• Journal of Advanced Marine Engineering and Technology
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• 제33권8호
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• pp.1137-1143
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• 2009

화학적, 전기적 안정성을 가진 FC-72 냉매를 사용하여 매끈한 표면과 마이크로 핀 표면 사이의풀 비등 열전달 성능을 평가하기 위한 실험을 수행하였다. 폭과 높이의 치수가 $100{\mu}m\;{\times}\;10{\mu}m$, $150{\mu}m\;{\times}\;10{\mu}m$ and $200{\mu}m\;{\times}\;10{\mu}m$인 세 종류의 마이크로 핀을 실리콘 칩 표면 위에 가공하였다. 실험은 5, 10 and 15 K의 액체 과냉도에서 이루어졌다. 세 종류의 마이크로 핀 중에서 핀 폭이 $200{\mu}m$인 핀 표면에서 풀 비등 열전달 성능이 더 좋게 나타났다. 또한, 마이크로 핀 표면은 매끈한 표면과 비교했을 때 벽면 과열도가 증가함에 따라 열유속이 급격히 증가하였으며, 열전달도 향상되었다.

• The Journal of Advanced Prosthodontics
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• 제5권2호
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• pp.98-103
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• 2013

PURPOSE. To evaluate the effects of hydrofluoric acid etching and Er,Cr:YSGG laser irradiation on the shear bond strength of resin cement to lithium disilicate ceramic. MATERIALS AND METHODS. Fifty-five ceramic blocks ($5mm{\times}5mm{\times}2mm$) were fabricated and embedded in acrylic resin. Their surfaces were finished with 1000-grit silicon carbide paper. The blocks were assigned to five groups: 1) 9.5% hydrofluoric-acid etching for 60 s; 2-4), 1.5-, 2.5-, and 6-W Er,Cr:YSGG laser applications for 60 seconds, respectively; and 5) no treatment (control). One specimen from each group was examined using scanning electron microscopy. Ceramic primer (Rely X ceramic primer) and adhesive (Adper Single Bond) were applied to the ceramic surfaces, followed by resin cement to bond the composite cylinders, and light curing. Bonded specimens were stored in distilled water at $37^{\circ}C$ for 24 hours. Shear bond strengths were determined by a universal testing machine at 1 mm/min crosshead speed. Data were analyzed using Kruskal-Wallis and Mann-Whitney U-tests (${\alpha}$=0.05). RESULTS. Adhesion was significantly stronger in Group 2 ($3.88{\pm}1.94$ MPa) and Group 3 ($3.65{\pm}1.87$ MPa) than in Control group ($1.95{\pm}1.06$ MPa), in which bonding values were lowest (P<.01). No significant difference was observed between Group 4 ($3.59{\pm}1.19$ MPa) and Control group. Shear bond strength was highest in Group 1 ($8.42{\pm}1.86$ MPa; P<.01). CONCLUSION. Er,Cr:YSGG laser irradiation at 1.5 and 2.5 W increased shear bond strengths between ceramic and resin cement compared with untreated ceramic surfaces. Irradiation at 6 W may not be an efficient ceramic surface treatment technique.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.187-196
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• 2005

MEMS에서 제조 공정 오차 및 외부 응력은 진동형 자이로스코프와 같은 MEMS 소자의 제조 수율에 많은 영향을 미친다. 특히 비연성 진동형 자이로스코프의 경우 감지모드와 구동모드의 주파수 차의 특성은 수율에 직접적인 영향을 미친다. SOI (Silicon-On-Insulator) 공정 및 양극접합 공정으로 패키징된 자이로스코프의 경우, 노칭현상으로 인하여 구조물이 불균일하게 가공되며, 동시에 열팽창계수 차로 인하여 접합된 기판에 큰 휨이 발생한다. 그 결과주파수 차의 분포가 커지고, 동시에 수율은 저하되었다. 이를 개선하기 위하여 SiOG (Silicon On Glass) 기술을 적용하였다. SiOG 공정에서는 접합 후에 기판의 휨을 최소화 하기 위하여 1장의 실리콘 기관과 2장의 유리 기판을 사용하였으며, 노칭을 방지하기 위하여 금속 박막을 사용하였다. 그 결과 노칭 현상이 방지되었으며, 기판의 휨도 감소하였다. 또한 주파수 차의 분포도 매우 균일하게 되었으며, 주파수 차의 편차 또한 개선이 되었다. 그 결과 높은 수율 및 보다 강건한 MEMS 자이로스코프를 개발할 수 있었다.

