• 대한전기학회:학술대회논문집
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• 대한전기학회 1991년도 추계학술대회 논문집 학회본부
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• pp.299-303
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• 1991

A lamp heated LPCVD equipment has been made. Wafer is heated by an array of fifteen tungsten halogen lamps above the front side of a wafer and pyrometer views the back side of the wafer through $CaF_2$ window. Reactor which consisits of a quartz window and a water cooled-stainless steel plate can be evacuated to $5{\times}10^{-3}$ torr with a rotary vane pump. By pyrolysis of $SiH_4$ at about $600^{\circ}C$, polysilicon has been formed on the silicon dioxide film. The measured results show that thickness nonuniformity is 15% and temperature nonuniformity is 1.1%. Because activation energy of pyrolysis of $SiH_4$ is very high, about 1.8eV, small temperature variation will induce large thickness nonuniformity. The main cause of temperature nonuniformity is unsymmetry of lamp power and an unbalanced cooling structure. Charls & Evans' SIMS result shows that the oxygen content in the deposited polysilicon is comparable to that of silicon substrate but carbon content is ten times higher.

• 한국기계가공학회지
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• 제13권1호
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• pp.107-114
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• 2014

A friction hinge system which moves without power was designed and developed using the principle of friction force, which is caused by interference between the inner diameter of a silicon cap and the outer diameter of a cylindrical roller bearing with one-way rotation in a counterclockwise direction. The system was applied to the lid of buffet ware, which moved up by external force and moved down by gravitational force. However, design conditions which included a rotation angle of the hinge of more than 80 degrees and a closing time of more than 20 seconds were required when the lid of the buffet ware closed due to gravitational force. The design safety of the friction hinge body connected to the lid of the buffet ware from the hinge system was checked on the basis of structural, fatigue and thermal analyses. The material of the shaft, cap and flange among the hinge elements was changed to polyethylene from steel to reduce the weight of the friction hinge system. An injection molding simulation was performed and injection molds of the shaft, cap and flange were created. The weight of the hinge system was decreased from 805g to 219g.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집A
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• pp.383-388
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• 2001

Effects of particle property variation of cone crack shape according to impact velocity in silicon carbide materials were investigated. The damage induced by spherical impact having different material and size was different according to materials. The size of ring cracks induced on the surface of specimen increased with increase of impact velocity within elastic contact conditions. The impact of steel particle produced larger ring cracks than that of SiC particle. In case of high impact velocity, the impact of SiC particle produced radial cracks by the elastic-plastic deformation at impact regions. Also percussion cone was formed from the back surface of specimen when particle size become large and its impact velocity exceeded a critical value. Increasing impact velocity, zenithal angle of cone cracks in SiC material was linearly decreasing not effect of impact particle size. An empirical equation, $\theta=\theta_{st}-\upsilon_p(180-\theta_{st})(\rho_p/\rho_s)^{1/2}/415$, was obtained from the test data as a function of quasi-static zenithal angle of cone crack($\theta_{st}$), the density of impact particle(${\rho}_p$) and specimen(${\rho}_s$). Applying this equation to the another materials, the variation of zenithal angle of cone crack could be predicted from the particle impact velocity.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.390-390
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• 2009

마그네트론 스퍼터링법을 이용하여 n-i-p 구조의 플렉서블 실리콘 박막태양전지용 ZnO/Ag 후면전극을 stainless steel 기판위에 제조하고 증착온도와 Ag 박막의 두께 변화에 따른 광학적 특성변화를 조사하였다. ZnO/Ag 구조의 후면전극은 RF와 DC 마그네트론 스퍼터링으로 Ag 금속 및 ZnO:Al($Al_2O_3$ 2.5%) 세라믹 타겟을 이용하여 각각 제조하였으며 증착온도는 상온 ${\sim}500^{\circ}C$로, Ag 박막두께는 100 ~ 500 nm로 변화시켰다. 증착조건 변화에 따라 제조된 후면전극의 표면거칠기 및 형상변화를 Atomic Force Mircroscope (AFM)와 Scanning electron miroscopy (SEM)으로 분석하였으며 이에 따른 반사도 변화를 UV-visible-nIR spectrometry 측정을 통하여 조사하였다. 증착온도가 증가함에 따라 Ag 박막의 표면 거칠기는 점차로 증가하였으며 증착된 후면전극의 반사도도 함께 증가함을 알 수 있었다. Ag 박막의 두께 변화에 따른 반사도 변화와 n-i-p 구조의 플렉서블 실리콘 박막태양전지에 미치는 영향을 조사하였다.

