• 제목/요약/키워드: SimpleProbe

검색결과 200건 처리시간 0.033초

간단한 RF 보상 정전탐침법을 이용한 유도결합형 플라즈마 특성 연구 (A Study on the Characteristics of Inductively Coupled Plasma Using Simple RF Compensated Langmuir Probe)

  • 김윤기;위성석;김태환;김동현;이해준;이호준
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1528-1529
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    • 2011
  • 플라즈마 변수를 측정하기 위한 가장 일반적인 방법은 정전탐침(Langmuir Probe)을 이용하는 것이다. 정전탐침은 RF 플라즈마 내에 삽입될 경우 탐침의 전위가 플라즈마 전위에 의해 진동하여 탐침전류의 왜곡이 발생하여 정확한 플라즈마 변수 측정이 어렵다. 탐침 전위의 변동을 최소화하기 위해 임피던스가 큰 인덕터를 탐침 회로 내에 삽입한다. 본 연구에서는 자기 공명 주파수가 13.56MHz 근방의 인덕터 3종류를 선정하여 간단한 RF 보상 정전탐침을 제작하여 유도결합형 플라즈마의 특성을 측정하였다. RF 보상 정전탐침에 의해 구해진 플라즈마의 전자 온도 및 플라즈마 전위는 감소하며, 플라즈마의 전자 밀도는 증가함을 알 수 있었다.

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Efficient Multi-site Testing Using ATE Channel Sharing

  • Eom, Kyoung-Woon;Han, Dong-Kwan;Lee, Yong;Kim, Hak-Song;Kang, Sungho
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제13권3호
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    • pp.259-262
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    • 2013
  • Multi-site testing is considered as a solution to reduce test costs. This paper presents a new channel sharing architecture that enables I/O pins to share automatic test equipment (ATE) channels using simple circuitry such as tri-state buffers, AND gates, and multiple-input signature registers (MISR). The main advantage of the proposed architecture is that it is implemented on probe cards and does not require any additional circuitry on a target device under test (DUT). In addition, the proposed architecture can perform DC parametric testing of the DUT such as leakage testing, even if the different DUTs share the same ATE channels. The simulation results show that the proposed architecture is very efficient and is applicable to both wafer testing and package testing.

21CM 우주전파 수신용 안테나의 제작 (CONSTRUCTION OF 21CM COSMIC RADIO ANTENNA)

  • 박종애;양종만;한석태;박용선
    • 천문학논총
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    • 제8권1호
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    • pp.1-15
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    • 1993
  • We made a pyramidal horn antenna system for 21cm cosmic radio wave. The antenna system has a rectangular waveguide with $TE_{10}$ mode and a copper probe to detect the electromagnetic wave in waveguide. The parameters of the probe are obtained by experiments using two waveguides. Pyramidal horn antenna is designed to get a gain of 20dB. The size of the aperture of this horn is $94cm{\times}74cm$. The beam width of half power is about $14.7^{\circ}$ for the frequency of 1.4GHz. The horn is made of aluminum plate with a thickness of 2mm. The signal from horn and waveguide is amplified in a receiver system and is converted into DC in the detecter. The intensity of the signal is recorded on a chart recorder. We observed the sun using this simple radio telescope and obtained the brightness temperature of $2.2{\times}10^5K$, which indicates that the sun is quiet at 21cm.

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Simple Technique for Measurement of Complex Permittivity and Detection of Small Permittivity Change Using Partially Open Cavity

  • Park, Sangbok;Chung, Young-Seek;Cheon, Changyul
    • Journal of Electrical Engineering and Technology
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    • 제9권1호
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    • pp.268-272
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    • 2014
  • This letter presents a measurement methodology of the complex permittivity of liquid using a partially open cavity in narrow band. The partially open cavity (POC) can measure dielectric small changes caused by the temperature variation of the liquid inside the cavity as well. Using the resonance frequency and unloaded quality factor of the proposed POC, the complex permittivity is evaluated. The apertures on the walls of the cavity are designed to circulate the liquid inside to outside of the POC and located at the corner area of the cavity to minimize the disturbance of field distribution at the dominant mode. The results measured by the proposed POC were compared with those by the conventional open-ended probe and Cole-Cole equation. The POC showed better performance in measuring small dielectric constant changes than the open-ended probe.

An Indirect Method to Monitor Plasma Status in a Transformer Coupled Plasma

  • 유대호;안승규;김지훈;장홍영
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.216-216
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    • 2011
  • There have been various direct or indirect methods to measure the characteristics of plasma. Comparing to direct method like Langmuir probe method, indirect measurements which give information as some external parameters like current, voltage, or phase are easier to obtain. In this research, an indirect method to measure averaged plasma density in a transformer coupled plasma(TCP) has been proposed and evaluated. With a simple analytic model connecting electrical characteristics to plasma impedance, direct measurement via double Langmuir probe has been performed. This result may play a meaningful role to diagnose TCP or similar plasma sources

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Power Dissipation in a RF Capacitively Coupled Plasma

  • Tran, T.H.;You, S.J.;Kim, J.H.;Seong, D.J.;Jeong, J.R.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.203-203
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    • 2013
  • Low pressure plasmas play a key role in many areas including electronic, aerospace, automotive, biomedical, and toxic waste management industries, and the advantages of the plasma are well known the processing procedure is established. However, the insight behavior of the discharges remains a mystery, even though a simple geometry as capacitive discharges. In this work, we measured RF power dissipation in capacitively coupled plasma (CCP) at various experiment conditions with potential probe and RF current probe. Through the results, we will have a clearer view of the inner nature of the CCP.

