• 제목/요약/키워드: Small area variation

검색결과 392건 처리시간 0.026초

In-situ Endpoint Detection for Dielectric Films Plasma Etching Using Plasma Impedance Monitoring and Self-plasma Optical Emission Spectroscopy with Modified Principal Component Analysis

  • 장해규;채희엽
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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    • pp.153-153
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    • 2012
  • Endpoint detection with plasma impedance monitoring and self-plasma optical emission spectroscopy is demonstrated for dielectric layers etching processes. For in-situ detecting endpoint, optical-emission spectroscopy (OES) is used for in-situ endpoint detection for plasma etching. However, the sensitivity of OES is decreased if polymer is deposited on viewport or the proportion of exposed area on the wafer is too small. To overcome these problems, the endpoint was determined by impedance signal variation from I-V monitoring (VI probe) and self-plasma optical emission spectroscopy. In addition, modified principal component analysis was applied to enhance sensitivity for small area etching. As a result, the sensitivity of this method is increased about twice better than that of OES. From plasma impedance monitoring and self-plasma optical emission spectroscopy, properties of plasma and chamber are analyzed, and real-time endpoint detection is achieved.

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기저대역 채널선택 필터를 위한 전압 안정화 회로 (Voltage regulator for baseband channel selection filters)

  • 김병욱;김대익
    • 한국전자통신학회논문지
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    • 제8권11호
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    • pp.1641-1646
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    • 2013
  • 기저대역 채널선택 필터는 외부의 잡음이나 공정상의 변화에 따라 각각의 통신 채널을 선택하기 위해 인가되는 제어 전압이 변동될 수 있다. 본 논문에서는 제어 전압을 일정하게 유지시키기 위해, 전류의 흐름을 감지하여 채널선택 필터의 차단주파수가 자동으로 조정되어 필터 동작이 원활하게 유지되면서 최소 면적을 갖는 전류 비교 방식 전압 안정화 회로를 설계하였다.

블레이드 형상 변화에 따른 마이크로 튜블러 수차의 CFD 성능해석 (CFD Performance analysis of Micro Tubular-type hydro turbine by blade shape)

  • 박지훈;황영철;모장오;김유택;이영호
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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    • pp.206.1-206.1
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    • 2011
  • Recently, various developments in the area of small hydropower have being made and small hydro turbines are suitable for domestic use because it is a clean and renewable energy source. A small hydropower generator produces power by using the different water pressure levels in pipe lines and energy which was initially wasted by use of a reducing valve at the end of the pipeline is instead collected by a tubular-type hydro turbine in the generator. In this study, in order to acquire the performance of tubular-type hydro turbine applied, the output power, head, efficiency characteristics due to the different guide vane and runner vane angle are examined in detail. Moreover, influences of pressure and velocity distributions with the variation of guide vane and runner vane angle on turbine performance are investigated by using a commercial CFD code.

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영상정보의 저장 공간 관리를 위한 동적/정적 객체 분리 및 시각암호화 메커니즘 (Dynamic / Static Object Segmentation and Visual Encryption Mechanism for Storage Space Management of Image Information)

  • 김진수;박남제
    • 한국멀티미디어학회논문지
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    • 제22권10호
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    • pp.1199-1207
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    • 2019
  • Video surveillance data, which is used for preemptive or post-emptive action against any event or accident, is required for monitoring the location, but is reducing the capacity of the image data by removing intervals for cost reduction and system persistence. Such a video surveillance system is fixed in a certain position and monitors the area only within a limited angle, or monitors only the fixed area without changing the angle. At this time, the video surveillance system that is monitored only within a limited angle shows that the variation object such as the floating population shows different status in the image, and the background of the image maintains a generally constant appearance. The static objects in the image do not need to be stored in all the images, unlike the dynamic objects that must be continuously shot, and occupy a storage space other than the necessary ones. In this paper, we propose a mechanism to analyze the image, store only the small size image for the fixed background, and store it as image data only for variable objects.

