• 제목/요약/키워드: Spin Coating Method

검색결과 359건 처리시간 0.023초

회전 도포 공정을 이용한 Polymethyl methacrylate(PMMA) 박막의 열처리에 따른 전기적 특성 평가 (Electric properties of Polymethyl methacrylate(PMMA) Films to thermal treatment Prepared by Spin Coating)

  • 나문경;강동필;안명상;명인혜;강영택
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.1924-1926
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    • 2005
  • Poly(methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observes by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for repeated annealing cycles at $100^{\circ}C$. 1-V measured at various delay times $(0{\sim}20sec)$ showed little change and the absence of hysteresis in the I-V characteristics with delay times, which eliminate the possibility of deep traps in the PMMA films. The observed thermal stability, smooth surfaces, dielectric constant, I-V behavior implies PMMA formed by spin coating can be used as an efficient gate dielectric layer in OTFTs.

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Bohemite 나노졸을 이용한 내구성 코팅재료의 제조와 특성에 관한 연구 (Preparation and Characterization of Hard Coating Materials Based on Silane Modified Boehmite Hybrid Materials)

  • 전성재;김웅;이재준;구상만
    • 공업화학
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    • 제17권6호
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    • pp.580-585
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    • 2006
  • Boehmite 나노졸을 이용하여 자외선 및 열 경화가 동시에 가능한 내구성 코팅재료를 제조하였다. Boehmite (AlOOH) 나노입자에 3-(trimethoxysilyl)propylmethacrylate, (3-glycidyloxypropyl)trimethoxysilane 등의 유기 실란 커플링제를 혼합하는 sol-gel법으로 내구성 코팅 재료를 만들었다. 최초 boehmite 입자가 물에서만 분산 가능하였던 반면, 유기 실란이 도입된 입자는 알코올, tetrahydrofuran, acetonitrile 등의 유기 용매에서도 분산 가능케 되어 코팅 공정상 넓은 응용이 가능하게 되었다. 코팅 박막은 spin 코팅 방식을 이용하여 다양한 기질에 제조되었으며 제조된 박막은 FT-IR, Si/Al CP MAS NMR, UV-Vis spectrophotometer, 연필 경도계 및 FE-SEM, Taber abraser 등의 다양한 방법을 통하여 분석을 실시하였다. 유기실란의 배합 비율을 조절하여 최적화된 경도와 투명성을 갖는 박막을 얻었다. 또한 플라즈마로 전처리된 PMMA기질을 이용한 실험을 통하여 전처리의 효과성을 논의하였다.

평면형 마이크로 가스센서 (Planar-Type Micro Gas Sensor)

  • 이상윤;정완영;이덕동
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.101-104
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    • 1998
  • A new planar-type micro gas sensor was designed and fabricated on silicon substrate and the operating characteristics of the sensor were investigated. The thin sensitive film of the sensor was fabricated by spin-coating of the SnO$_2$ sol solution which was synthesized by hydrothermal method. The spin-coating method for preparation of sensing layer was adopted to improve the long-term stability of the fabricated sensing film instead of physical methods such as rf sputtering and thermal evaporation. The fabricated microsensor showed a fairly good sensing performance for CO gas in air at 250$^{\circ}C$ The sensitivity(S=Ra/Rg) was shown to be about 5 to 2000ppm CO with heating power of 50mW.

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PPV-Copolymer를 이용한 고분자 EL소자의 제작 및 특성연구 (Synthesis and Characteristics of Polymer Electroluminescent Device Using PPV-Copolymer)

  • 김화영;임동준;임석범;문형돈;김은옥;길상근;김영호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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    • pp.984-987
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    • 2002
  • In this study, It is to synthesize PPV-copolymer and to make polymer electroluminesence device in single layer of ITO/PPV -copolymer/metal. and then it has been realized basic characteristics for display device through analysis and recognized application possibility by luminous material. PPV-copolymer is used spin coating method and electrode is evaporated of vacuum deposition method by changing materials. The result of experiment, The PPV-copolymer used this study emitted blue color, could be discovered a change of emttion characteristic by electrode material.

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졸겔법으로 제조된 ATO 박막의 특성 연구 (Characteristics of ATO Thin Films Prepared by Sol-Gel Process)

  • 구창영;이동근;이희영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.192-195
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    • 2000
  • Antimony doped tin oxyde thin films have been deposited by sol-gel method using non-alkoxide precursor SnCl$_2$$.$2H$_2$O as host and SbC1$_3$ as dopant material. Using spin coating method, thin films of thickness up to 200nm have been uniformly deposited on Corning 1737F non-alkali glass substrates. Effect of Sb doping concentration and heat treatment on electrical and optical properties was investigated. Heat treatment was performed at the temperature from 350$^{\circ}C$ to 650$^{\circ}C$ in flowing O$_2$. The resulting ATO films showed widely changing electrical resistivity and optical transmittance values in the visible spectrum depending on the composition and firing condition.

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스테레오 영상 정합을 위한 새로운 구조 정보 추출 알고리즘 (Simple Algorithm of Structure Features Extration for Stereo Image Matching)

  • 최환언
    • 한국인쇄학회지
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    • 제9권1호
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    • pp.1-11
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    • 1991
  • In this reseach, double-layered photoconductor consist of the carrier generation layer(CGL) of $\varepsilon$ type copper phthalocyanine thin film by an aqueous coating method and the carrier transport layer(CGL) of polyvinyl carbazol(PVK) by spin coating. We inverstigated effect of the surfactant solution and cathod electrolysis to the crystal type of $\varepsilon$-CuPc in CGL with TEM, SEM and X- ray diffraction spectroscopy and studied the mechanism of an aqueous coating for the preparation of CGL. The effect of the washing of CGL about the electrophotographic characteristics of the $\varepsilon$-CuPc/PVK doublelayered photoconductors is studied also.

