• Title/Summary/Keyword: Silicon surfaces

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Heat Transfer Enhancement from Plain and Micro Finned Surfaces According to Liquid Subcooling (작동유체의 과냉도에 따른 매끈한 표면과 마이크로 핀 표면에서의 열전달 촉진에 관한 연구)

  • Lim, Tae-Woo;You, Sam-Sang;Choi, Hyeung-Sik
    • Journal of Advanced Marine Engineering and Technology
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    • v.33 no.8
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    • pp.1137-1143
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    • 2009
  • Experiments were conducted to evaluate pool boiling heat transfer performance between plain and micro finned surfaces with FC-72, which is chemically and electrically stable. Three kinds of micro fins with the dimension of $100{\mu}m\;{\times}\;10{\mu}m$, $150{\mu}m\;{\times}\;10{\mu}m$ and $200{\mu}m\;{\times}\;10{\mu}m$ (width $\times$ height) were fabricated on the surface of a silicon chip. The experiments were carried out on the liquid subcooling of 5, 10 and 15 K under the atmospheric condition. The micro finned surface with a larger fin width of $200{\mu}m$ provided a better pool boiling heat transfer performance. Also, the micro finned surfaces showed a sharp increase in heat flux with increasing wall superheat and a larger heat transfer enhancement compared to a plain surface.

Shear bond strength of resin cement to an acid etched and a laser irradiated ceramic surface

  • Kursoglu, Pinar;Karagoz Motro, Pelin Fatma;Yurdaguven, Haktan
    • The Journal of Advanced Prosthodontics
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    • v.5 no.2
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    • pp.98-103
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    • 2013
  • PURPOSE. To evaluate the effects of hydrofluoric acid etching and Er,Cr:YSGG laser irradiation on the shear bond strength of resin cement to lithium disilicate ceramic. MATERIALS AND METHODS. Fifty-five ceramic blocks ($5mm{\times}5mm{\times}2mm$) were fabricated and embedded in acrylic resin. Their surfaces were finished with 1000-grit silicon carbide paper. The blocks were assigned to five groups: 1) 9.5% hydrofluoric-acid etching for 60 s; 2-4), 1.5-, 2.5-, and 6-W Er,Cr:YSGG laser applications for 60 seconds, respectively; and 5) no treatment (control). One specimen from each group was examined using scanning electron microscopy. Ceramic primer (Rely X ceramic primer) and adhesive (Adper Single Bond) were applied to the ceramic surfaces, followed by resin cement to bond the composite cylinders, and light curing. Bonded specimens were stored in distilled water at $37^{\circ}C$ for 24 hours. Shear bond strengths were determined by a universal testing machine at 1 mm/min crosshead speed. Data were analyzed using Kruskal-Wallis and Mann-Whitney U-tests (${\alpha}$=0.05). RESULTS. Adhesion was significantly stronger in Group 2 ($3.88{\pm}1.94$ MPa) and Group 3 ($3.65{\pm}1.87$ MPa) than in Control group ($1.95{\pm}1.06$ MPa), in which bonding values were lowest (P<.01). No significant difference was observed between Group 4 ($3.59{\pm}1.19$ MPa) and Control group. Shear bond strength was highest in Group 1 ($8.42{\pm}1.86$ MPa; P<.01). CONCLUSION. Er,Cr:YSGG laser irradiation at 1.5 and 2.5 W increased shear bond strengths between ceramic and resin cement compared with untreated ceramic surfaces. Irradiation at 6 W may not be an efficient ceramic surface treatment technique.

A High Yield Rate MEMS Gyroscope with a Packaged SiOG Process (SiOG 공정을 이용한 고 신뢰성 MEMS 자이로스코프)

  • Lee Moon Chul;Kang Seok Jin;Jung Kyu Dong;Choa Sung-Hoon;Cho Yang Chul
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.3 s.36
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    • pp.187-196
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    • 2005
  • MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

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Tribology for All-Ceramic Joint Prostheses

  • Ikeuchi, K.;Kusaka, J.;Yoshida, H.
    • Proceedings of the Korea Association of Crystal Growth Conference
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    • 2000.06a
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    • pp.165-177
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    • 2000
  • Ceramic on ceramic total hip prostheses are developed to apply to young patients because lifetime of polyethylene joint prostheses is limited by loosening due to biological response. As mating faces of all-ceramic joint must be highly conformed to reduce stress concentration, wear properties of flat surfaces are investigated in this study. Through wear tests at 2 MPa of contact pressure and 36 mm/s of sliding velocity, alumina and silicon carbide keep low wear rate, high hardness and smooth surface. Soft surface film was detected after the test in bovine serum. This suggests that boundary lubrication is effective to reduce wear in all-ceramic joint.

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Adsorption Mechanisms of NH3 on Chlorinated Si(100)-2×1 Surface

  • Lee, Hee-Soon;Choi, Cheol-Ho
    • Bulletin of the Korean Chemical Society
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    • v.33 no.3
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    • pp.775-778
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    • 2012
  • The potential energy surfaces of ammonia molecule adsorptions on the symmetrically chlorinated Si(100)-$2{\times}1$ surface were explored with SIMOMM:MP2/6-31G(d). It was found that the initial nucleophilic attack by ammonia nitrogen to the surface Si forms a $S_N2$ type transition state, which eventually leads to an HCl molecular desorption. The second ammonia molecule adsorption requires much less reaction barrier, which can be rationalized by the surface cooperative effect. In general, it was shown that the surface Si-Cl bonds can be easily subjected to the substitution reactions by ammonia molecules yielding symmetric surface Si-$NH_2$ bonds, which can be a good initial template for subsequent surface chemical modifications. The ammonia adsorptions are in general more facile than the corresponding water adsorption, since ammonia is better nucleophile.