Distribution Characteristics of Bottom Litter in Chinhae Bay, Korea

  • Kim Jong-Hwa;Kim Sam-Kon;Kim Jong-Kyu
    • Fisheries and Aquatic Sciences
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    • 제4권3호
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    • pp.150-158
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    • 2001
  • A study on the amount, distribution and item of bottom litter on the sea-bed was conducted by the bottom trawl net at 5 sections in Chinhae Bay over a year. The number and weight of litter found per unit of swept area (1 hectare) in each section were estimated as the range of 8.76-80.63 pieces, 3.51-108.39kg, respectively. The seasonal variation of high (Aug., '97) and low season (Feb., '98) in quantity was small, and it was about 2 times as the range of 24.58- 52.61 pieces/ha between them. But the weight variation between high (Apr., '98) and low season (Aug., '97) was very large, about 30 times as the range of 4.06-119.64kg/ha. The largest and second composition on the weight of bottom litter in Chinhae Bay are $76\%$ in other-litter with compound and bulky materials, and $93\%$ in fishing gear, respectively. The relationship between quantity and weight of bottom litter was not occurred due to the variety of specific gravity. Of the fishing gear, fishing nets was portioned to be 2.571kg/ha in weight and $84.9\%$ in composition. So these results prove that fishing nets were discarded as the most part of fishing gear during fishing activity in the bay. The largest composition of the soiled state classified into 3 styles in overall bottom litter was $69\%$ in very soiled state, and the second one of $28\%$ in the soiled state. On the other hand, new state is very small and portioned in $3.0\%$ of all. Chinhae Bay was estimated to be about 10 times in quantity and about 36 times in weight of Tokyo Bay. Therefore, these suggest that Chinhae Bay is a very serious polluted estuary caused by the bottom litter such as heavy and bulky wastes, fishing gear.

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A New Islanding Detection Method using Phase-Locked Loop for Inverter-Interfaced Distributed Generators

  • Chung, Il-Yop;Moon, Seung-Il
    • Journal of Electrical Engineering and Technology
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    • 제2권2호
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    • pp.165-171
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    • 2007
  • This paper proposes a new islanding detection method for inverter-interfaced distributed generators (DG). To detect islanding conditions, this paper calculates the phase angle variation of the system voltage by using the phase-locked loop (PLL) in the inverter controllers. Because almost all inverter systems are equipped with the PLL, the implementation of this method is fairly simple and economical for inverter-interfaced DGs. The detection time can also be shortened by reducing communication delay between the relays and the DGs. The proposed method is based on the fact that islanding conditions result in the frequency and voltage variation of the islanded area. The variation depends on the amount of power mismatch. To improve the accuracy of the detection algorithm, this paper injects small low-frequency reactive power mismatch to the output power of DG.

재생 면적비가 가정용 소형 제습로터의 성능에 미치는 영향에 관한 실험적 연구 (An Experimental Study of the Effect of Regeneration Area Ratio on the Performance of Small-Sized Dehumidification Rotor for Residential Usage)

  • 김내현
    • 설비공학논문집
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    • 제27권5호
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    • pp.277-282
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    • 2015
  • During hot and humid weather, air-conditioners consume a large amount of electricity due to the large amount of latent heat. Simultaneous usage of a dehumidifier may reduce latent heat and reduce electricity consumption. In this study, dehumidification performance was measured for a small-sized dehumidification rotor made of inorganic fiber impregnated with metallic silicate within a constant temperature and humidity chamber. Regeneration to dehumidification depends on ratio, rotor speed, room temperature, regeneration temperature, room relative humidity and frontal velocity to the rotor. Results demonstrate an optimum area ratio (1/2), rotor speed (1.0 rpm), and regeneration temperature ($100^{\circ}C$) to achieve a dehumidification rate of 0.0581 kg/s. As the area ratio increases, the optimum rotation speed and the optimum regeneration temperature also increase. Above the optimum rotor speed, incomplete regeneration reduces dehumidification. Above the optimum regeneration temperature, increased temperature variation between regeneration and dehumidification reduces dehumidification. Dehumidification rate also increases with an increase of relative humidity, dehumidification temperature and flow velocity into the rotor.

