한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2000년도 추계학술대회 논문집
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- Pages.192-195
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- 2000
졸겔법으로 제조된 ATO 박막의 특성 연구
Characteristics of ATO Thin Films Prepared by Sol-Gel Process
초록
Antimony doped tin oxyde thin films have been deposited by sol-gel method using non-alkoxide precursor SnCl