• 제목/요약/키워드: Sol-gel spin coating method

검색결과 159건 처리시간 0.027초

Effect of annealing temperature on amorphous indium zinc oxide thin films prepared by a sol-gel spin-coating method

  • Lee, Sang-Hyun;Lee, Seung-Yup;Park, Byung-Ok
    • 한국결정성장학회지
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    • 제22권1호
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    • pp.15-18
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    • 2012
  • Transparent conductive indium zinc oxide thin films were prepared by spin-coating a sol-gel solution. Zinc acetate dihydrate [$Zn(CH_3COO)_2{\cdot}2H_2O$] and indium acetate [In$(CH_3COO)_3$] were used as starting precursors, and 2-methoxyethanol with 1-propanol as solvents. Upon annealing in a temperature range from 500 to $1000^{\circ}C$, the thin film crystallizes into polycrystalline $In_2O_3$(ZnO). The lowest electrical resistivity was obtained at an annealing temperature of $700^{\circ}C$ as $2{\Omega}{\cdot}cm$. Average optical transmittances were higher than 80% at all annealing temperatures. These experimental results confirm that the sol-gel spin-coating can be a good simplified practical method for forming transparent electrodes.

Characterization of F- and Al-codoped ZnO Transparent Conducting Thin Film prepared by Sol-Gel Spin Coating Method

  • Nam, Gil Mo;Kwon, Myoung Seok
    • 한국세라믹학회지
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    • 제53권3호
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    • pp.338-342
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    • 2016
  • ZnO thin film co-doped with F and Al was prepared on a glass substrate via simple non-alkoxide sol-gel spin coating. For a fixed F concentration, the addition of Al co-dopant was shown to reduce the resistivity mainly due to an increase in electrical carrier density compared with ZnO doped with F only, especially after the second post-heat-treatment in a reducing environment. There was no effective positive contribution to the reduction in resistivity due to the mobility enhancement by the addition of Al co-dopant. Optical transmittance of the ZnO thin film co-doped with F and Al in the visible light domain was shown to be higher than that of the ZnO thin film doped with F only.

졸겔법으로 제조된 ATO 박막의 특성 연구 (Characteristics of ATO Thin Films Prepared by Sol-Gel Process)

  • 구창영;이동근;이희영
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
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    • pp.192-195
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    • 2000
  • Antimony doped tin oxyde thin films have been deposited by sol-gel method using non-alkoxide precursor SnCl$_2$$.$2H$_2$O as host and SbC1$_3$ as dopant material. Using spin coating method, thin films of thickness up to 200nm have been uniformly deposited on Corning 1737F non-alkali glass substrates. Effect of Sb doping concentration and heat treatment on electrical and optical properties was investigated. Heat treatment was performed at the temperature from 350$^{\circ}C$ to 650$^{\circ}C$ in flowing O$_2$. The resulting ATO films showed widely changing electrical resistivity and optical transmittance values in the visible spectrum depending on the composition and firing condition.

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Fabrication of PZT Film by a Single-Step Spin Coating Process

  • Oh, Seung-Min;Kang, Min-Gyu;Do, Young-Ho;Kang, Chong-Yun;Nahm, Sahn;Yoon, Seok-Jin
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.193-193
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    • 2011
  • To obtain ceramic films, the sol-gel coating technique has been broadly used with heat treatment, but crack formation tend to occur during heat treatment in thick sol-gel films. We prepared PZT thin films by sol-gel method with single-step spin coating process. The PZT solution have been synthesized using lead acetate ($Pb(CH_3COO)_2$), zirconium acetylacetonate ($Zr(OC_3H_7^n)_4$), and titanium diisopropoxide bis(acetylacetonate) 75wt% in isopropanol ($Ti(OC_3H_7^i)_2(OC_3H_7^n)_2$) as starting materials and n-propanol was selected as a solvent. The poly(vynilpyrrolidone) (PVP) was added with 0, 0.25, 0.5, 0.75, and 1 molar ratios to control viscosity of solution. We investigated influence of the viscosity on thickness, microstructure, and electrical properties of final PZT films. Thermo-gravimetric analysis and differential scanning calorimeter (TGA/DSC) was carried out from room temperature to $800^{\circ}C$ in order to measure pyrolysis temperature. Structural characteristics were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Ferroelectric and dielectric properties were measured by RT66A (Radiant) and impedance analyzer (Agilent), respectively. The thicknesses of PZT films depended on incorporation of an excess amount of PVP. Finally, we obtained PZT films of good quality without crack formation via single-step spin coating.

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Preparation of$SnO_2$-based gas sensor by Sol-Gel process

  • Bui, Anh-Hoa;Baek, Won-Woo;Lee, Sang-Tae;Jun, Hee-Kwon;Lee, Duk-Dong;Huh, Jeung-Soo
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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    • pp.135-135
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    • 2003
  • This paper presents the preparation of SnO$_2$ films by Sol-Gel process and using spin coating method, and their sensing properties in CO gas. Experimental procedure consisted of following steps: (1) Tin chloride(SnCl$_4$) and Ammonium hydrogen carbonate (NH$_4$HCO$_3$) were used as precursors; (2) the Sol solution with concentration of about 10wt% SnO$_2$ was prepared from washed Gel-precipitate for spin coating step; (3) thereafter, the coating solution was dropped onto the alumina (Al$_2$O$_3$) substrate that was then spun, the spin coating was carried out with total 10 times; (4) finally, the films were calcined for 3 hours at 50$0^{\circ}C$ or higher temperature (600, 700, 800 or 90$0^{\circ}C$) in order to obtain various gram sizes. The average grain size was calculated by Scherrer's equation using main peaks in XRD spectra; meanwhile the thickness, microstructure and surface morphology of the films were observed by FE-SEM.

