Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2005.07c
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- Pages.1924-1926
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- 2005
Electric properties of Polymethyl methacrylate(PMMA) Films to thermal treatment Prepared by Spin Coating
회전 도포 공정을 이용한 Polymethyl methacrylate(PMMA) 박막의 열처리에 따른 전기적 특성 평가
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Na, Moon-Kyong
(Korea Electrotechnology Research Institute) ;
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Kang, Dong-Pil
(Korea Electrotechnology Research Institute) ;
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Ahn, Myeog-Sang
(Korea Electrotechnology Research Institute) ;
- Myung, In-Hye (Korea Electrotechnology Research Institute) ;
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Kang, Young-Taec
(Korea Electrotechnology Research Institute)
- Published : 2005.07.18
Abstract
Poly(methyl methacrylate) (PMMA) is one of the promising representive of polymer gate dielectric for its high resistivity and sutible dielectric constant. PMMA (Mw=96700) films were prepared on p-Si by spin coating method. PMMA were coated compactively and flatly as observes by AFM. MIS(Al/PMMA/p-Si) structure was made and capacitance-voltage (C-V) and current-voltage (I-V) measurements were done with PMMA films for repeated annealing cycles at
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