• 대한기계학회논문집B
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• 제30권10호
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• pp.957-965
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• 2006

A high-performance hot chuck is designed as a heating device for an ultra-precision flip-chip bonder with infrared alignment system. Analysis of design requirements for thermal performance leads to a radiative heating mechanism employing two halogen lamps as heating source. The heating tool is made of silicon carbide characterized by high thermal diffusivity and small thermal expansion coefficient. Experimental tests are performed to assess heat-up performance and temperature uniformity of the heating tool. It is revealed that the initial design of hot chuck results in a good heat-up speed but there exist a couple of troubles associated with control and integrity of the device. As a means to resolve the raised issues, a revised version of heating tool is proposed, which consists of a working plate made of silicon carbide and a supporting structure made of stainless steel. The advantages of this two-body heating tool are discussed and the improved features are verified experimentally.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2013년도 춘계학술대회 논문집
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• pp.112-113
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• 2013

Thin CrAlMgSiN films, whose composition were 30.6Cr-11.1Al-7.3Mg-1.2Si-49.8N (at.%), were deposited on steel substrates in a cathodic arc plasma deposition system. They consisted of alternating crystalline Cr-N and AlMgSiN nanolayers. After oxidation at $800^{\circ}C$ for 200 h in air, a thin oxide layer formed by outward diffusion of Cr, Mg, Al, Fe, and N, and inward diffusion of O ions. Silicon ions were relatively immobile at $800^{\circ}C$. After oxidation at $900^{\circ}C$ for 10 h in air, a thin $Cr_2O_3$ layer containing dissolved ions of Al, Mg, Si, and Fe formed. Silicon ions became mobile at $900^{\circ}C$. After oxidation at $900^{\circ}C$ for 50 h in air, a thin $SiO_2-rich$ layer formed underneath the thin $Cr_2O_3$ layer. The film displayed good oxidation resistance. The main factor that decreased the oxidation resistance of the film was the outward diffusion and subsequent oxidation of Fe at the sample surface, particularly along the coated sample edge.

• 한국주조공학회지
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• 제32권6호
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• pp.284-288
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• 2012

The effects of Si content on the variation of microstructure and processing window of austempered ductile cast iron were investigated. Four different Si contents between 2.42 and 3.37 wt.% were used. The influence of silicon on the microstructure and processing window of these materials were studied. Austenitizing was performed at $900^{\circ}C$ for 60min and austempering temperature were both $340^{\circ}C$ and $360^{\circ}C$ and austempering time were for 4min upto 119min and for 5min upto 160min respectively. After heat treatment, the evolution of stage I and stage II were performed by optical metallography, XRD, hardness test. The results showed that $t_2$ was delayed as Si contents was increased due to the fact that Si retarded the formation of cementite ($Fe_3C$). The high silicon content promoted the stability of the metastable two-phase combination of austenite and ausferrite.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.242-242
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• 2007

무방향성 규소강판을 lamination core 형태로 제작하여 자기적 특성을 조사 하였다. 그 결과 1차, 2차 권선수가 400turns 시료에서 보자력(Hc)과 포화자속밀도(Bs)는 최대값을 나타내었고, 보자력은 0.05Oe, 포화자속밀도는 1.8T 이었다. 현재 국내에서 생산되고 있는 무방향성 규소강판의 자속밀도값 보다 더 우수한 강을 나타내었으며, 열화특성이 자기적 특성에 미치는 영향을 통해 고효율 무방항성 규소강판 개발의 가능성을 확인하였다.

• Computers and Concrete
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• 제31권4호
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• pp.327-335
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• 2023

The most popular building material, concrete, is intrinsically linked to the advancement of humanity. Due to the ever-increasing complexity of cementitious systems, concrete formulation for desired qualities remains a difficult undertaking despite conceptual and methodological advancement in the field of concrete science. Recognising the significant pollution caused by the traditional cement industry, construction of civil engineering structures has been carried out successfully using Geopolymer Concrete (GPC), also known as High Performance Concrete (HPC). These are concretes formed by the reaction of inorganic materials with a high content of Silicon and Aluminium (Pozzolans) with alkalis to achieve cementitious properties. These supplementary cementitious materials include Ground Granulated Blast Furnace Slag (GGBFS), a waste material generated in the steel manufacturing industry; Fly Ash, which is a fine waste product produced by coal-fired power stations and Silica Fume, a by-product of producing silicon metal or ferrosilicon alloys. This result demonstrated that GPC/HPC can be utilised as a substitute for traditional Portland cement-based concrete, resulting in improvements in concrete properties in addition to environmental and economic benefits. This study explores utilising experimental data to train artificial neural networks, which are then used to determine the effect of supplementary cementitious material replacement, namely fly ash, Ground Granulated Blast Furnace Slag (GGBFS) and silica fume, on the compressive strength, tensile strength, and modulus of elasticity of concrete and to predict these values accordingly.

• 전력전자학회:학술대회논문집
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• 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
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• pp.93-97
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• 2001

A new compact, low-energy electron beam irradiator has been developed. The core-loss of silicon steels can be reduced by magnetic-domain refinement method. The irradiator was developed for the application of core-loss reduction using the method. The beam energy of the irradiator can be varied from 35 to 80 keV and the maximum current is 3mA. The irradiation area is designed to be $30\times30mm2$ now and will be upgraded to $30\times150mm2$ using a scanning magnet and scanning cone. The electron beam generated from 3 mm diameter LaB6 is extracted to the air for the irradiation of the silicon steels in the air. A special irradiation port was developed for this low-energy irradiator. A havar foil with $4.08{\mu}m$ thickness were used for the window and a cold air-cooling system keeps the foil structure by removing heat at the window. The irradiator system and its operation characteristics will be discussed.