A Study on the Measurement of Fine Scratches by Scattering of Laser Light (레이저 산란광을 이용한 미소표면 결합의 측정평가법에 관한 연구)

  • Gang, Yeong-Jun
    • Journal of the Korean Society for Precision Engineering
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    • v.9 no.2
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    • pp.22-28
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    • 1992
  • This paper is studied about the method to measure the fine scratches on the mirror surfaces, such as the silicon wafer and magnetic memory disk by the optical measuring method. The theoretical background of this analysis is based upon the light scattering theory developed by Beckmann. In this analysis, the roughness in fine scratches is not considered because the aberage roughness is very small compared with the size of fine scratches. Empasis is on quantilaive method of fine scratches by non-contact method. Experiments are followed by the image processing system attached to the CCD Camera. As a results, I propose the new method to measure the size of the fine scratches from the parameters obtained by the computer simulation and experiments.

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An Experimental Study on the Low-Temperature Behavior of Stratified Fluids in the Square Cavity (저온에서 정방형 공간내 성층화된 유체의 열적거동에 관한 실험적 연구)

  • 강한용;이동석;김병철
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.12 no.4
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    • pp.381-387
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    • 2000
  • An experimental study on the stratified fluids was carried out to investigate the flow characteristics, heat transfer through the interface of fluids, and the applications of thermal behaviors in the square cavity. The same volume of water and silicon oil was filled in it. The experiments were performed with the variations of initial temperatures and cooling surface temperatures. And the effect of vertical or horizontal cooling surface positions in the square cavity was investigated. When the cooling surface temperatures were $-4^{\circ}C$ , the supercooling phenomena were observed for both cases of cooling surface positions in the full region regardless of the initial temperature of fluid. In the square cavity with horizontal cooling surfaces, the lower the initial temperatures were, the longer the supercooling durations were, and with vertical cooling surface the lower the initial temperatures were, the shorter the supercooling durations were.

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Surface Damage Characteristics of Self-Assembled Monolayer and Its Application in Metal Nano-Structure Fabrication (자기 조립 분자막의 표면파손특성 및 미세 금속 구조물 제작에의 응용)

  • Sung, In-Ha;Kim, Dae-Eun
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2002.05a
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    • pp.40-44
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    • 2002
  • The motivation of this work is to use SAM(Self-Assembled Monolayer) for developing a rapid and flexible non-photolithographic nano-structure fabrication technique which can be utilized in micro-machining of metals as well as silicon-based materials. The fabrication technique implemented in this work consists of a two-step process, namely, mechanical scribing followed by chemical etching. From the experimental results, it was found that thiol on copper surface could be removed even under a few nN normal load. The nano-tribological characteristics of thiol-SAM on various metals were largely dependent on the native oxide layer of metals. Based on these findings, nano-patterns with sub-micrometer width and depth on metal surfaces such as Cu, Au and Ag could be obtained using a diamond-coated tip.

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A study on silicon wafer surfaces treated with electrolyzed water (전리수에 의한 Si 웨이퍼 표면 변화 연구)

  • 김우혁;류근걸
    • Proceedings of the KAIS Fall Conference
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    • 2002.05a
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    • pp.218-221
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    • 2002
  • 80년대 반도체 산업의 급격한 성장으로 오늘날 반도체 산업은 반도체소자의 초고집적화, 웨이퍼의 대구경화로 발전이 거듭났으며, 소자의 성능과 생산 수율의 향상을 위하여 실리콘 웨이퍼의 세정하는 기술 및 연구를 계속 진행하고 있다. 기존의 반도체 세정은 과다한 화학약품의 사용으로 비 환경친화적이며, 이에 본 연구에서는 기존의 세정방법을 대체하기 위한 방법으로 환경친화적인 전리수를 이용한 반도체 세정법을 하였다. 이때 실리콘 웨이퍼 표면의 원자적 상태의 변화가 발생하여 다양한 방법으로 확인할 수 있다. 본 연구에서는 이러한 분석을 하기 위하여 기존세정의 화학약품과 전리수로 세정한 웨이퍼의 표면을 비교하였으며, 또한 온도 및 시간별 표면상태변화를 분석하였다. 특히 접촉각 변화에 중점을 두어 변화를 관찰하였으며, 음극수의 경우 17.28。, 양극수의 경우 34.l。의 낮은 접촉각을 얻을 수 있었다.

Current status of light trapping in module cover glass for PV module (광 포획 태양전지 모듈 커버용 유리기판 기술 현황)

  • Park, Hyeongsik;Jung, Jaesung;Shin, Myunghun;Kim, Sunbo;Yi, Junsin
    • Current Photovoltaic Research
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    • v.4 no.3
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    • pp.119-123
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    • 2016
  • We discussed various cover glass substrates available for photovoltaic (PV) modules, and investigated the fabrication methods of light trapping structures for the efficiency enhancement of PV modules: wet and dry etching or laser and direct patternings. We also introduced the analysis of haze at etched glass surfaces as a function of wavelength and also presented a anti-reflection coating technology for PV module.