• Journal of Sensor Science and Technology
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• v.32 no.5
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• pp.328-333
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• 2023

This study experimentally verified the etch rate of the SiO₂ sacrificial layer etching process with a single etch hole using vapor-phase hydrogen fluoride (VHF) etching. To fabricate small-sized polysilicon etch holes, both circular and triangular pattern masks were employed. Etch holes were fabricated in the polysilicon thin film on the SiO₂ sacrificial layer, and VHF etching was performed to release the polysilicon thin film. The lateral etch rate was measured for varying etch hole sizes and sacrificial layer thicknesses. Based on the measured results, we obtained an approximate equation for the etch rate as a function of the etch hole size and sacrificial layer thickness. The etch rates obtained in this study can be utilized to minimize structural damage caused by incomplete or excessive etching in sacrificial layer processes. In addition, the results of this study provide insights for optimizing sacrificial layer etching and properly designing the size and spacing of the etch holes. In the future, further research will be conducted to explore the formation of structures using chemical vapor deposition (CVD) processes to simultaneously seal etch hole and prevent adhesion owing to polysilicon film vibration.

• Proceedings of the Earthquake Engineering Society of Korea Conference
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• 2000.04a
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• pp.120-129
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• 2000

As structure-soil interaction analysis for the seismic analysis of structures requires a nonlinear analysis of a structure-soil system considering the inelastic characteristics of soil layers nonlinear analyses of the foundation-soil system with the horizontal excitation were performed considering the nonlinear soil conditions for the nonlinear seismic analysis of structures. Stiff soil profile of SD and soft soil profile of SE specified in UBC were considered for the soil layers of a foundation and Ramberg-Osgood model was assumed for the nonlinear characteristics of soil layers. Studies on the changes of dynamci stiffnesses and damping rations of surface and embedded foundations depending on foundation size soil layer depth and piles were performed to investigate the effects of the nonlinear soil layer on the horizontal and rotational dynamic stiffnesses and damping ratios of the foundation-soil system According to the study results nonlinear prperties of a soil laryer decreeased horizontal and rotational linear stiffnesses and increased damping ratios largely Effects of foundation size soil layer depth and piles were also significant suggesting the necessity of nonlinear seismic analyses of structures.

• Journal of the Korea Institute of Building Construction
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• v.7 no.2 s.24
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• pp.99-106
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• 2007

The purpose of this study presents in Relations between cracks in self-leveling material and quality of floor groundwork surface are experimentally examined. As the first stage, the experiment to observe cracks in self-leveling material constructed on floor groundwork made from various kinds of concrete was carried. As a result, following basic findings were obtained. First, observation of cracks should be continued until an increase in width of cracks stop, without constructing any finishing material. Second, degree of cracks may be indicated quantitatively by the product of length and width. Finally, Cracks and separation is not be influenced by specimen size. Based on these findings, the method of predicting cracks by evaluating surface layer quality of floor groundwork will be established.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.285-285
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• 2006

The ionic layer-by-layer (LBL) assembled films can be formed by sequentially dipping of substrates to oppositely charged polyions solution in the multilayer, called polyelectrolytes multilayer (PEM) films. Easy way of these assemblies of charged polymers offer the ability to adjust important parameters such as controllability of thickness in the nanometer-scale level and functionality of most top layer of PEM films. Nevertheless, we do not know of any trials to fabricate PEM organic films into nanometer size. Herein, we show the integration of the LBL technique with DPN in fabricating nanometer size patterns of multilayered polyelectrolyte structures. Through the use of single and multiple cantilever AFM probes, we demonstrate the parallel writing capabilities of DPN.

• Proceedings of the IEEK Conference
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• 2000.11b
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• pp.241-244
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• 2000

To investigate the compact effect of the different area of an active layer and the different type of heatsink on the junction to ambient transient thermal impedance, we have characterized the thermal behavior of power MOSFETs that have three different areas of an active layer and two types of heatsink. To do so, the "cooling curve method" has been used in order to measure the junction-to-ambient transient thermal impedance Zthja that represents the thermal behavior of the devices. The measured data depiets that the larger area of an active layer gives the better-in other words. smaller-thermal impedance, and that the larger size of a heatsink improves the thermal impedance.

