• 제목/요약/키워드: Single crystal diamond

검색결과 94건 처리시간 0.023초

HFCVD에 의한 증착압력 변화에 따른 Single Crystal Diamond 합성 (Synthesis of Single Crystal Diamond by Variation of Deposition Pressure by HFCVD)

  • 김민수;배문기;김성우;김태규
    • 열처리공학회지
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    • 제33권1호
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    • pp.20-24
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    • 2020
  • Single crystal diamonds are in great demand in such fields as mechanical, electronic applications and optoelectronics. Large area single crystal diamonds are attracting attention in future industries for mass production and low cost. In this study, hot filament CVD (HFCVD) is used to grow large area single crystal diamond. However, the growth rate of large area single crystal diamond using HFCVD is known to be very low. The goal of this study is to use single crystal diamond substrates in HFCVD with methane-hydrogen gas mixtures to increase the growth rate of single crystal diamond and to optimize the conditions by analysing the effects of deposition conditions for high quality crystallinity. The deposition pressure, the ratio of CH4/H2 gas, the substrate temperature and the distance between the filament and the substrate were optimized. The sample used a 4×4 (mm2) size single crystal diamond substrate (100), the CH4/H2 gas ratio was fixed at 5%, the substrate temperature was synthesized to about 1000℃. At this time, the deposition pressure was changed to three types of 50, 75, 85 Torr and deposited. Finally, optimization was investigated under pressure conditions to analyse the growth rate and quality of single crystal diamond.

표면개질에 의한 헤테로에피텍시 단결정 다이아몬드의 결정성 향상 (Improving the Crystallinity of Heteroepitaxial Single Crystal Diamond by Surface Modification)

  • 배문기;김민수;김성우;윤수종;김태규
    • 열처리공학회지
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    • 제33권3호
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    • pp.124-128
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    • 2020
  • Recently, many studies on growth of single crystal diamond using MPECVD have been conducted. The heteroepitaxial method is one of the methods for growing diamonds on a large-area substrate, and research on synthesis of single crystal diamonds using SrTiO3, MgO, and sapphire substrates has been attempted. In addition, research is being conducted to reduce the internal stress generated during diamond growth and to improve the crystallinity of the diamond. The compressive stress generated therein causes peeling and bowing from the substrate. This study aimed to synthesize heteroepitaxial single crystal diamonds with high crystallinity by surface modification. A diamond thin film was first grown on a sapphire/Ir substrate by MPECVD, and then etched with H2 gas to modified the morphology and roughness of the surface. A secondary diamond layer was grown on the surface, and the internal stress, crystallinity of the diamond were investigated. As a result, the fabrication of single crystal diamonds with improved crystallinity was confirmed.

니켈절삭시 CBN, 소결 및 단결정 다이아몬드 공구의 마멸과 예측에 관한 연구 (A Study on the Tool Wear and Prediction of CBN, Poly Crystal and Single Crystal Diamond Tools in Cutting of Nickel)

  • 성기석;김정두
    • 대한기계학회논문집
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    • 제17권1호
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    • pp.120-130
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    • 1993
  • 본 연구에서는 니켈의 가공시 나타나는 공구의 마멸에 대한 정량화 및 절삭변 수와의 연관성에 대한 연구는 그 자체가 마멸에 대한 데이터 베이스 측면에서 중요하 고, 이러한 접근방법으로는 연구가 거의 이루어지지 않았다는 측면에서도 큰 의미를 갖는다. 본 연구는 특히 경도가 큰 공구인 CBN, 소결 다이아몬드(poly crystal dia- mond 이하 PCD), 단결정 다이아몬드(single crystal diamond 이하 SCD)공구를 사용하 여 니켈의 절삭에서 나타나는 공구의 마멸에 대한 분석을 선행한 후 수집한 정보로부 터 절삭속도, 이송, 절삭깊이 및 공구의 nose반경이 공구의 마멸 및 표면의 성상(su- rface quality)에 미치는 영향에 대하여 고찰하였고 절삭조건의 변화에 따라 마멸에 대한 예상 곡선을 구하였다.

On the Possibility of Bulk Large Diamond Single Crystal Synthesis with Hydrothermal Process

  • Andrzej M. Szymanski
    • 한국광물학회지
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    • 제10권1호
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    • pp.18-32
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    • 1997
  • Analysis of geological data, relating to occurrence and formation of diamonds as well as host rocks, inclined author to have different outlook on the diamond genesis and to establish a proposition on their formation at pneumatolytic-hydrothermal conditions near superficial Earth zones. Based on that theoretical foundations and experimental works, the first low-pressure and low-temperature hydrothermal diamond synthesis from water solution in pressure autoclave was executed. As a result, the natural diamond seed crystal grew bigger ad coupling of the synthetic diamond single-crystalline grains were obtained. SEM documentation proofs that parallely paragenetic crystallization of quartz and diamond, and nucleation of new octahedral diamond crystals brush take place on the seed crystal surface. Forecast of none times growth of diamond industrial application at 2000 and seventeen times at 2010 with reference to 1995, needs technology of large and pure single-crystals diamond synthesis. Growth of the stable and destressed diamond single-crystals in the pseudo-metastable diamond plot, may be realized with processes going through the long time and with participation of free radicals catalysts admixtures only. Sol-gel colloidal processes are an example of environment which form stable crystals in thermodynamically unstable conditions through a long time. Paper critically discusses a whole way of studies on the diamond synthesis, from high-pressure and high-temperature processes through chemical vapour deposition up to hydrothermal experiments.

