Fabrication of MEMS Devices Using SOI(Silicon-On-Insulator)-Micromachining Technology (SOI(Silicon-On-Insulator)- Micromachining 기술을 이용한 MEMS 소자의 제작)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 한국전기전자재료학회 2001년도 하계학술대회 논문집
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- pp.874-877
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- 2001