Trade Scale, Property Types, and Location Environment of Vacation Houses: Examples from Central Japan

  • Shin, Byung-Chuel;Park, Gu-Won
    • 한국환경과학회지
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    • 제25권12호
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    • pp.1701-1715
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    • 2016
  • This study is a basic investigation of the contents and services relevant to the domestic vacation house business. In which, the trade scale, types of housing, and environmental conditions of various property locations were analyzed. The characteristics of properties listed on the Japanese website that conducts the greatest volume of vacation house trade in Japan were examined, and the following results were obtained: Villa areas, villas, and resort condos (resort mansions) are the three basic types of properties handled in the vacation house trade. In this market, sales per unit in villa areas and per spaces in resort condos accounted for the highest volume of trade, followed by that of villas (individual houses). In terms of land area, floor area, and sales price per house type, the relatively cheaper small and medium-sized vacation houses are more frequently traded, than expensive large-scale villas. In particular, small multi-family type villas (such as in resort condos) are the most popular. Land and floor area, and sales prices all show considerable variation depending on the type of property considered. Therefore, a business initiative to provide a more detailed classification of properties is required. In terms of the environment of vacation properties, most are located on coasts, plateaus, or inland mountains, and are generally within three-hours' traveling distance of large cities.

벡터기반 대시매트릭 기법을 이용한 소지역 장수인구 추정 및 분포패턴에 관한 연구 (A Study on Estimates to Longevity Population of Small Area and Distribution Patterns using Vector based Dasymetric Mapping Method)

  • 최돈정;김영섭;서용철
    • 한국측량학회지
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    • 제29권5호
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    • pp.479-485
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    • 2011
  • GIS기법을 이용하여 공간데이터간의 융합을 통한 지역적 장수인구의 분포와 영향요인을 밝혀내는 연구사례가 증가하고 있다. 일반적으로 이러한 연구들은 분석의 공간단위로써 센서스 행정구역을 채택한다. 그러나 센서스 구역 안에서도 공간적 특징의 다양성이 존재하기 때문에 장수현상을 충분히 설명한다고 할 수 없다. 따라서 장수라는 현상을 현실적으로 반영하는 공간단위에 대한 연구가 필요하다. 대시매트릭 기법은 다양한 공간정보를 이용하여 센서스 행정경계 보다 현실적인 공간단위의 재구성이 가능하게 해준다. 또한 이를 응용하여 소지역의 통계량 추정이 가능하다. 본 연구에서는 벡터기반 건물 데이터를 기반으로 대시매트릭 매핑기법을 응용하여 소지역 노인인구 수를 통계적으로 유의한 수준 안에서 재구성 하였다. 또한 클러스터 분석을 통해 센서스 행정경계안에 존재하는 국지적인 공간 영향관계의 변이를 확인 하였다. 본 연구를 통해 국지적 수준의 장수연구에 대한 필요성과 대시매트릭 기법의 응용이 유효한 방법론임을 제시하였다고 판단된다.

QUAD TREE를 이용한 BTC에서의 영상데이타 압축 (BTC employing a Quad Tree Technique for Image Data Compression)

  • 백인기;김해수;조성환;이근영
    • 한국통신학회논문지
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    • 제13권5호
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    • pp.390-399
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    • 1988
  • 계산 과장이 비교적 간단하고 실시간 처리가 가능한 coding방법 중의 하나인 BTC(Block Truncation Coding)를 이용하여 영상 데이터를 압축하기 위하여 2진 영상에서 주로 사용하는 quar tree 개념을 도입하여 압축율을 개선시키고, 기존의 BTC와 그 성능을 비교하였다. 이 논문에서 제안하는 방법은 그레이 레벨의 변화가 적은 영역에서는 부화상의 크기를 크게 하고, 그레이 레벨의 변화가 큰 영역에서는 부화상의 크기를 작게 하여 전체 부화상의 갯수를 줄임으\ulcorner\ulcorner영상 데이타의 압축을 행하였다. 또한 비트 평면의 효율적인 전송을 위하여 큰 크기의 부화상에 있어서는 Huffman run-length code를, 작은 크기의 부화상에 있어서는 lookup rable방식을 이용하였다. 컴퓨터 시뮬레이션 결과, 크기가 256x256이고, 그레이 레벨이 256인 영상에서 평균 0.8bit/pel의 압축 효과를 얻었다.

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