• 한국결정성장학회:학술대회논문집
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• 한국결정성장학회 2000년도 Proceedings of 2000 International Nano Crystals/Ceramics Forum and International Symposium on Intermaterials
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• pp.165-177
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• 2000

Ceramic on ceramic total hip prostheses are developed to apply to young patients because lifetime of polyethylene joint prostheses is limited by loosening due to biological response. As mating faces of all-ceramic joint must be highly conformed to reduce stress concentration, wear properties of flat surfaces are investigated in this study. Through wear tests at 2 MPa of contact pressure and 36 mm/s of sliding velocity, alumina and silicon carbide keep low wear rate, high hardness and smooth surface. Soft surface film was detected after the test in bovine serum. This suggests that boundary lubrication is effective to reduce wear in all-ceramic joint.

• Bulletin of the Korean Chemical Society
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• 제33권3호
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• pp.775-778
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• 2012

The potential energy surfaces of ammonia molecule adsorptions on the symmetrically chlorinated Si(100)-$2{\times}1$ surface were explored with SIMOMM:MP2/6-31G(d). It was found that the initial nucleophilic attack by ammonia nitrogen to the surface Si forms a $S_N2$ type transition state, which eventually leads to an HCl molecular desorption. The second ammonia molecule adsorption requires much less reaction barrier, which can be rationalized by the surface cooperative effect. In general, it was shown that the surface Si-Cl bonds can be easily subjected to the substitution reactions by ammonia molecules yielding symmetric surface Si-$NH_2$ bonds, which can be a good initial template for subsequent surface chemical modifications. The ammonia adsorptions are in general more facile than the corresponding water adsorption, since ammonia is better nucleophile.

• 한국정밀공학회지
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• 제9권2호
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• pp.22-28
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• 1992

This paper is studied about the method to measure the fine scratches on the mirror surfaces, such as the silicon wafer and magnetic memory disk by the optical measuring method. The theoretical background of this analysis is based upon the light scattering theory developed by Beckmann. In this analysis, the roughness in fine scratches is not considered because the aberage roughness is very small compared with the size of fine scratches. Empasis is on quantilaive method of fine scratches by non-contact method. Experiments are followed by the image processing system attached to the CCD Camera. As a results, I propose the new method to measure the size of the fine scratches from the parameters obtained by the computer simulation and experiments.

• 설비공학논문집
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• 제12권4호
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• pp.381-387
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• 2000

An experimental study on the stratified fluids was carried out to investigate the flow characteristics, heat transfer through the interface of fluids, and the applications of thermal behaviors in the square cavity. The same volume of water and silicon oil was filled in it. The experiments were performed with the variations of initial temperatures and cooling surface temperatures. And the effect of vertical or horizontal cooling surface positions in the square cavity was investigated. When the cooling surface temperatures were $-4^{\circ}C$ , the supercooling phenomena were observed for both cases of cooling surface positions in the full region regardless of the initial temperature of fluid. In the square cavity with horizontal cooling surfaces, the lower the initial temperatures were, the longer the supercooling durations were, and with vertical cooling surface the lower the initial temperatures were, the shorter the supercooling durations were.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 제35회 춘계학술대회
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• pp.40-44
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• 2002

The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.

• 한국산학기술학회:학술대회논문집
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• 한국산학기술학회 2002년도 춘계학술발표논문집
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• pp.218-221
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• 2002

80년대 반도체 산업의 급격한 성장으로 오늘날 반도체 산업은 반도체소자의 초고집적화, 웨이퍼의 대구경화로 발전이 거듭났으며, 소자의 성능과 생산 수율의 향상을 위하여 실리콘 웨이퍼의 세정하는 기술 및 연구를 계속 진행하고 있다. 기존의 반도체 세정은 과다한 화학약품의 사용으로 비 환경친화적이며, 이에 본 연구에서는 기존의 세정방법을 대체하기 위한 방법으로 환경친화적인 전리수를 이용한 반도체 세정법을 하였다. 이때 실리콘 웨이퍼 표면의 원자적 상태의 변화가 발생하여 다양한 방법으로 확인할 수 있다. 본 연구에서는 이러한 분석을 하기 위하여 기존세정의 화학약품과 전리수로 세정한 웨이퍼의 표면을 비교하였으며, 또한 온도 및 시간별 표면상태변화를 분석하였다. 특히 접촉각 변화에 중점을 두어 변화를 관찰하였으며, 음극수의 경우 17.28。, 양극수의 경우 34.l。의 낮은 접촉각을 얻을 수 있었다.

• Current Photovoltaic Research
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• 제4권3호
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• pp.119-123
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• 2016

We discussed various cover glass substrates available for photovoltaic (PV) modules, and investigated the fabrication methods of light trapping structures for the efficiency enhancement of PV modules: wet and dry etching or laser and direct patternings. We also introduced the analysis of haze at etched glass surfaces as a function of wavelength and also presented a anti-reflection coating technology for PV module.