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Sol-Gel 하드 코팅 막에서의 Spiropyran의 광 변색 특성 (Photochromic Properties of Spiropyran in Hard Coating Films Made by Sol-Gel Method)

  • 정상혁;조경인;박정용;송기창
    • Korean Chemical Engineering Research
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    • 제46권2호
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    • pp.310-315
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    • 2008
  • 실란커플링제인 glycidoxypropyl trimethoxysilane(GPTMS)과 vinyltriethoxysilane(VTES)을 출발물질로 하여 sol-gel 법에 의해 유-무기 혼성 용액을 제조하였다. 이 용액에 spiropyran계 광 변색 염료를 ethylacetate에 용해시킨 용액을 혼합하여 광 변색 코팅 용액을 제조하였다. 그 후 기재인 polycarbonate 시트에 스핀 코팅 시키고 $100^{\circ}C$에서 2 h 동안 열 경화시켜 광 변색성을 갖는 하드 코팅 막을 제조하였다. 코팅 막은 UV 광을 조사함에 의해 투명색으로부터 푸른색으로 변했다가 다시 투명색으로 변하는 가역적인 색변화를 보여주었다. 이때 코팅 막의 소색속도 및 연필경도는 코팅 용액 중의 GPTMS의 mol비가 증가됨에 따라 증가하였다.

스핀코팅법에 의해 제조되어진 Yttrium이 도핑된 ZnO 막의 특성 (Characterization of Yttrium Doped Zinc Oxide Thin Films Fabricated by Spin-coating Method)

  • 김현주;이동윤;송재성
    • 한국전기전자재료학회논문지
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    • 제19권5호
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    • pp.457-460
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    • 2006
  • Y doped zinc oxide (YZO) thin films were deposited on F doped $SnO_2$ (FTO) glass substrate by sol-gel method using the spin-coating system. A homogeneous and stable solution was prepared by dissolving acetate in the solution added diethanolamine as sol-gel stabilizer. YZO films were obtained after preheated on the hot-plate for 5minute before each coating; the number of coating was 3 times. After the coating of last step, annealing of YZO films performed at $450^{\circ}C$ for 30 minute. In order to confirming of a ultraviolet ray interruption and down-conversion effects, optical properties of YZO films, transmission spectrum and fluorescent spectrum were used. Also, for understanding the obtained results by experiment, the elestronic state of YZO was calculated using the density functional theory The results obtained by experiment were compared with calculated structure. The detail of electronic structure was obtained by the discrete variational Xa (DV-Xa) method, which is a sort of molecular orbital full potential method. The density of state and energy levels of dopant element were shown and discussed in association with optical properties.

Sol-Gel 법에 의한 Pb(Zr, Ti)${O}_{3}$ 박막의 제조 및 구조적 특성 (Preparation and structural properties of the Pb(Zr, Ti)${O}_{3}$ thin film by Sol-Gel method)

  • 이영준;정장호;이성갑;이영희
    • 대한전기학회논문지
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    • 제44권7호
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    • pp.914-918
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    • 1995
  • In this study, Pb(Zr$_{x}$ Ti$_{1-x}$ )O$_{3}$ (x=0.65, 0.52, 0.35) thin films were fabricated by Sol-Gel method. A stock solution with excess Pb 10[mol%] of Pb(Zr$_{x}$ Ti$_{1-x}$ )O$_{3}$ was made and spin-coated on the Pt/SiO$_{2}$/Si substrate at 4000[rpm] for 30[sec.]. Coated specimens were dried on the hot-plate at 400[.deg. C] for 10[min.]. Sintering temperature and time were 500~800[.deg. C] and 1~60[min.]. The coating process was repeated 6 times and the final thickness of the thin films were about 4800[A]. To investigate crystallization condition, PZT thin films were analyzed with sintering temperature, time and composition by the XRD. The microstructure of thin fulms were investigated by SEM. The ferroelectric perovskite phases precipitated under the sintering of 700[.deg. C] for 1 hours. In the PZT(52/48) composition, dielectric constant and dielectric loss were 2133, 2.2[%] at room temperature, respectively.ively.

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Sol-Gel법에 의해 Spiropyran을 함유한 광 변색 코팅 막의 제조 (Preparation of Photochromic Coating Films Containing Spiropyran by Sol-Gel Method)

  • 정상혁;조경인;송기창
    • Korean Chemical Engineering Research
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    • 제46권1호
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    • pp.112-117
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    • 2008
  • 1:1로 몰 비가 조절된 glycidoxypropyl trimethoxysilane(GPTMS)과 methyl triethoxysilane(MTES)을 출발물질로 하여 sol-gel법에 의해 유-무기 혼성 용액을 제조하였다. 이 용액에 spiropyran계 광 변색 염료를 ethylacetate(EA)에 용해시킨 용액을 혼합하여 광 변색 코팅 용액을 제조하였다. 그 후 기재인 polycarbonate 시트에 스핀 코팅 시키고 $100^{\circ}C$에서 2 h 동안 열 경화 시켜 광 변색 코팅 막을 제조하였다. 코팅 막은 UV 광을 조사함에 의해 가역적인 색변화를 보여주었다. 이때 코팅 막의 소색속도는 코팅 용액 중의 EA의 첨가량이 증가됨에 따라 증가하였다.