pp.547-552
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    • 1995
  • As an extension to the Kramers' restricted Hartree-Fock (KRHF) method [J. Comp. Chem., 13, 595 (1992)], we have implemented the Kramers' restricted configuration interaction (KRCI) program in order to calculate excited states as well as the ground state of polyatomic molecules containing heavy atoms. This KRCI is based on determinants composed of the two-component molecular spinors which are generated from KRHF calculations. The Hamiltonian employed in the KRHF and KRCI methods contains most of all the important relativistic effects including spin-orbit terms through the use of relativistic effective core potentials (REP). The present program which is limited to a small configuration space has been tested for a few atoms and molecules. Excitation energies of the group 14 and 16 elements calculated using the present KRCI program are in good accordance with the spectroscopic data. Calculated excitation energies for many Rydberg states of K and Cs indicate that spin-orbit terms in the REP, which are derived for the ground state, are also reliable for the description of highly excited states. The electronic states of the polyatomic molecule CH3I are probed from the molecular region to the dissociation limit. Test calculations demonstrate that the present KRCI is a useful method for the description of potential energy surface of polyatomic molecules containing heavy atoms.