• Proceedings of the IEEK Conference
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• 1999.11a
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• pp.1123-1126
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• 1999

In this paper, we propose a real-time implementation of the MPEG-1 layer III and MPEG-2 layer III LSF audio decoding system based on OAK DSP Core. In order to solve the problem of resolution, the system has been used floating-point operation and double precision in dequantization module. The size of ROM is reduced by using the Run-length algorithm of reordered index. The subband synthesis filter module is optimized to have low computational complexity in terms of the size of ROM or RAM. To construct a efficient system, we used both the DSP Core and Parser-Huffman decoder which is implemented with VHDL.

• Proceedings of the Korea Electromagnetic Engineering Society Conference
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• 2003.11a
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• pp.506-510
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• 2003

In this paper, a meander-line chip antenna with stacked layer is suggested, designed and fabricated employing the LTCC(Low Temperature Co-fired Ceramic) fabrication techniques. To reduce the antenna chip size, the meander-line antenna strip is distributed over three layer. Layers one interconnected using via holes. A 2.4 GHz chip antenna with size of $3.75{\times}7.9{\times}1.0 mm^3$ is designed and fabricated using the LTCC technique. Measurements of the fabricated antenna show 160 MHz bandwidth and 3.75 dBi maximum gain. The Measured reflection coefficient and radiation patterns agree well with the prediction by electromagnetic simulation.

• Journal of the Korean Society of Safety
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• v.32 no.2
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• pp.112-116
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• 2017

Present study investigated the influence of time step size, turbulent eddy viscosity, and the number of layer on rapid and unsteady propagation of dam break flow. When the time step size had a value such that it resulted in Cr of 0.89, a significant numerical oscillation was observed in the vicinity of the wave front. Higher turbulent viscosity ensured smooth and mild slope of velocity and water stage compared with the flow behavior by no viscosity. The vertical velocity at the lower layer positioned near the bottom showed lower velocity compared with other layers.

• Journal of Information Processing Systems
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• v.14 no.5
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• pp.1075-1086
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• 2018

In this paper a cross-validation algorithm for training probabilistic neural networks (PNNs) is presented in order to be applied to automatic face identification. Actually, standard PNNs perform pretty well for small and medium sized databases but they suffer from serious problems when it comes to using them with large databases like those encountered in biometrics applications. To address this issue, we proposed in this work a new training algorithm for PNNs to reduce the hidden layer's size and avoid over-fitting at the same time. The proposed training algorithm generates networks with a smaller hidden layer which contains only representative examples in the training data set. Moreover, adding new classes or samples after training does not require retraining, which is one of the main characteristics of this solution. Results presented in this work show a great improvement both in the processing speed and generalization of the proposed classifier. This improvement is mainly caused by reducing significantly the size of the hidden layer.

• Journal of the Korean Vacuum Society
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• v.4 no.4
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• pp.367-372
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• 1995

We investigate the Au(001) surface reconstruction, numerically, by Molecular Dynamics (MD) simulation. We find that the top-most layer of Au(001) surface is reconstructed to a contracted hexagonal face, and relaxed about 0.05$\AA$ upward at room temperature. The contraction ratio with respect to a unreconstructed Au(111) surface is about 3.5%. The hexagonal layer is slightly distorted and buckled. The surface corrugation is found to be about 0.28$\AA$ on average. In our earlier work we have predicted the in-plane orientation of the reconsturcted layer to be either $0^{\circ}$ or $0.7^{\circ}$ depending on the size of the cluster. However, we find only $0.0^{\circ}$ in this simulation because the size of the cluster correspoding to the $0.7^{\circ}$ orientation is larger than the current limitation of MD simulation. These findings are in good agreement with experimental results.