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Growth of Textured CoFe2O4 Thin Films on Platinized Silicon Prepared by a Sol-Gel Method

  • Mustaqima, Millaty;Lee, Min Young;Kim, Deok Hyeon;Lee, Bo Wha;Liu, Chunli
    • Journal of Magnetics
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    • 제19권3호
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    • pp.227-231
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    • 2014
  • We fabricated textured polycrystalline $CoFe_2O_4$ thin films on $Pt(111)/TiO_2/SiO_2/Si$ substrate through a sol-gel method. We varied the thickness of the films, by using precursor solutions with different concentrations of 0.1, 0.2, and 0.3 M, and by depositing 5, 8, or 10 layers on the substrate by spin-coating. X-ray diffraction spectra indicated that when the precursor concentration of the solution was higher than 0.1 M, the spin-coated films were preferentially oriented in the <111> direction. Inspection of the surface morphology by scanning electron microscopy revealed that $CoFe_2O_4$ thin films prepared with 0.2 M solution and 5-time spin-coatings had smoother surface, as compared to the other conditions. Each coating had an average thickness of about 50 nm. The magnetic properties measured by vibrating sample magnetometer showed magnetic anisotropy, as evidenced from the difference in the in-plane and out-of-plane hysteresis loops, which we attributed to the textured orientation of the $CoFe_2O_4$ thin films.

랭뮤어-블롯젯을 통해 형성된 고밀도 양자점 박막과 이를 기반으로 한 발광다이오드 (Light-emitting Diodes based on a Densely Packed QD Film Deposited by the Langmuir-Blodgett Technique)

  • 이승현;정병국;노정균
    • 센서학회지
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    • 제31권4호
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    • pp.249-254
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    • 2022
  • To achieve high-performance colloidal quantum dot light-emitting diodes (QD-LEDs), the use of a densely packed QD film is crucial to prevent the formation of leakage current pathways and increase in interface resistance. Spin coating is the most common method to deposit QDs; however, this method often produces pinholes that can act as short-circuit paths within devices. Since state-of-the-art QD-LEDs typically employ mono- or bi-layer QDs as an emissive layer because of their low conductivities, the use of a densely packed and pinhole-free QD film is essential. Herein, we introduce the Langmuir-Blodgett (LB) technique as a deposition method for the fabricate densely packed QD films in QD-LEDs. The LB technique successfully transfers a highly dense monolayer of QDs onto the substrate, and multilayer deposition is performed by repeating the transfer process. To validate the comparability of the LB technique with the standard QD-LED fabrication process, we fabricate and compare the performance of LB-based QD-LEDs to that of the spin-coating-based device. Owing to the non-destructiveness of the LB technique, the electroluminescence efficiency of the LB-based QD-LEDs is similar to that of the standard spin coating-based device. Thus, the LB technique is promising for use in optoelectronic applications.

코팅 횟수에 따른 $Ba_{0.7}Sr_{0.3}TiO_{3}$ 박막의 전기적 특성 (The Electric Characteristics of $Ba_{0.7}Sr_{0.3}TiO_{3}$ by Coating Numbers)

  • 홍경진;민용기;기현철;조재철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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    • pp.42-45
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    • 2001
  • The high permittivity are applied to DRAM and FRAM. (Ba,Sr)$TiO_3$ (EST) thin films were prepared by Sol-Gel method. BST solution was made and spin-coated on $Pt/SiO_2/Si$ substrate at 4000 [rpm] for 10 seconds in a time coating. Coated specimens were dried at $90[^{\circ}C]$ for 5 minutes. Coating process was repeated from 3 times to 5 times and then sintered at $750[^{\circ}C]$ for 30 minutes. Each specimen was analyzed structure and electrical characteristics. Thickness of BST ceramics thin films are about 2600-2800[$\AA$] in 3 times. Dielectric constant of thin films was little decreased at 1[KHz]~1[MHz]. Dielectric constant and loss to frequency were 250 and 0.02 in BST3. The property of leakage current was stable When the applied voltage was 0~3[V] Leakage current was $10^{9}\sim10^{11}$[A] at 0~3[V].

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ESD 기법을 이용한 투명전도막 형성 기술 (Transparent Electrode Forming Technology using ESD Coating Methode)

  • 김정수;김동수
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2009년도 추계학술대회 논문집
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    • pp.348-348
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    • 2009
  • The conductive coating method is used for various industrial fields. For example, Sputtering process is used to coat ITO layer in LCD or OLED panel manufacture process and fabricate a base layer of substrate of an electric printing device. However, conventional coating processes (beam sputtering, spin coating etc.) has a problems in the industrial manufacturing process. These processes have a very high cost and critical manufacturing environment as a vacuum process. Recently, many researchers have proposed various printing process instead of conventional coating processes. In this paper, we propose an ESD printing process in ITO coating layer and apply to fabricate a conductive coating film. Furthermore, the effect of the nozzle and also the applied voltage on different configuration of the nozzle head was also studied for better understanding of the Electro Static deposition process.

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