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단결정 다이아몬드의 연마특성(1)-각 결정면의 연마 이방성- (The lapping characteristics of single crystal diamond(1st report) -lapping anisotropy of the crystal planes-)

  • 장광균;상신겸차랑;옥촌겸태랑
    • 한국정밀공학회지
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    • 제10권1호
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    • pp.147-152
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    • 1993
  • The lapping characteristics of single crystal diamond are studied by considering the crystallographic anisotropy. It is introduced for lapping method to identify crystallographic orientantion by the X-ray diffraction and to measure lapping force ratio, lapping temperature and lapping wear. Diamound bonded wheels are used for lapping under dry condition. On the lapping {110} and {100} planes, it shows remarkable crystallographic anistropy. The lapping force ratio, temperature and wear become gerater with sliding direction along the <100> than along <110>. The results also show that the wear of diamond is influenced by mechanical work(tangential lapping force * lapping distance) as well by lapping speed.

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전해니켈도금된 대면적 롤금형 가공시 단결정 다이아몬드공구의 마모에 관한 연구 (Wear of Single Crystal Diamond(SCD) Tools in Ultra Precision Turning of Electro-Nickel Plated Drum)

  • 이동윤;홍상현;강호철;최헌종;이석우
    • 대한기계학회논문집A
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    • 제33권7호
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    • pp.621-628
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    • 2009
  • Nickel-phosphorus alloys are attractive materials for diamond turning applications such as fabrication of large optics and other high precision parts. It is also well-known that the higher phosphorus content of the alloys minimizes the diamond tool wear. Due to the weakness of electoless nickel plating that the phosphorus contents is limited to 13-14% (wgt), increased attention has been paid at electro-nickel plating which enables the alloys with 15-16% phosphorus. In this study, experiments were carried out to observe the wear characteristic of single crystal diamond tools in micro-grooving of electro-nickel plated drums. The experiments shows that long distance (50km) machining of micro-grooving on electro-nickel plated drum is possible with a single crystal diamond tool without any significant tool wear and defective machined surface.

영상처리를 이용한 초정밀가공용 다이아몬드 공구의 마멸 측정 (Wear Mwarsurement of Single Crystal Diamond Tool Using Image Processing)

  • 양민양
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.135-139
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    • 1996
  • In this a paper, a new method to measure the wear of the single crystal diamond(SCD) tool using image processing is presented. To increase resoultion, high magnifying lens is used and to enlarge the measurement field of view, a image region matching method is applied. The shape of SCD tool is modeled by mathematical analysis. Cutting edge chipping and wear are calculated by the model. This method is proved to be efficient in detecting a few micron of wear and cutting edge loss by chipping along the whole cutting edge.

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철강재료의 다이아몬드절삭에 있어서 단속절삭가공법의 적용에 의한 공구마모억제 (Control of Tool Wear in Diamond Cutting of Steels by Intermittent Cutting Method)

  • 송영찬;근진건태랑;박천홍;삼협준도
    • 한국정밀공학회지
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    • 제25권6호
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    • pp.40-46
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    • 2008
  • Ultraprecision cutting of steels with geometrically defined single crystal diamond tools is handicapped by excessive tool wear. This paper presents a new approach to suppress the wear of single crystal diamond tool in cutting of steels. In general, it is said that the wear of diamond tool is caused by chemically reactive wear under high temperature and high pressure conditions. In order to suppress such chemical reactions, the time of contact between the diamond tool and the steel work in cutting was controlled by employing the intermittent cutting method such as fly-cutting. Series of intermittent cutting experiments have been carried out to control the tool-work contact time by changing one cycle of cutting length and cutting speed. The experimental results were shown that the tool wear was much dependent on the contact time regardless of the cutting speed, and that the wear was much suppressed by reducing the tool-work contact time. It is expected that the steels can be successfully cut with a single crystal diamond tool by controlling the contact time.

Assessment of Subsurface Damage in Ultraprecision Machined Semiconductors

  • Lucca, D.A.;Maggiore, C.J.;Rhorer, R.L.;Wang, Y.M.;Seo, Y.W.
    • Tribology and Lubricants
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    • 제11권5호
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    • pp.156-161
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    • 1995
  • The subsurface damaged layer in ultraprecisison machined single crystal Ge was examined by ion channeling. Single crystal Ge surfaces were prepared by chemo-mechanical polishing, mechanical polishing with 1/4 gm diamond abrasive, single point diamond turning and ultraprecision orthogonal flycutting. The extent of subsurface lattice disorder was compared to the crystal's orginal surface quality. Ion channeling is seen to be useful for quantitative measure of lattice disorder in finely finished surfaces.