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Simple image artifact removal technique for more accurate iris diagnosis

  • Kim, Jeong-lae;Kim, Soon Bae;Jung, Hae Ri;Lee, Woo-cheol;Jeong, Hyun-Woo
    • International journal of advanced smart convergence
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    • 제7권4호
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    • pp.169-173
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    • 2018
  • Iris diagnosis based on the color and texture information is one of a novel approach which can represent the current state of a certain organ inside body or the health condition of a person. In analysis of the iris images, there are critical image artifacts which can prevent of use interpretation of the iris textures on images. Here, we developed the iris diagnosis system based on a hand-held typed imaging probe which consists of a single camera sensor module with 8M pixels, two pairs of 400~700 nm LED, and a guide beam. Two original images with different light noise pattern were successively acquired in turns, and the light noise-free image was finally reconstructed and demonstrated by the proposed artifact removal approach.

정전형 8중극 비점수차 보정기가 내장된 극초소형 마이크로컬럼의 구조 설계 연구 (Study on the Structural Design of an Ultra-miniaturized Microcolumn with a Built-in Electrostatic Octupole Stigmator)

  • 오태식
    • 반도체디스플레이기술학회지
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    • 제22권3호
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    • pp.52-61
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    • 2023
  • We designed a novel ultra-miniaturized microcolumn structure having an stigmator to significantly improve throughput per unit time, which is the biggest disadvantage of microcolumns. We adopted the structure of the stigmator in the form of an electrostatic octupole electrode, and used an electrostatic quadrupole deflector with a relatively simple structure considering the increase in wiring due to the introduction of the stigmator. We have dramatically reduced the effect of astigmatism that occurs when the electron beam probe is scanned to the periphery of the target by introducing the stigmator between the control electrode and the deflector. As our numerical analysis simulation results, the field of view obtained as a result of this study is about 46.3% improved compared to our previous study, and the electron beam probe size of less than 10 nm was achieved in the entire field of view.

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전자현미경 In Situ Hybridization에 의한 Viral RNA의 진단에 관한 연구 (Studies on In Situ Hybridization of Electron Microscopy for Detection of Viral RNA)

  • 최원기;주경웅;김석홍
    • 대한의생명과학회지
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    • 제2권2호
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    • pp.257-265
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    • 1996
  • 토끼 바이러스성 출혈증의 원인체를 실험 토끼에 접종하여 증식을 유도하고 간장에서 hematoxylin & eosin 염 색 에서 조직학적 진단과 세포내 viral RNA의 소재를 결정하기 위해 post-unicryl 포매한 block의 절편을 사용하여 단 염색과 전자현미경적 in situ hybridization을 시도하였다. 토끼 출혈증 viral RNA의 보합 결합에 이용하는 probe는 4717에서 4800(84bases)까지 oligonucleotide를 5'말단에 biotin-CE phosphoramidite로 표지하여 사용하였다. 보합결합물의 증명은 신호 표지로서 antibiotin antibody-l0nm gold를 사용하였으며, hybridization이나 증명은 기존 protocol에서 약간의 변법을 사용하였다. 0.02% glutaraldehyde에서 고정하고 unicryl resin 포매한 표본, biotinylated oligonucleotide probe, antibiotin antibody-l0nm gold로 실험한 결과 증강된 신호를 얻을 수 있었다. 특히 전처리를 생략하므로써 실험 과정을 간단하게 하여 신속한 결과를 얻을 수가 있었다. 전자현미경 in situ hybridization을 통하여 토끼 출혈증 바이러스의 주요 표적은 간세포로 감염 세포의 세포질 내 미토콘드리아와 핵 사이에서 immune gold입자가 뚜렷하게 표지 됨으로서 viral RNA를 증명할 수 있었다.

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몽골 유래 Brucella melitensis 동정 및 특이 SNP를 이용한 real-time PCR법에 의한 진단 평가 (Identification of Brucella melitensis isolates originating from Mongolia and diagnostic real-time PCR evaluation using a specific SNP)

  • 강성일;김지연;김숙미;이진주;성소라;김연희;정석찬;허문
    • 대한수의학회지
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    • 제55권2호
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    • pp.105-110
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    • 2015
  • A real-time PCR assay using hybridization probe (HybProbe) has been developed to detect Brucella (B.) melitensis strains. The primer and HybProbe sets were designed based on the gap gene of chromosome I with a specific single nucleotide polymorphism of B. melitensis. Specificity of the assay was confirmed by comparison to reference Brucella species and other related strains. In the melting curve analysis, B. melitensis generated a peak at $67^{\circ}C$ unlike those for other Brucella species observed at $61^{\circ}C$. Sensitivity of the assay for B. melitensis ranged from 20 ng to 200 fg of genomic DNA. The ability to identify 94 Mongolian B. melitensis isolates using the real-time PCR assay was identical to that of classical biotyping methods and differential multiplex PCR. These data showed that this new molecular technique is a simple and quick method for detecting B. melitensis, which will be important for the control and prevention of brucellosis.